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Volumn 44, Issue 3, 2000, Pages 323-340

`Millipede' - more than one thousand tips for future AFM data storage

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MICROMACHINING; MICROPROCESSOR CHIPS; PLASTIC FILMS; POLYMETHYL METHACRYLATES; THIN FILMS;

EID: 0033704649     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.443.0323     Document Type: Article
Times cited : (508)

References (23)
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    • R. P. Ried, H. J. Mamin, B. D. Terris, L. S. Fan, and D. Rugar, "6-MHz 2-N/m Piezorcsistive Atomic-Force-Microscope Cantilevers with Incisive Tips," J. Microelectromech. Syst. 6, 294-302 (1997).
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    • Atomic force microscope-based data storage: Track servo and wear study
    • B. D. Terris, S. A. Rishton, H. J. Mamin, R. P. Ried, and D. Rugar, "Atomic Force Microscope-Based Data Storage: Track Servo and Wear Study," Appl. Phys. A 66, S809-S813 (1998).
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    • H. J. Mamin, R. P. Ried, B. D. Terris, and D. Rugar, "High-Density Data Storage Based on the Atomic Force Microscope," Proc. IEEE 87, 1014-1027 (1999).
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    • Mamin, H.J.1    Ried, R.P.2    Terris, B.D.3    Rugar, D.4
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    • this issue
    • D. A. Thompson and J. S. Best, "The Future of Magnetic-Data Storage Technology," IBM J. Res. Develop. 44, 311-322 (2000, this issue).
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    • Thompson, D.A.1    Best, J.S.2
  • 11
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    • 5 × 5 2D AFM cantilever arrays: A first step towards a terabit storage device
    • M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Häberle, H. Rohrer, H. Rothuizen, and P. Vettiger, "Microfabrication and Parallel Operation of 5 × 5 2D AFM Cantilever Array for Data Storage and Imaging," Proceedings of the IEEE 11th International Workshop on Micro Electro Mechanical Systems (MEMS '98), Heidelberg, Germany, January 1998, pp. 8-11; M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Häberle, H. Rohrer, H. Rothuizen, P. Vettiger, G. Yaraliglu, and C. Quate, "5 × 5 2D AFM Cantilever Arrays: A First Step Towards a Terabit Storage Device," Sensors & Actuators A 73, 89-94 (1999).
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.