Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 47-53

  Thaysen, J ^a   Boisen, A ^a   Hansen, O ^a   Bouwstra, S ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BANDWIDTH; NATURAL FREQUENCIES; PROBES; RESISTORS; SIGNAL NOISE MEASUREMENT; SILICON WAFERS;

PIEZORESISTIVE SENSORS; SYMMETRICAL WHEATSTONE BRIDGE ARRANGEMENT;

MICROSENSORS;

EID: 0033742575     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00299-5     Document Type: Article

References (8)

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