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Physica Status Solidi (B) Basic Research

Volumn 245, Issue 7, 2008, Pages 1404-1424

Micro- and nanomechanical structures for silicon carbide MEMS and NEMS

(2) Zorman, Christian A a Parro, Rocco J a

a Case Western Reserve University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 55449083977 PISSN: 03701972 EISSN: 15213951 Source Type: Journal
DOI: 10.1002/pssb.200844135 Document Type: Review

Times cited : (93)

References (174)

1
- 55449129839
- US Patent #4,672,354
- A. D. Kurtz, T. A. Nunn, and R. A. Weber, US Patent #4,672,354 (1987).
- (1987)
- Kurtz, A.D.¹ Nunn, T.A.² Weber, R.A.³

2
- 38149059730
- edited by W. J. Choyke, H. Matsunami, and G. Pensl Springer-Verlag, Berlin, Heidelberg
- A. Lloyd Spetz and S. Savage, in: Silicon Carbide - Recent Major Advances, edited by W. J. Choyke, H. Matsunami, and G. Pensl (Springer-Verlag, Berlin, Heidelberg, 2003), p. 869.
- (2003) Silicon Carbide - Recent Major Advances , pp. 869
- Lloyd Spetz, A.¹ Savage, S.²

3
- 36049036818
- N. G. Wright and A. B. Horsfall, J. Phys. D, Appl. Phys. 40, 6345 (2007).
- (2007) J. Phys. D, Appl. Phys , vol.40 , pp. 6345
- Wright, N.G.¹ Horsfall, A.B.²

4
- 36049011211
- V. Cimalla, J. Pezoldt, and O. Ambacher, J. Phys. D, Appl. Phys. 40, 6386 (2007).
- (2007) J. Phys. D, Appl. Phys , vol.40 , pp. 6386
- Cimalla, V.¹ Pezoldt, J.² Ambacher, O.³

5
- 84967622880
- Imperial College Press, London
- R. Cheung, Silicon Carbide Microelectromechanical Systems for Harsh Environments (Imperial College Press, London, 2006).
- (2006) Silicon Carbide Microelectromechanical Systems for Harsh Environments
- Cheung, R.¹

6
- 84926398957
- edited by W. J. Choyke, H. Matsunami, and G. Pensl Springer-Verlag, Berlin, Heidelberg
- C. Zorman and M. Mehregany, in: Silicon Carbide - Recent Major Advances, edited by W. J. Choyke, H. Matsunami, and G. Pensl (Springer-Verlag, Berlin, Heidelberg, 2003), p. 671.
- (2003) Silicon Carbide - Recent Major Advances , pp. 671
- Zorman, C.¹ Mehregany, M.²

7
- 55449111556
- http://www.hoya.co.jp

8
- 55449099880
- P. Neudeck and J. A. Powell in: Silicon Carbide - Recent Major Advances, edited by W. J. Choyke, H. Matsunami, and G. Pensl, (Springer-Verlag, Berlin Heidelberg, 2003), p. 179.
- P. Neudeck and J. A. Powell in: Silicon Carbide - Recent Major Advances, edited by W. J. Choyke, H. Matsunami, and G. Pensl, (Springer-Verlag, Berlin Heidelberg, 2003), p. 179.

9
- 0003592795
- J. D. Parsons, Mater. Res. Soc. Symp. Proc. 97, 271 (1987).
- (1987) Mater. Res. Soc. Symp. Proc , vol.97 , pp. 271
- Parsons, J.D.¹

10
- 33747502586
- S. Nishino, J. A. Powell, and H. Will, Appl. Phys. Lett. 42, 460 (1983).
- (1983) Appl. Phys. Lett , vol.42 , pp. 460
- Nishino, S.¹ Powell, J.A.² Will, H.³

11
- 84990939412
- edited by W. J. Choyke, H. Matsunami, and G. Pensl Springer-Verlag, Berlin, Heidelberg
- M. Pons, R. Madar, and T. Billon, in: Silicon Carbide - Recent Major Advances, edited by W. J. Choyke, H. Matsunami, and G. Pensl (Springer-Verlag, Berlin, Heidelberg, 2003), p. 122.
- (2003) Silicon Carbide - Recent Major Advances , pp. 122
- Pons, M.¹ Madar, R.² Billon, T.³

12
- 55449103698
- edited by W. J. Choyke, H. Matsunami, and G. Pensl Springer-Verlag, Berlin, Heidelberg
- A. Schoner, in: Silicon Carbide - Recent Major Advances, edited by W. J. Choyke, H. Matsunami, and G. Pensl (Springer-Verlag, Berlin, Heidelberg, 2003), p. 232.
- (2003) Silicon Carbide - Recent Major Advances , pp. 232
- Schoner, A.¹

13
- 55449113870
- edited by W. J. Choyke, H. Matsunami, and G. Pensl Springer-Verlag, Berlin, Heidelberg
- Y. Sugawara, in: Silicon Carbide - Recent Major Advances, edited by W. J. Choyke, H. Matsunami, and G. Pensl (Springer-Verlag, Berlin, Heidelberg, 2003), p. 771.
- (2003) Silicon Carbide - Recent Major Advances , pp. 771
- Sugawara, Y.¹

14
- 36449003431
- C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, J. Appl. Phys. 78, 5136 (1995).
- (1995) J. Appl. Phys , vol.78 , pp. 5136
- Zorman, C.A.¹ Fleischman, A.J.² Dewa, A.S.³ Mehregany, M.⁴ Jacob, C.⁵ Nishino, S.⁶ Pirouz, P.⁷

15
- 0037197313
- C. Gourbeyre, T. Chassagne, M. Le Berre, G. Ferro, E. Gautier, Y. Monteil, and D. Barbier, Sens. Actuators A 99, 31 (2002).
- (2002) Sens. Actuators A , vol.99 , pp. 31
- Gourbeyre, C.¹ Chassagne, T.² Le Berre, M.³ Ferro, G.⁴ Gautier, E.⁵ Monteil, Y.⁶ Barbier, D.⁷

16
- 25444470243
- T. Chassagne, G. Ferro, H. Haas, H. Mank, A. Leycuras, Y. Monteil, F. Soares, C. Balloud, Ph. Arcade, C. Blanc, H. Peyre, S. Juillaguet, and J. Camassel, phys. stat. sol. (a) 202, 524 (2005).
- (2005) phys. stat. sol. (a) , vol.202 , pp. 524
- Chassagne, T.¹ Ferro, G.² Haas, H.³ Mank, H.⁴ Leycuras, A.⁵ Monteil, Y.⁶ Soares, F.⁷ Balloud, C.⁸ Arcade, P.⁹ Blanc, C.¹⁰ Peyre, H.¹¹ Juillaguet, S.¹² Camassel, J.¹³

17
- 34547315181
- M. Zielinski, S. Ndiaye, T. Chassagne, S. Juillaguet, R. Lewandowska, M. Portail, A. Leycuras, and J. Camassel, phys. stat. sol. (a) 204, 981 (2007).
- (2007) phys. stat. sol. (a) , vol.204 , pp. 981
- Zielinski, M.¹ Ndiaye, S.² Chassagne, T.³ Juillaguet, S.⁴ Lewandowska, R.⁵ Portail, M.⁶ Leycuras, A.⁷ Camassel, J.⁸

18
- 0000725696
- F. A. Khan and I. Adesida, Appl. Phys. Lett. 75, 2268 (1999).
- (1999) Appl. Phys. Lett , vol.75 , pp. 2268
- Khan, F.A.¹ Adesida, I.²

19
- 55449098032
- edited by M. Gad-el-Hak CRC Press, Boca Raton, FL, Chapt. 20
- R. Okojie, in: The MEMS Handbook, edited by M. Gad-el-Hak (CRC Press, Boca Raton, FL, 2002), Chapt. 20.
- (2002) The MEMS Handbook
- Okojie, R.¹

20
- 0141573528
- Y. Dong, C. A. Zorman, and P. Molian, J. Micromech. Microeng. 13, 680 (2003).
- (2003) J. Micromech. Microeng , vol.13 , pp. 680
- Dong, Y.¹ Zorman, C.A.² Molian, P.³

21
- 33748249083
- S. Zoppel, M. Farsari, R. Merz, J. Zehetner, G. Stangl, G. A. Reider, and C. Fotakis, Microelectron. Eng. 83, 1400 (2006).
- (2006) Microelectron. Eng , vol.83 , pp. 1400
- Zoppel, S.¹ Farsari, M.² Merz, R.³ Zehetner, J.⁴ Stangl, G.⁵ Reider, G.A.⁶ Fotakis, C.⁷

22
- 0013311973
- C. M. Su, A. Fekade, M. Spencer, and M. Wuttig, J. Appl. Phys. 77, 1280 (1995).
- (1995) J. Appl. Phys , vol.77 , pp. 1280
- Su, C.M.¹ Fekade, A.² Spencer, M.³ Wuttig, M.⁴

23
- 0012637901
- C. M. Su, M. Wuttig, A Fekade, and M. Spencer, J. Appl. Phys. 77, 5611 (1995).
- (1995) J. Appl. Phys , vol.77 , pp. 5611
- Su, C.M.¹ Wuttig, M.² Fekade, A.³ Spencer, M.⁴

24
- 0345440111
- C. Serre, A. Perez-Rodriguez, J. R. Morante, P. Gorostiza, and J. Esteve, Sens. Actuators 74, 134 (1999).
- (1999) Sens. Actuators , vol.74 , pp. 134
- Serre, C.¹ Perez-Rodriguez, A.² Morante, J.R.³ Gorostiza, P.⁴ Esteve, J.⁵

25
- 55449098346
- H. K. Henisch and R. Roy eds, Pergamon Press, New York
- H. K. Henisch and R. Roy (eds.), Silicon Carbide (Pergamon Press, New York, 1968), p. 367.
- (1968) Silicon Carbide , pp. 367

26
- 33646189697
- L. Jiang, R. Cheung, J. Hedley, M. Hassan, A. J. Harris, J. S. Burdess, M. Mehregany, and C. A. Zorman, Sens. Actuators A 128, 376 (2006).
- (2006) Sens. Actuators A , vol.128 , pp. 376
- Jiang, L.¹ Cheung, R.² Hedley, J.³ Hassan, M.⁴ Harris, A.J.⁵ Burdess, J.S.⁶ Mehregany, M.⁷ Zorman, C.A.⁸

27
- 27144443701
- K. M. Jackson, J. Dunning, C. A. Zorman, M. Mehregany, and W. N. Sharpe, Jr., J. Microelectromech. Syst. 14, 664 (2005).
- K. M. Jackson, J. Dunning, C. A. Zorman, M. Mehregany, and W. N. Sharpe, Jr., J. Microelectromech. Syst. 14, 664 (2005).

28
- 33747502822
- H. D. Espinosa, B. Peng, N. Moldovan, T. A. Friedmann, X. Xiao, D. C. Mancini, O. Auciello, J. Carlisle, C. A. Zorman, and M. Mehregany, Appl. Phys. Lett. 89, 073111 (2006).
- (2006) Appl. Phys. Lett , vol.89 , pp. 073111
- Espinosa, H.D.¹ Peng, B.² Moldovan, N.³ Friedmann, T.A.⁴ Xiao, X.⁵ Mancini, D.C.⁶ Auciello, O.⁷ Carlisle, J.⁸ Zorman, C.A.⁹ Mehregany, M.¹⁰

29
- 0030846945
- M. Mehregany, L. Tong, L. G. Matus, and D. J. Larkin, IEEE Trans. Electron Devices 44, 74 (1997).
- (1997) IEEE Trans. Electron Devices , vol.44 , pp. 74
- Mehregany, M.¹ Tong, L.² Matus, L.G.³ Larkin, D.J.⁴

30
- 8644280079
- J. Mitchell, C. A. Zorman, T. Kicher, S. Roy, and M. Mehregany, J. Aerospace Eng. 16, 46 (2003).
- (2003) J. Aerospace Eng , vol.16 , pp. 46
- Mitchell, J.¹ Zorman, C.A.² Kicher, T.³ Roy, S.⁴ Mehregany, M.⁵

31
- 55449109706
- Stockholm, Sweden
- th Int. Conf. Solid State Sens. Actuators, Stockholm, Sweden, 1995, p. 186.
- (1995) th Int. Conf. Solid State Sens. Actuators , pp. 186
- Yamaguchi, Y.¹ Nagasawa, H.² Shoki, T.³ Annaka, N.⁴

32
- 33644634565
- S. Roy, C. Zorrman, M. Mehregany, R. DeAnna, and C. Deeb, J. Appl. Phys. 99, 044108 (2006).
- (2006) J. Appl. Phys , vol.99 , pp. 044108
- Roy, S.¹ Zorrman, C.² Mehregany, M.³ DeAnna, R.⁴ Deeb, C.⁵

33
- 8744260852
- G. Krötz, H. Möller, M. Eickhoff, S. Zappe, R. Ziermann, E. Obermeier, and J. Stoemenos, Mater. Sci. Eng. B 61/62, 516 (1999).
- (1999) Mater. Sci. Eng. B , vol.61-62 , pp. 516
- Krötz, G.¹ Möller, H.² Eickhoff, M.³ Zappe, S.⁴ Ziermann, R.⁵ Obermeier, E.⁶ Stoemenos, J.⁷

34
- 0030673371
- Chicago, IL
- R. Ziermann, J. von Berg, E. Obermeier, M. Eickhoff, and G. Kroetz, Proc. Int. Conf. Solid State Sens. Actuators, Chicago, IL, 1997, p. 1411.
- (1997) Proc. Int. Conf. Solid State Sens. Actuators , pp. 1411
- Ziermann, R.¹ von Berg, J.² Obermeier, E.³ Eickhoff, M.⁴ Kroetz, G.⁵

35
- 0033618669
- R. Ziermann, J. von Berg, E. Obermeier, F. Wischmeyer, E. Neimann, H. Moller, M. Eickhoff, and G. Krotz, Mater. Sci. Eng. B 61/62, 576 (1999).
- (1999) Mater. Sci. Eng. B , vol.61-62 , pp. 576
- Ziermann, R.¹ von Berg, J.² Obermeier, E.³ Wischmeyer, F.⁴ Neimann, E.⁵ Moller, H.⁶ Eickhoff, M.⁷ Krotz, G.⁸

36
- 0344146579
- M. Eickhoff, H. Moller, G, Kroetz, J. von Berg, and R. Ziermann, Sens. Actuators 74, 56 (1999).
- (1999) Sens. Actuators , vol.74 , pp. 56
- Eickhoff, M.¹ Moller, H.² Kroetz, G.³ von Berg, J.⁴ Ziermann, R.⁵

37
- 0032024344
- K. N. Vinod, C. A. Zorman, A. Yasseen, and M. Mehregany, J. Electron. Mater. 27, L17 (1998).
- (1998) J. Electron. Mater , vol.27
- Vinod, K.N.¹ Zorman, C.A.² Yasseen, A.³ Mehregany, M.⁴

38
- 33645213339
- C. H. Wu, C. A. Zorman, and M. Mehregany, IEEE Sens. J. 6, 316 (2006).
- (2006) IEEE Sens. J , vol.6 , pp. 316
- Wu, C.H.¹ Zorman, C.A.² Mehregany, M.³

39
- 3242691456
- D. J. Young, J. Du, C. A. Zorman, and W. H. Ko, IEEE Sens. J. 4, 464 (2004).
- (2004) IEEE Sens. J , vol.4 , pp. 464
- Young, D.J.¹ Du, J.² Zorman, C.A.³ Ko, W.H.⁴

40
- 33645735072
- D. Korobkin, Y. Urzhumov, and G. Shvetz, J. Opt. Soc. Am. B 23, 468 (2006).
- (2006) J. Opt. Soc. Am. B , vol.23 , pp. 468
- Korobkin, D.¹ Urzhumov, Y.² Shvetz, G.³

41
- 33748805499
- T. Taubner, D. Korobkin, Y. Urzhumov, G. Shvetz, and R. Hillenbrand, Science 313, 1595 (2006).
- (2006) Science , vol.313 , pp. 1595
- Taubner, T.¹ Korobkin, D.² Urzhumov, Y.³ Shvetz, G.⁴ Hillenbrand, R.⁵

42
- 0032131466
- J. J. Ho, Y. K. Fang, K. H. Wu, W. T. Hseih, C. H. Chen, G. S. Chen, M. S. Ju, J. J. Lin, and S. B. Hwang, Sens. Actuators B 50, 227 (1998).
- (1998) Sens. Actuators B , vol.50 , pp. 227
- Ho, J.J.¹ Fang, Y.K.² Wu, K.H.³ Hseih, W.T.⁴ Chen, C.H.⁵ Chen, G.S.⁶ Ju, M.S.⁷ Lin, J.J.⁸ Hwang, S.B.⁹

43
- 0001352045
- Y. T. Yang, K. L. Ekinci, X. M. H. Huang, L. M. Schiavone, C. A. Zorman, M. Mehregany, and M. L. Roukes, Appl. Phys. Lett. 78, 162 (2001).
- (2001) Appl. Phys. Lett , vol.78 , pp. 162
- Yang, Y.T.¹ Ekinci, K.L.² Huang, X.M.H.³ Schiavone, L.M.⁴ Zorman, C.A.⁵ Mehregany, M.⁶ Roukes, M.L.⁷

44
- 0037472921
- X. M. H. Huang, C. A. Zorman, M. Mehregany, and M. L. Roukes, Nature 421, 496 (2003).
- (2003) Nature , vol.421 , pp. 496
- Huang, X.M.H.¹ Zorman, C.A.² Mehregany, M.³ Roukes, M.L.⁴

45
- 33846876588
- M. Li, H. X. Tang, and M. L. Roukes, Nature Nanotechnology 2, 114 (2007).
- (2007) Nature Nanotechnology , vol.2 , pp. 114
- Li, M.¹ Tang, H.X.² Roukes, M.L.³

46
- 33646398888
- Y. T. Yang, C. Callegari, X. L. Feng, K. L. Ekinci, and M. L. Roukes, Nano Lett. 6, 583 (2006).
- (2006) Nano Lett , vol.6 , pp. 583
- Yang, Y.T.¹ Callegari, C.² Feng, X.L.³ Ekinci, K.L.⁴ Roukes, M.L.⁵

47
- 0006614196
- R. S. Okojie, A. A. Ned, A. D. Kurtz, and W. N. Carr, IEEE Trans. Electron Devices 45, 785 (1998).
- (1998) IEEE Trans. Electron Devices , vol.45 , pp. 785
- Okojie, R.S.¹ Ned, A.A.² Kurtz, A.D.³ Carr, W.N.⁴

48
- 0029770937
- San Diego, CA
- th Int. Workshop on MEMS, San Diego, CA, 1996, p. 146.
- (1996) th Int. Workshop on MEMS , pp. 146
- Okojie, R.S.¹ Ned, A.A.² Kurtz, A.D.³ Carr, W.N.⁴

49
- 0032050502
- R. S. Okojie, A. A. Ned, and A. D. Kurtz, Sens. Actuators A 66, 200 (1998).
- (1998) Sens. Actuators A , vol.66 , pp. 200
- Okojie, R.S.¹ Ned, A.A.² Kurtz, A.D.³

50
- 55449083070
- edited by M. Gad-el-Hak CRC Press, Boca Raton, FL, Chapt. 21
- G. Beheim, in: The MEMS Handbook, edited by M. Gad-el-Hak (CRC Press, Boca Raton, FL, 2002), Chapt. 21.
- (2002) The MEMS Handbook
- Beheim, G.¹

51
- 0037445348
- A. R. Atwell, R. S. Okojie, K. T. Kornegay, S. L Roberson, and A. Beliveau, Sens. Actuators A 104, 11 (2003).
- (2003) Sens. Actuators A , vol.104 , pp. 11
- Atwell, A.R.¹ Okojie, R.S.² Kornegay, K.T.³ Roberson, S.L.⁴ Beliveau, A.⁵

52
- 33645108797
- T. K. Hossian, S. MacLaren, J. M. Engel, C. Liu, I. Adesida, and R. S. Okojie, J. Micromech. Microeng. 16, 751, (2006).
- (2006) J. Micromech. Microeng , vol.16 , pp. 751
- Hossian, T.K.¹ MacLaren, S.² Engel, J.M.³ Liu, C.⁴ Adesida, I.⁵ Okojie, R.S.⁶

53
- 40449118383
- W. N. Sharpe, Jr., G. M. Beheim, L. J. Evans, N. N. Nemeth, and O. M. Jadaan, J. Microelectromech. Syst. 17, 244 (2008).
- (2008) J. Microelectromech. Syst , vol.17 , pp. 244
- Sharpe Jr., W.N.¹ Beheim, G.M.² Evans, L.J.³ Nemeth, N.N.⁴ Jadaan, O.M.⁵

54
- 8644268890
- X. M. H. Huang, X. L. Feng, M. K. Prakash, S. Kumar, C. A. Zorman, M. Mehregany, and M. L. Roukes, Mater. Sci. Forum 457-460, 1531 (2004).
- (2004) Mater. Sci. Forum , vol.457-460 , pp. 1531
- Huang, X.M.H.¹ Feng, X.L.² Prakash, M.K.³ Kumar, S.⁴ Zorman, C.A.⁵ Mehregany, M.⁶ Roukes, M.L.⁷

55
- 0036240178
- G. Kotzer, M. Freas, P. Abel, A. Fleischman, S. Roy, C. Zorman, J. M. Moran, and J. Melzak, Biomaterials 23, 2737 (2002).
- (2002) Biomaterials , vol.23 , pp. 2737
- Kotzer, G.¹ Freas, M.² Abel, P.³ Fleischman, A.⁴ Roy, S.⁵ Zorman, C.⁶ Moran, J.M.⁷ Melzak, J.⁸

56
- 9144236284
- A. J. Rosenbloom, D. M. Sipe, Y. Shishkin, Y. Ke, R. P. Devaty, and W. J. Choyke, Biomed. Microdevices 6, 261, (2004).
- (2004) Biomed. Microdevices , vol.6 , pp. 261
- Rosenbloom, A.J.¹ Sipe, D.M.² Shishkin, Y.³ Ke, Y.⁴ Devaty, R.P.⁵ Choyke, W.J.⁶

57
- 34147159271
- G. Gabriel, I. Erill, J. Caro, R. Gomez, D. Riera, R. Villa, and P. Godigon, Microelectron. J. 38, 406 (2007).
- (2007) Microelectron. J , vol.38 , pp. 406
- Gabriel, G.¹ Erill, I.² Caro, J.³ Gomez, R.⁴ Riera, D.⁵ Villa, R.⁶ Godigon, P.⁷

58
- 8644264014
- J. Pascual, F. Valvo, P. Godignon, J. Aguiló, J. Millán, J. Camassel, and N. Mestres, Mater. Sci. Forum 457-460, 1483 (2004).
- (2004) Mater. Sci. Forum , vol.457-460 , pp. 1483
- Pascual, J.¹ Valvo, F.² Godignon, P.³ Aguiló, J.⁴ Millán, J.⁵ Camassel, J.⁶ Mestres, N.⁷

59
- 84944750987
- Tech. Dig
- Boston, MA
- th Int. Conf. Solid State Sensors, Actuators and Microsystems, Boston, MA, 2003, p. 742.
- (2003) th Int. Conf. Solid State Sensors, Actuators and Microsystems , pp. 742
- Kuo, H.-I.¹ Zorman, C.A.² Mehregany, M.³

60
- 34548120188
- Bangkok, Thailand
- nd IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems, Bangkok, Thailand, 2006, p. 740.
- (2006) nd IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems , pp. 740
- Chang, W.T.¹ Mehregany, M.² Zorman, C.A.³

61
- 27944454443
- P. Cong and D. J. Young, J. Microeng. Micromech. 15, 2243, (2005).
- P. Cong and D. J. Young, J. Microeng. Micromech. 15, 2243, (2005).

62
- 0029637854
- M. Bruel, Electron. Lett. 31, 1201 (1995).
- (1995) Electron. Lett , vol.31 , pp. 1201
- Bruel, M.¹

63
- 55449091695
- http://www.soitec.com/en/technology

64
- 0032473232
- N. Rajan, C. A. Zorman, M. Mehregany, R. DeAnna, and R. Harvey, Thin Solid Films 315, 170 (1998).
- (1998) Thin Solid Films , vol.315 , pp. 170
- Rajan, N.¹ Zorman, C.A.² Mehregany, M.³ DeAnna, R.⁴ Harvey, R.⁵

65
- 0037416729
- C. Ricciardi, E. Bennici, M. Cocuzza, R. Racci, D. Bich, and V. Gugliemetti, Thin Solid Films 427, 187 (2003).
- (2003) Thin Solid Films , vol.427 , pp. 187
- Ricciardi, C.¹ Bennici, E.² Cocuzza, M.³ Racci, R.⁴ Bich, D.⁵ Gugliemetti, V.⁶

66
- 0342647303
- C. H. Wu, C. A. Zorman, and M. Mehregany, Thin Solid Films 355/356, 179 (1999).
- (1999) Thin Solid Films , vol.355-356 , pp. 179
- Wu, C.H.¹ Zorman, C.A.² Mehregany, M.³

67
- 0032001410
- C. A. Zorman, S. Roy, C. H. Wu, A. J. Fleischman, and M. Mehregany, J. Mater. Res. 13, 406 (1998).
- (1998) J. Mater. Res , vol.13 , pp. 406
- Zorman, C.A.¹ Roy, S.² Wu, C.H.³ Fleischman, A.J.⁴ Mehregany, M.⁵

68
- 0035388473
- K. S. Lee, J. Y. Park, W. J. Kim, and G. W. Hong, J. Mater. Sci. Lett. 20, 1229 (2001).
- (2001) J. Mater. Sci. Lett , vol.20 , pp. 1229
- Lee, K.S.¹ Park, J.Y.² Kim, W.J.³ Hong, G.W.⁴

69
- 0012983099
- M. T. Clavaguera-Mora, J. Rodriguez-Viejo, Z. El Felk, E. Hurtos, S. Berberich, J. Stoemenos, and N. Clavaguera, Diam. Relat. Mater. 6, 1306 (1997).
- (1997) Diam. Relat. Mater , vol.6 , pp. 1306
- Clavaguera-Mora, M.T.¹ Rodriguez-Viejo, J.² El Felk, Z.³ Hurtos, E.⁴ Berberich, S.⁵ Stoemenos, J.⁶ Clavaguera, N.⁷

70
- 0034528924
- J. H. Boo, S. B. Lee, K. S. Yu, M. M. Sung, and Y. Kim, Surf. Coat. Technol. 131, 147 (2000).
- (2000) Surf. Coat. Technol , vol.131 , pp. 147
- Boo, J.H.¹ Lee, S.B.² Yu, K.S.³ Sung, M.M.⁴ Kim, Y.⁵

71
- 0034296257
- J. Chen, J. Scofield, and A. J. Steckl, J. Electrochem. Soc. 147, 3845 (2000).
- (2000) J. Electrochem. Soc , vol.147 , pp. 3845
- Chen, J.¹ Scofield, J.² Steckl, A.J.³

72
- 0030412274
- K. Murooka, I. Higahikawa, and Y. Gomei, J. Cryst. Growth 169, 485 (1996).
- (1996) J. Cryst. Growth , vol.169 , pp. 485
- Murooka, K.¹ Higahikawa, I.² Gomei, Y.³

73
- 0026998448
- L. Hong, Y. Shimogaki, Y. Egashira, and H. Komiyama, J. Electrochem. Soc. 139, 3652 (1992).
- (1992) J. Electrochem. Soc , vol.139 , pp. 3652
- Hong, L.¹ Shimogaki, Y.² Egashira, Y.³ Komiyama, H.⁴

74
- 0034148979
- C. F. Wang and D. S. Tsai, Mater. Chem. Phys. 63, 196 (2000).
- (2000) Mater. Chem. Phys , vol.63 , pp. 196
- Wang, C.F.¹ Tsai, D.S.²

75
- 0036793870
- C. A. Zorman, S. Rajgopal, X. A. Fu, R. Jezeski, J. Melzak, and M. Mehregany, Electrochem. Solid State Lett. 5, G99 (2002).
- (2002) Electrochem. Solid State Lett , vol.5
- Zorman, C.A.¹ Rajgopal, S.² Fu, X.A.³ Jezeski, R.⁴ Melzak, J.⁵ Mehregany, M.⁶

76
- 33751156978
- J.-H. Boo, K.-S. Yu, Y. Kim, S. H. Yeon, and I. N. Jung, Chem. Mater. 7, 694 (1995).
- (1995) Chem. Mater , vol.7 , pp. 694
- Boo, J.-H.¹ Yu, K.-S.² Kim, Y.³ Yeon, S.H.⁴ Jung, I.N.⁵

77
- 26944464232
- MEMS, Miami Beach, FL, 30 January
- th Int. Conf. MEMS, Miami Beach, FL, 30 January 2005, p. 451.
- (2005) th Int. Conf , pp. 451
- Trevino, J.¹ Fu, X.A.² Mehregany, M.³ Zorman, C.⁴

78
- 1242310293
- X. A. Fu, R. Jezeski, C. A. Zorman, and M. Mehregany, Appl. Phys. Lett. 84, 341 (2004).
- (2004) Appl. Phys. Lett , vol.84 , pp. 341
- Fu, X.A.¹ Jezeski, R.² Zorman, C.A.³ Mehregany, M.⁴

79
- 17244379776
- X. Fu, J. L. Dunning, C. A. Zorman, and M. Mehregany, Sens. Actuators A 119, 169 (2005).
- (2005) Sens. Actuators A , vol.119 , pp. 169
- Fu, X.¹ Dunning, J.L.² Zorman, C.A.³ Mehregany, M.⁴

80
- 33745495803
- C. S. Roper, V. Radmilovic, R. T. Howe, and R. Maboudian, J. Electrochem. Soc. 153, C562 (2006).
- (2006) J. Electrochem. Soc , vol.153
- Roper, C.S.¹ Radmilovic, V.² Howe, R.T.³ Maboudian, R.⁴

81
- 0036544006
- C. R. Stoldt, C. Carraro, W. R. Ashurst, D. Gao, R. T. Howe, and R. Maboudian, Sens. Actuators A 97/98, 410 (2002).
- (2002) Sens. Actuators A , vol.97-98 , pp. 410
- Stoldt, C.R.¹ Carraro, C.² Ashurst, W.R.³ Gao, D.⁴ Howe, R.T.⁵ Maboudian, R.⁶

82
- 3142711483
- D. Gao, M. B. J. Wijesundara, C. Carraro, R. T. Howe, and R. Maboudian, IEEE Sens. J. 4, 441 (2004).
- (2004) IEEE Sens. J , vol.4 , pp. 441
- Gao, D.¹ Wijesundara, M.B.J.² Carraro, C.³ Howe, R.T.⁴ Maboudian, R.⁵

83
- 39349107860
- C. S. Roper, V. Radmilovic, R. T. Howe, and R. Maboudian, Electrochem. Solid State Lett. 11, D35 (2008).
- (2008) Electrochem. Solid State Lett , vol.11
- Roper, C.S.¹ Radmilovic, V.² Howe, R.T.³ Maboudian, R.⁴

84
- 0010290255
- M. Itoh, M. Hori, H. Komano, and I. More, J. Vac. Sci. Technol. B 9, 3262 (1991).
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 3262
- Itoh, M.¹ Hori, M.² Komano, H.³ More, I.⁴

85
- 55449102174
- K. Murooka, I. Higashikawa, and Y. Gomei, Appl. Phys. Lett. 77, 1280 (1995).
- (1995) Appl. Phys. Lett , vol.77 , pp. 1280
- Murooka, K.¹ Higashikawa, I.² Gomei, Y.³

86
- 25844499734
- X. Fu, J. L. Dunning, C. A. Zorman, and M. Mehregany, Thin Solid Films 492, 195 (2005).
- (2005) Thin Solid Films , vol.492 , pp. 195
- Fu, X.¹ Dunning, J.L.² Zorman, C.A.³ Mehregany, M.⁴

87
- 50149086727
- MEMS, Tucson, AZ
- st Int. Conf. MEMS, Tucson, AZ, 2008, p. 447.
- (2008) st Int. Conf , pp. 447
- Nakao, S.¹ Ando, T.² Chen, L.³ Mehregany, M.⁴ Sato, K.⁵

88
- 84885511219
- Anaheim, CA
- th IEEE Conf. Sensors, Anaheim, CA, 2005, pp. 1268-1270.
- (2005) th IEEE Conf. Sensors , pp. 1268-1270
- Du, J.¹ Ko, W.H.² Mehregany, M.³ Zorman, C.A.⁴

89
- 0010992796
- F. Soltzbacher, C. Imawan, H. Steffes, E. Obermeier, and H. Moller, Sens. Actuators B 64, 95 (2000).
- (2000) Sens. Actuators B , vol.64 , pp. 95
- Soltzbacher, F.¹ Imawan, C.² Steffes, H.³ Obermeier, E.⁴ Moller, H.⁵

90
- 0035875988
- F. Soltzbacher, C. Imawan, H. Steffes, E. Obermeier, and M. Eickhoff, Sens. Actuators B 77, 111 (2001).
- (2001) Sens. Actuators B , vol.77 , pp. 111
- Soltzbacher, F.¹ Imawan, C.² Steffes, H.³ Obermeier, E.⁴ Eickhoff, M.⁵

91
- 0035975077
- F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier, and M. Eickhoff, Sens. Actuators B 78, 216 (2001).
- (2001) Sens. Actuators B , vol.78 , pp. 216
- Solzbacher, F.¹ Imawan, C.² Steffes, H.³ Obermeier, E.⁴ Eickhoff, M.⁵

92
- 0032595009
- N. Rajan, M. Mehregany, C. A. Zorman, S. Stefanescu, and T. P. Kicher, J. Microelectromech. Syst. 8, 251 (1999).
- (1999) J. Microelectromech. Syst , vol.8 , pp. 251
- Rajan, N.¹ Mehregany, M.² Zorman, C.A.³ Stefanescu, S.⁴ Kicher, T.P.⁵

93
- 0033324415
- K. A. Lohner, K. S. Chen, A. A. Ayon, and S. M. Spearing, Mater. Res. Soc. Symp. Proc. 546, 85 (1999).
- (1999) Mater. Res. Soc. Symp. Proc , vol.546 , pp. 85
- Lohner, K.A.¹ Chen, K.S.² Ayon, A.A.³ Spearing, S.M.⁴

94
- 27644458597
- W. N. Sharpe, O. Jadaan, G. M. Beheim, G. D. Quinn, and N. N. Nemeth, J. Microelectromech. Syst. 14, 903 (2005).
- (2005) J. Microelectromech. Syst , vol.14 , pp. 903
- Sharpe, W.N.¹ Jadaan, O.² Beheim, G.M.³ Quinn, G.D.⁴ Nemeth, N.N.⁵

95
- 0035278834
- S. Tanaka, S. Sugimoto, J. F. Li, R. Watanabe, and M. Esashi, J. Microelectromech. Syst. 10, 55 (2001).
- (2001) J. Microelectromech. Syst , vol.10 , pp. 55
- Tanaka, S.¹ Sugimoto, S.² Li, J.F.³ Watanabe, R.⁴ Esashi, M.⁵

96
- 0031699017
- A. J. Fleischman, X. Wei, C. A. Zorman, and M. Mehregany, Mater. Sci. Forum 264-268, 885 (1998).
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 885
- Fleischman, A.J.¹ Wei, X.² Zorman, C.A.³ Mehregany, M.⁴

97
- 0037002440
- S. Roy, R. G. DeAnna, C. A. Zorman, and M. Mehregany, IEEE Trans. Electron Devices 49, 2323 (2002).
- (2002) IEEE Trans. Electron Devices , vol.49 , pp. 2323
- Roy, S.¹ DeAnna, R.G.² Zorman, C.A.³ Mehregany, M.⁴

98
- 0032595007
- A. A. Yasseen, C. A. Zorman, and M. Mehregany, J. Microelectromech. Syst. 8, 237 (1999).
- (1999) J. Microelectromech. Syst , vol.8 , pp. 237
- Yasseen, A.A.¹ Zorman, C.A.² Mehregany, M.³

99
- 0033902750
- A. A. Yasseen, C. H. Wu, C. A. Zorman, and M. Mehregany, IEEE Electron Device Lett. 21, 164 (2000).
- (2000) IEEE Electron Device Lett , vol.21 , pp. 164
- Yasseen, A.A.¹ Wu, C.H.² Zorman, C.A.³ Mehregany, M.⁴

100
- 8744300169
- X. Song, S. Rajgolpal, J. M. Melzak, C. A. Zorman, and M. Mehregany, Mater. Sci. Forum 389-393, 755 (2002).
- (2002) Mater. Sci. Forum , vol.389-393 , pp. 755
- Song, X.¹ Rajgolpal, S.² Melzak, J.M.³ Zorman, C.A.⁴ Mehregany, M.⁵

101
- 0037451391
- D. Gao, R. T. Howe, and R. Maboudian, Appl. Phys. Lett. 82, 1742 (2003).
- (2003) Appl. Phys. Lett , vol.82 , pp. 1742
- Gao, D.¹ Howe, R.T.² Maboudian, R.³

102
- 34249277079
- M. Pozzi, M. Hassan, A. J. Harris, J. S. Burdess, L. Jiang, K. K. Lee, R. Cheung, G. J. Phelps, N. G. Wright, C. A. Zorman, and M. Mehregany, J. Phys. D, Appl. Phys. 40, 3335 (2007).
- (2007) J. Phys. D, Appl. Phys , vol.40 , pp. 3335
- Pozzi, M.¹ Hassan, M.² Harris, A.J.³ Burdess, J.S.⁴ Jiang, L.⁵ Lee, K.K.⁶ Cheung, R.⁷ Phelps, G.J.⁸ Wright, N.G.⁹ Zorman, C.A.¹⁰ Mehregany, M.¹¹

103
- 10944242629
- D. Gao, C. Carraro, V. Radmilovic, R. T. Howe, and R. Maboudian, J. Microelectromech. Syst. 13, 972 (2004).
- (2004) J. Microelectromech. Syst , vol.13 , pp. 972
- Gao, D.¹ Carraro, C.² Radmilovic, V.³ Howe, R.T.⁴ Maboudian, R.⁵

104
- 17044397795
- J. J. Bellante, H. Kahn, R. Ballarini, C. A. Zorman, M. Mehregany, and A. H. Heuer, Appl. Phys. Lett. 86, 071920 (2005).
- (2005) Appl. Phys. Lett , vol.86 , pp. 071920
- Bellante, J.J.¹ Kahn, H.² Ballarini, R.³ Zorman, C.A.⁴ Mehregany, M.⁵ Heuer, A.H.⁶

105
- 30944460720
- V. Hatty, H. Kahn, J. Trevino, C. A. Zorman, M. Mehregany, R. Ballarini, and A. H. Heuer, J. Appl. Phys. 99, 013517 (2006).
- (2006) J. Appl. Phys , vol.99 , pp. 013517
- Hatty, V.¹ Kahn, H.² Trevino, J.³ Zorman, C.A.⁴ Mehregany, M.⁵ Ballarini, R.⁶ Heuer, A.H.⁷

106
- 84945126978
- R. G. Azevedo, D. G. Jones, A. V. Jog, B. Jamshidi, D. R. Myers, L. Chen, X. A. Fu, M. Mehregany, M. B. J. Wijesundara, and A. P. Pisano, IEEE Sens. J. 7, 568 (2007).
- (2007) IEEE Sens. J , vol.7 , pp. 568
- Azevedo, R.G.¹ Jones, D.G.² Jog, A.V.³ Jamshidi, B.⁴ Myers, D.R.⁵ Chen, L.⁶ Fu, X.A.⁷ Mehregany, M.⁸ Wijesundara, M.B.J.⁹ Pisano, A.P.¹⁰

107
- 50149113165
- Lyon, France
- L. Chen and M. Mehregany, Transducers & Eurosensors 2007 Conf., Lyon, France, 2007, pp. 2597-2600.
- (2007) Transducers & Eurosensors 2007 Conf , pp. 2597-2600
- Chen, L.¹ Mehregany, M.²

108
- 0032183430
- N. Rajan, C. A. Zorman, M. Mehregany, R. DeAnna, and R. J. Harvey, Surf. Coat. Technol. 108/109, 391 (1998).
- (1998) Surf. Coat. Technol , vol.108-109 , pp. 391
- Rajan, N.¹ Zorman, C.A.² Mehregany, M.³ DeAnna, R.⁴ Harvey, R.J.⁵

109
- 3042704176
- W. R. Ashurst, M. B. J. Wijesundara, C. Carraro, and R. Maboudian, Tribol. Lett. 17, 195 (2004).
- (2004) Tribol. Lett , vol.17 , pp. 195
- Ashurst, W.R.¹ Wijesundara, M.B.J.² Carraro, C.³ Maboudian, R.⁴

110
- 52249106640
- Kyoto, Japan
- th Int. Conf. MEMS, Kyoto, Japan, 2007, pp. 643-646.
- (2007) th Int. Conf. MEMS , pp. 643-646
- Azevedo, R.G.¹ Zhang, J.² Jones, D.G.³ Myers, D.R.⁴ Jog, A.V.⁵ Jamshidi, B.⁶ Wijesundara, M.B.J.⁷ Maboudian, R.⁸ Pisano, A.P.⁹

111
- 27144482671
- G. Carlotti, N. Chérault, N. Casanova, C. Goldberg, and G. Socino, Thin Solid Films 493, 175-178 (2005).
- (2005) Thin Solid Films , vol.493 , pp. 175-178
- Carlotti, G.¹ Chérault, N.² Casanova, N.³ Goldberg, C.⁴ Socino, G.⁵

112
- 0000424721
- M. A. El Khakani, M. Chaker, M. E. O'Hern, and W. C. Oliver, J. Appl. Phys. 82, 4310-4318 (1997).
- (1997) J. Appl. Phys , vol.82 , pp. 4310-4318
- El Khakani, M.A.¹ Chaker, M.² O'Hern, M.E.³ Oliver, W.C.⁴

113
- 0031078638
- B. Cros, E. Gat, and J. M. Saurel, J. Non-Cryst. Solids 209, 273-282 (1997).
- (1997) J. Non-Cryst. Solids , vol.209 , pp. 273-282
- Cros, B.¹ Gat, E.² Saurel, J.M.³

114
- 0028320386
- M. A. El Khakani, M. Chaker, A. Jean, S. Boily, J. C. Kieffer, M. E. O'Hern, M. F. Ravet, and F. Rousseaux, J. Mater. Res. 9, 96-103 (1994).
- (1994) J. Mater. Res , vol.9 , pp. 96-103
- El Khakani, M.A.¹ Chaker, M.² Jean, A.³ Boily, S.⁴ Kieffer, J.C.⁵ O'Hern, M.E.⁶ Ravet, M.F.⁷ Rousseaux, F.⁸

115
- 0042284297
- P. M. Sarro, C. R. deBoer, E. Korkmaz, and J. M. W. Laros, Sens. Actuators A 67, 175-180 (1998).
- (1998) Sens. Actuators A , vol.67 , pp. 175-180
- Sarro, P.M.¹ deBoer, C.R.² Korkmaz, E.³ Laros, J.M.W.⁴

116
- 84953680275
- H. Windischmann, J. Vac. Sci. Technol. A 9, 2459-2463 (1991).
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 2459-2463
- Windischmann, H.¹

117
- 0028406635
- A. Klumpp, U. Schaber, H. L. Offereins, K. Kühl, and H. Sandmaier, Sens. Actuators A 41/42, 310-316 (1994).
- (1994) Sens. Actuators A , vol.41-42 , pp. 310-316
- Klumpp, A.¹ Schaber, U.² Offereins, H.L.³ Kühl, K.⁴ Sandmaier, H.⁵

118
- 0000516862
- M. A. El Khakani, M. Chaker, A. Jean, S. Boily, H. Pépin, J. C. Kieffer, and S. C. Gujrathi, J. Appl. Phys. 74, 2834-2840 (1993).
- (1993) J. Appl. Phys , vol.74 , pp. 2834-2840
- El Khakani, M.A.¹ Chaker, M.² Jean, A.³ Boily, S.⁴ Pépin, H.⁵ Kieffer, J.C.⁶ Gujrathi, S.C.⁷

119
- 0035269355
- J. Esteve, A. Lousa, E. Martinez, H. Huck, E. B. Halac, and M. Reinoso, Diam. Relat. Mater. 10, 1053-1057 (2001).
- (2001) Diam. Relat. Mater , vol.10 , pp. 1053-1057
- Esteve, J.¹ Lousa, A.² Martinez, E.³ Huck, H.⁴ Halac, E.B.⁵ Reinoso, M.⁶

120
- 21344495958
- M. J. Loboda, J. A. Seifferly, and F. C. Dall, J. Vac. Sci. Technol. A 12, 90-96 (1994).
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 90-96
- Loboda, M.J.¹ Seifferly, J.A.² Dall, F.C.³

121
- 1842715064
- O. K. Porada, V. I. Ivashchenko, G. V. Rusakov, S. N. Dub, and A. I. Stegnij, Surf. Coat. Technol. 180/181, 122-126 (2004).
- (2004) Surf. Coat. Technol , vol.180-181 , pp. 122-126
- Porada, O.K.¹ Ivashchenko, V.I.² Rusakov, G.V.³ Dub, S.N.⁴ Stegnij, A.I.⁵

122
- 0030092321
- G. F. Eriksen and K. Dyrbye, J. Micromech. Microeng. 6, 55-57 (1996).
- (1996) J. Micromech. Microeng , vol.6 , pp. 55-57
- Eriksen, G.F.¹ Dyrbye, K.²

123
- 0022013545
- C. Y. Chang, Y. K. Fang, C. F. Huang, and B. S. Wu, J. Electrochem. Soc. 132, 418-422 (1985).
- (1985) J. Electrochem. Soc , vol.132 , pp. 418-422
- Chang, C.Y.¹ Fang, Y.K.² Huang, C.F.³ Wu, B.S.⁴

124
- 0030683060
- Chicago, IL, USA
- A. F. Flannery, N. J. Mourlas, C. W. Storment, S. Tsai, S. H. Tan, J. Heck, D. Monk, T. Kim, B. Gogoi, and G. T. A. Kovacs, Proc. Int. Conf. on Solid-State Sensors and Actuators, Chicago, IL, USA, 1997, pp. 217-220.
- (1997) Proc. Int. Conf. on Solid-State Sensors and Actuators , pp. 217-220
- Flannery, A.F.¹ Mourlas, N.J.² Storment, C.W.³ Tsai, S.⁴ Tan, S.H.⁵ Heck, J.⁶ Monk, D.⁷ Kim, T.⁸ Gogoi, B.⁹ Kovacs, G.T.A.¹⁰

125
- 0037390998
- D. Brassard and M. A. El Khakani, J. Appl. Phys. 93, 4066-4070 (2003).
- (2003) J. Appl. Phys , vol.93 , pp. 4066-4070
- Brassard, D.¹ El Khakani, M.A.²

126
- 79956053162
- J.-M. Shieh, K.-C. Tsai, and B.-T. Dai, Appl. Phys. Lett. 81, 1294-1296 (2002).
- (2002) Appl. Phys. Lett , vol.81 , pp. 1294-1296
- Shieh, J.-M.¹ Tsai, K.-C.² Dai, B.-T.³

127
- 34748924121
- J.-M. Hsu, P. Tathireddy, L. Rieth, A. R. Normann, and F. Solzbacher, Thin Solid Films 516, 34-41 (2007).
- (2007) Thin Solid Films , vol.516 , pp. 34-41
- Hsu, J.-M.¹ Tathireddy, P.² Rieth, L.³ Normann, A.R.⁴ Solzbacher, F.⁵

128
- 0035472064
- B.-Y. Tsui, K.-L. Fang, and S.-D. Lee, IEEE Trans. Electron Devices 48, 2375-2383 (2001).
- (2001) IEEE Trans. Electron Devices , vol.48 , pp. 2375-2383
- Tsui, B.-Y.¹ Fang, K.-L.² Lee, S.-D.³

129
- 0010611538
- A. M. Haghiri-Gosnet, F. Rousseaux, B. Kebabi, F. R. Ladan, C. Mayeux, A. Madouri, D. Decanini, J. Bourneix, F. Carcenac, H. Launois, B. Wisniewski, E. Gat, and J. Durand, J. Vac. Sci. Technol. B 6, 1565-1569 (1990).
- (1990) J. Vac. Sci. Technol. B , vol.6 , pp. 1565-1569
- Haghiri-Gosnet, A.M.¹ Rousseaux, F.² Kebabi, B.³ Ladan, F.R.⁴ Mayeux, C.⁵ Madouri, A.⁶ Decanini, D.⁷ Bourneix, J.⁸ Carcenac, F.⁹ Launois, H.¹⁰ Wisniewski, B.¹¹ Gat, E.¹² Durand, J.¹³

130
- 0034008849
- N. Ledermann, J. Baborowski, P. Muralt, N. Xantopoulos, and J.-M. Tellenbach, Surf. Coat. Technol. 125, 246-250 (2000).
- (2000) Surf. Coat. Technol , vol.125 , pp. 246-250
- Ledermann, N.¹ Baborowski, J.² Muralt, P.³ Xantopoulos, N.⁴ Tellenbach, J.-M.⁵

131
- 16744362755
- R. A. Simão, A. K. Costa, C. A. Achete, and S. S. Camargo, Jr., Thin Solid Films 377/378, 490-494 (2000).
- R. A. Simão, A. K. Costa, C. A. Achete, and S. S. Camargo, Jr., Thin Solid Films 377/378, 490-494 (2000).

132
- 18844471071
- A. K. Costa, S. S. Camargo, Jr., C. A. Achete, and R. Carius, Thin Solid Films 377/378, 243-248 (2000).
- (2000) Thin Solid Films , vol.377-378 , pp. 243-248
- Costa, A.K.¹ Camargo Jr., S.S.² Achete, C.A.³ Carius, R.⁴

133
- 0000951776
- S. Ulrich, T. Theel, J. Schwan, V. Batori, I. Scheib, and H. Ehrhardt, Diam. Relat. Mater. 6, 645-648 (1997).
- (1997) Diam. Relat. Mater , vol.6 , pp. 645-648
- Ulrich, S.¹ Theel, T.² Schwan, J.³ Batori, V.⁴ Scheib, I.⁵ Ehrhardt, H.⁶

134
- 0000395353
- S. Kerdiles, A. Berthelot, F. Gourbilleau, and R. Rizk, Appl. Phys. Lett. 76, 2373-2375 (2000).
- (2000) Appl. Phys. Lett , vol.76 , pp. 2373-2375
- Kerdiles, S.¹ Berthelot, A.² Gourbilleau, F.³ Rizk, R.⁴

135
- 0001405596
- N. Saito, T. Yamaguchi, and I. Nakaaki, J. Appl. Phys. 78, 3949-3954 (1995).
- (1995) J. Appl. Phys , vol.78 , pp. 3949-3954
- Saito, N.¹ Yamaguchi, T.² Nakaaki, I.³

136
- 0009588139
- S. Boily, M. Chaker, H. Pépin, T. Kerdja, J. Voyer, A. Jean, J. C. Kieffer, P. Leung, F. Cerrina, and G. Wells, J. Vac. Sci. Technol. B 9, 3254-3257 (1991).
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 3254-3257
- Boily, S.¹ Chaker, M.² Pépin, H.³ Kerdja, T.⁴ Voyer, J.⁵ Jean, A.⁶ Kieffer, J.C.⁷ Leung, P.⁸ Cerrina, F.⁹ Wells, G.¹⁰

137
- 34548074088
- A. Fissel, B. Schröter, and W. Richter, Appl. Phys. Lett. 66, 3182 (1995).
- (1995) Appl. Phys. Lett , vol.66 , pp. 3182
- Fissel, A.¹ Schröter, B.² Richter, W.³

138
- 0035980386
- U. Schmid, M. Eickhoff, Ch. Richter, G. Krötz, and D. Schmitt-Landsiedel, Sens. Actuators A 94, 87-94 (2001).
- (2001) Sens. Actuators A , vol.94 , pp. 87-94
- Schmid, U.¹ Eickhoff, M.² Richter, C.³ Krötz, G.⁴ Schmitt-Landsiedel, D.⁵

139
- 0000908079
- I. Solomon, M. P. Schmidt, and H. Tran-Quoc, Phys. Rev. B 38, 9895-9901 (1988).
- (1988) Phys. Rev. B , vol.38 , pp. 9895-9901
- Solomon, I.¹ Schmidt, M.P.² Tran-Quoc, H.³

140
- 0000227619
- A. Jean, M. Chaker, Y. Diawara, P. K. Leung, E. Gat, P. P. Mercier, H. Pépin, S. Gujrathi, G. G. Ross, and J. C. Kieffer, J. Appl. Phys. 72, 3110-3115 (1992).
- (1992) J. Appl. Phys , vol.72 , pp. 3110-3115
- Jean, A.¹ Chaker, M.² Diawara, Y.³ Leung, P.K.⁴ Gat, E.⁵ Mercier, P.P.⁶ Pépin, H.⁷ Gujrathi, S.⁸ Ross, G.G.⁹ Kieffer, J.C.¹⁰

141
- 0027147272
- Fort Lauderdale, FL, USA
- L. Tong, M. Mehregany, and W. C. Tang, Proc. IEEE MEMS Conf., Fort Lauderdale, FL, USA, 1993, pp. 242-247.
- (1993) Proc. IEEE MEMS Conf , pp. 242-247
- Tong, L.¹ Mehregany, M.² Tang, W.C.³

142
- 0027697227
- M. J. Loboda and M. K. Ferber, J. Mater. Res. 8, 2908-2915 (1993).
- (1993) J. Mater. Res , vol.8 , pp. 2908-2915
- Loboda, M.J.¹ Ferber, M.K.²

143
- 55449136948
- J. Du, N. Singh, J. Summers, and C. A. Zorman, J. Mater. Res. 919, 283-288 (2005).
- (2005) J. Mater. Res , vol.919 , pp. 283-288
- Du, J.¹ Singh, N.² Summers, J.³ Zorman, C.A.⁴

144
- 33748127185
- V. I. Ivashchenko, S. N. Dub, O. K. Porada, L. A. Ivashchenko, P. L. Skrynskyy, and A. I. Stegniy, Surf. Coat. Technol. 200, 6533-6537 (2006).
- (2006) Surf. Coat. Technol , vol.200 , pp. 6533-6537
- Ivashchenko, V.I.¹ Dub, S.N.² Porada, O.K.³ Ivashchenko, L.A.⁴ Skrynskyy, P.L.⁵ Stegniy, A.I.⁶

145
- 0031188990
- M. T. Kim and J. Lee, Thin Solid Films 303, 173-179 (1997).
- (1997) Thin Solid Films , vol.303 , pp. 173-179
- Kim, M.T.¹ Lee, J.²

146
- 0003684203
- A. R. Shimkunas, P. E. Mauger, L. P. Bourget, R. S. Post, L. Smith, R. F. Davis, G. M. Wells, F. Cerrina, and R. B. McIntosh, J. Vac. Sci. Technol. B 9, 3258-3261 (1991).
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 3258-3261
- Shimkunas, A.R.¹ Mauger, P.E.² Bourget, L.P.³ Post, R.S.⁴ Smith, L.⁵ Davis, R.F.⁶ Wells, G.M.⁷ Cerrina, F.⁸ McIntosh, R.B.⁹

147
- 2942528965
- S. Zhang, L. Raniero, E. Fortunato, L. Pereira, N. Martins, P. Canhola, I. Ferreira, N. Nedev, H. Águas, and R. Martins, J. Non-Cryst. Solids 338-340, 530-533 (2004).
- (2004) J. Non-Cryst. Solids , vol.338-340 , pp. 530-533
- Zhang, S.¹ Raniero, L.² Fortunato, E.³ Pereira, L.⁴ Martins, N.⁵ Canhola, P.⁶ Ferreira, I.⁷ Nedev, N.⁸ Águas, H.⁹ Martins, R.¹⁰

148
- 0032675050
- D.-S. Wuu, R.-H. Horng, C.-C. Chan, and Y.-S. Lee, Appl. Surf. Sci. 144/145, 708-712 (1999).
- (1999) Appl. Surf. Sci , vol.144-145 , pp. 708-712
- Wuu, D.-S.¹ Horng, R.-H.² Chan, C.-C.³ Lee, Y.-S.⁴

149
- 2342513438
- E. J. Connolly, H. T. M. Pham, J. Groeneweg, P. M. Sarro, and P. J. French, Sens. Actuators B 100, 216-220 (2004).
- (2004) Sens. Actuators B , vol.100 , pp. 216-220
- Connolly, E.J.¹ Pham, H.T.M.² Groeneweg, J.³ Sarro, P.M.⁴ French, P.J.⁵

150
- 55449118142
- press
- R. Parro, M. C. Scardelletti, N. Varaljay, S. Zimmerman, and C. A. Zorman, Proc. ISDRS 2007 Conf., College Park, MD, USA, 2007, in press.
- (2007) Proc. ISDRS 2007 Conf., College Park, MD, USA
- Parro, R.¹ Scardelletti, M.C.² Varaljay, N.³ Zimmerman, S.⁴ Zorman, C.A.⁵

151
- 84955042160
- J. Koskinen, R. J. Soave, and H. H. Johnson, J. Vac. Sci. Technol. A 8, 1422-1426 (1990).
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 1422-1426
- Koskinen, J.¹ Soave, R.J.² Johnson, H.H.³

152
- 38149121497
- C. Iliescu, B. Chen, D. P. Poenar, and Y. Y. Lee, Sens. Actuators B 129, 404-411 (2008).
- (2008) Sens. Actuators B , vol.129 , pp. 404-411
- Iliescu, C.¹ Chen, B.² Poenar, D.P.³ Lee, Y.Y.⁴

153
- 0038096916
- F. Völklein, G. Min, and D. M. Rowe, Sens. Actuators 75, 95-101 (1999).
- (1999) Sens. Actuators , vol.75 , pp. 95-101
- Völklein, F.¹ Min, G.² Rowe, D.M.³

154
- 55449089686
- in press
- G. Rehder and M. N. P. Carreño, J. Non-Cryst. Solids (2008) in press.
- (2008) J. Non-Cryst. Solids
- Rehder, G.¹ Carreño, M.N.P.²

155
- 0018512002
- K. Wasa, T. Tohda, Y. Kasahara, and S. Hayakawa, Rev. Sci. Instrum. 50, 1084-1088 (1979).
- (1979) Rev. Sci. Instrum , vol.50 , pp. 1084-1088
- Wasa, K.¹ Tohda, T.² Kasahara, Y.³ Hayakawa, S.⁴

156
- 0031126532
- V. S. Ballandovich, S. V. Bogachev, V. A. Il'yn, A. V. Korlyakov, S. V. Kostromin, V. V. Luchinin, and A. A. Petrov, Mater. Sci. Eng. B 46, 383-386 (1997).
- (1997) Mater. Sci. Eng. B , vol.46 , pp. 383-386
- Ballandovich, V.S.¹ Bogachev, S.V.² Il'yn, V.A.³ Korlyakov, A.V.⁴ Kostromin, S.V.⁵ Luchinin, V.V.⁶ Petrov, A.A.⁷

157
- 0024622683
- E. W. Kiewra and P. C. Wayner, Jr., J. Electrochem. Soc. 136, 740-744 (1989).
- E. W. Kiewra and P. C. Wayner, Jr., J. Electrochem. Soc. 136, 740-744 (1989).

158
- 0029428958
- Montreal, Quebec, Canada
- th IEEE EMBC/CMBEC, Montreal, Quebec, Canada, 1995, pp. 1543-1544.
- (1995) th IEEE EMBC/CMBEC , pp. 1543-1544
- Eck, S.¹ Bolz, A.² Schaldach, M.³

159
- 1542544594
- Toronto, Canada
- L. S. Pakula, H. Yang, and P. J. French, Proc. IEEE Sensors Conf., Toronto, Canada, 2003, pp. 761-764.
- (2003) Proc. IEEE Sensors Conf , pp. 761-764
- Pakula, L.S.¹ Yang, H.² French, P.J.³

160
- 33847324849
- Irvine, CA, USA
- L. S. Pakula, P. J. French, and H. Yang, Proc. IEEE Sensors Conf., Irvine, CA, USA, 2005, pp. 480-483.
- (2005) Proc. IEEE Sensors Conf , pp. 480-483
- Pakula, L.S.¹ French, P.J.² Yang, H.³

161
- 0036646693
- A. Bagolini, L. Pakula, T. L. M. Scholtes, H. T. M. Pham, P. J. French, and P. M. Sarro, J. Micromech. Microeng. 12, 385-389 (2002).
- (2002) J. Micromech. Microeng , vol.12 , pp. 385-389
- Bagolini, A.¹ Pakula, L.² Scholtes, T.L.M.³ Pham, H.T.M.⁴ French, P.J.⁵ Sarro, P.M.⁶

162
- 34248579463
- San Jose, CA, USA
- J. B. Summers, M. Scardelletti, R. Parro, and C. A. Zorman, Proc. SPIE Photonics West Conf., San Jose, CA, USA, 2007, p. 6464-6516.
- (2007) Proc. SPIE Photonics West Conf , pp. 6464-6516
- Summers, J.B.¹ Scardelletti, M.² Parro, R.³ Zorman, C.A.⁴

163
- 2942585194
- M. N. P. Carreño and A. T. Lopes, J. Non-Cryst. Solids 338-340, 490-495 (2004).
- (2004) J. Non-Cryst. Solids , vol.338-340 , pp. 490-495
- Carreño, M.N.P.¹ Lopes, A.T.²

164
- 38849137829
- G. Pandraud, P. J. French, and P. M. Sarro, Sens. Actuators A 142, 61-66 (2008).
- (2008) Sens. Actuators A , vol.142 , pp. 61-66
- Pandraud, G.¹ French, P.J.² Sarro, P.M.³

165
- 55449095768
- Clearwater, FL, USA
- M. C. Scardelletti, N. C. Varaljay, D. R. Oldham, and C. A. Zorman, in: Proc. IEEE WAMI Conf., Clearwater, FL, USA, 2006, pp. 1-5.
- (2006) Proc. IEEE WAMI Conf , pp. 1-5
- Scardelletti, M.C.¹ Varaljay, N.C.² Oldham, D.R.³ Zorman, C.A.⁴

166
- 34248993622
- H. Zhang, H. Guo, Y. Wang, G. Zhang, and Z. Li, J. Micromech. Microeng. 17, 426-431 (2007).
- (2007) J. Micromech. Microeng , vol.17 , pp. 426-431
- Zhang, H.¹ Guo, H.² Wang, Y.³ Zhang, G.⁴ Li, Z.⁵

167
- 0029949429
- A. Bolz, M. Amon, and M. Schaldach, Tex. Heart Inst. J. 23, 162 (1996).
- (1996) Tex. Heart Inst. J , vol.23 , pp. 162
- Bolz, A.¹ Amon, M.² Schaldach, M.³

168
- 0030151357
- M. Amon, A. Bolz, and M. Schaldach, J. Mater. Sci., Mater. Med. 7, 273-278 (1996).
- (1996) J. Mater. Sci., Mater. Med , vol.7 , pp. 273-278
- Amon, M.¹ Bolz, A.² Schaldach, M.³

169
- 0346124147
- S. F. Cogan, D. J. Edell, A. A. Guzelian, Y. P. Liu, and R. Edell, J. Biomed. Mater. Res. A 67, 856-867 (2003).
- (2003) J. Biomed. Mater. Res. A , vol.67 , pp. 856-867
- Cogan, S.F.¹ Edell, D.J.² Guzelian, A.A.³ Liu, Y.P.⁴ Edell, R.⁵

170
- 55449083651
- otherRef
- A. Hess, R. Parro, J. Du, J. Dunning, M. Scardelletti, and C. A. Zorman, Mater. Res. Soc. Bulletin (2007).

171
- 0032136370
- M. A. Schmidt, Proc. IEEE 86(8), 1575-1585 (1998).
- (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1575-1585
- Schmidt, M.A.¹

172
- 0033751490
- A. Berthold, L. Nicola, P. M. Sarro, and M. J. Vellekoop, Sens. Actuators 82, 224-228 (2000).
- (2000) Sens. Actuators , vol.82 , pp. 224-228
- Berthold, A.¹ Nicola, L.² Sarro, P.M.³ Vellekoop, M.J.⁴

173
- 50049093462
- Lyon, France
- J. Du and C. A. Zorman, Transducers & Eurosensors 2007 Conf., Lyon, France, 2007, pp. 2075-2078.
- (2007) Transducers & Eurosensors 2007 Conf , pp. 2075-2078
- Du, J.¹ Zorman, C.A.²

174
- 55449115330
- The Hague, Netherlands
- A. Berthold, L. Nicola, P. M. Sarro, M. J. Vellekoop, and G. Pignatel, Proc. Eurosensors XIII Conf., The Hague, Netherlands, 1999, pp. 975-978.
- (1999) Proc. Eurosensors XIII Conf , pp. 975-978
- Berthold, A.¹ Nicola, L.² Sarro, P.M.³ Vellekoop, M.J.⁴ Pignatel, G.⁵

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