Protective coatings in harsh environments

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 55-57

  Eriksen, Gert F ^a   Dyrbye, Karsten ^a  

^a Grundfos DK AS   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; PASSIVATION; PH EFFECTS; SENSORS; SILICON CARBIDE; SILICON NITRIDE; THERMAL EFFECTS;

MICROMECHANICAL SENSORS;

PROTECTIVE COATINGS;

EID: 0030092321     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/011     Document Type: Article

References (5)

1. Smith R L and Collins D 1988 Micromachined packaging of chemical microsensors IEEE Trans. of Electron Devices ED-35 787
2. Klumpp A, Kühl K, Lang W, Sandmaier H and Schaber U a-SiC film: deposition and application in silicon Micromachining Proc. Sensor '94 pp 289-98
3. Christensen C 1995 private communication
4. Gardeniers J G E and Laursen N G 1994 Corrosion of protective layers on strained silicon surfaces in alkaline solutions Sensors Mater. 5 189-208
5. Søndergård O and Gravesen P 1996 A new piezoresistive pressure transducer principle with improvements in media compatibility J. Micromech. Microeng, at press