Single crystal 6H-SiC MEMS fabrication based on smart-cut technique

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2243-2248

  Cong, Peng ^a   Young, Darrin J ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION IMPLANTATION; SENSORS; SINGLE CRYSTALS; STRAIN; TRANSMISSION ELECTRON MICROSCOPY;

OXIDIZED SILICON SUBSTRATES; PROTON-IMPLANTATION;

SILICON CARBIDE;

EID: 27944454443     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/005     Document Type: Article

References (10)

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