Characterization of ultra-hard silicon carbide coatings deposited by RF magnetron sputtering

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 243-248

  Costa, A K ^a   Camargo Jr , S S ^a   Achete, C A ^a   Carius, R ^b  

^a Engenharia Metalurgica Materiais U   (Brazil)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; CRYSTALLINE MATERIALS; HARDNESS; MAGNETRON SPUTTERING; POLARIZATION; SILICON CARBIDE; SINTERING; SUBSTRATES;

STRESS-FREE FILMS; ULTRA-HARD SILICON CARBIDE COATINGS;

PROTECTIVE COATINGS;

EID: 18844471071     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01321-3     Document Type: Article

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