Monocrystalline silicon carbide nanoelectromechanical systems

Applied Physics Letters

Volumn 78, Issue 2, 2001, Pages 162-164

  Yang, Y T ^a   Ekinci, K L ^a   Huang, X M H ^a   Schiavone, L M ^a   Roukes, M L ^a   Zorman, C A ^b   Mehregany, M ^b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Case Western Reserve University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001352045     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1338959     Document Type: Article

References (17)

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