SiC cantilever resonators with electrothermal actuation

Sensors and Actuators, A: Physical

Volumn 128, Issue 2, 2006, Pages 376-386

  Jiang, Liudi ^a   Cheung, R ^a   Hedley, J ^b   Hassan, M ^b   Harris, A J ^b   Burdess, J S ^b   Mehregany, M ^c   Zorman, C A ^c  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

^b NEWCASTLE UNIVERSITY   (United Kingdom)

^c Case Western Reserve University   (United States)

Author keywords

Cantilever; Electrothermal actuation; Resonators; SiC

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTRODES; PLATINUM; POLYCRYSTALS; RESONANCE; RESONATORS; SHORT CIRCUIT CURRENTS; SINGLE CRYSTALS;

AMPLITUDE RESPONSE; ELECTROTHERMAL ACTUATION; METAL TERMINATIONS; SIC;

CANTILEVER BEAMS;

EID: 33646189697     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.01.045     Document Type: Article

References (22)

1. Petersen K.E. Micromechanical membrane switches on silicon. IBM J. Res. Dev. 23 (1979) 376-385
2. Riethmuller W., and Benecke W. Thermally excited silicon microactuators. IEEE Trans. Elec. Dev. 35 (1988) 758-763
3. Wang Y., Li Z., McCormick D.T., and Tien N.C. A micromachined RF microrelay with electrothermal actuation. Sensor Actuator A 103 (2003) 231-236
4. Que L., Park J.S., and Gianchandani Y.B. Bent-beam electro-thermal actuators for high force applications. Proceedings of the Twelfth IEEE International Conference on Micro Electro Mechanical Systems (1999) 31-36
5. Ketterer B., Bitnar B., Haas B., Neiger T., Bachle D., Glaus F., and Gobrecht J. Electromechanical microswitches with thermal actuation. Proceedings of the International Microprocesses and Nanotechnology Conference (2002) 206-207
6. Jain A., Kopa A., Pan Y., Fedder G.K., and Xie H. A two-axis electrothermal micromirror for endoscopic optical coherence tomography. IEEE J. Sel. Top. Quant. Electron. 10 (2004) 636-642
7. Bordatchev E.V., and Nikumb S.K. Microgripper: design, finite element analysis and laser microfabrication. Proceedings of International Conference on MEMS, Nano and Smart Systems (2003) 308-313
8. Pedrak R., Ivanov T., Ivanova K., Gotszalk T., Abedinov N., Rangelow I.W., Edinger K., Tomerov E., Schenkel T., and Hudek P. Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes. J. Vac. Sci. Technol. B 21 (2003) 3102-3107
9. M.A. Hassan, Silicon Carbide MEMS Characterisation and Actuation of 3C-SiC Cantilevers and Bridges, Ph.D. Thesis, University of Newcastle, England, 2005.
10. Zorman C.A., and Mehregany M. Silicon carbide for MEMS and NEMS - an overview. Proc. IEEE 2 (2002) 1109-1114
11. Jiang L., Cheung R., Hassan M., Harris A.J., Burdess J.S., Zorman C.A., and Mehregany M. Fabrication of SiC microelectromechanical systems using one-step dry etching. J. Vac. Sci. Technol. B 21 (2003) 2998-3001
12. Jiang L., Hassan M., Cheung R., Harris A.J., Burdess J.S., Zorman C.A., and Mehregany M. Dry release fabrication and testing of SiC electrostatic cantilever actuators. Microelectron. Eng. 78/79 (2005) 106-111
13. Yang Y.T., Ekinci K.L., Huang X.M., Schiavone L.M., Roukes M.L., Zorman C.A., and Mehregany M. Monocrystalline silicon carbide nanoelectromechanical systems. Appl. Phys. Lett. 78 (2001) 162-164
14. Yasseen A.A., Wu C.H., Zorman C.A., and Mehregany M. Fabrication and testing of surface micromachined polycrystalline SiC micromotors. IEEE Electron Dev. Lett. 21 (2000) 164-166
15. Zorman C.A., Fleischman A.J., Dewa A.S., Mehregany M., Jacob C., and Pironz P. Epitaxial growth of 3C-SiC films on 4 in. diam (1 0 0) silicon wafers by atmospheric pressure chemical vapor deposition. J. Appl. Phys. 78 (1995) 5136
16. Zorman C.A., Roy S., Wu C.H., Fleischman A.J., and Mehregany M. Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapour deposition on polycrystalline silicon. J. Mater. Res. 13 (1998) 406-412
17. Othman M.B., and Brunnschweiler A. Electrothermally excited silicon beam mechanical resonators. Electron. Lett. 23 (1987) 728-730
18. Lammerink T.S.J., Elwenspoek M., and Fluitman J.H.J. Frequency dependence of thermal excitation of micromechanical resonators. Sensor Actuator A 25-27 (1991) 685-689
19. Hedley J., Harris A.J., Burdess J.S., and McNie M.E. The development of a "workstation" for optical testing and modification of IMEMS on a wafer. SPIE Proceedings on Design, Test and Packaging of MEMS/MOEMS, vol. 4408 (2001) 402-408
20. Burdess J.S., Harris A.J., Wood D., Pitcher R.J., and Glennie D. A system for the dynamic characterization of microstructures. IEEE J. Microelectromech. Syst. 6 (1997) 322-328
21. Fleischman A.J., Roy S., Zorman C.A., and Mehregany M. Behavior of polycrystalline SiC and Si surface-micromachined lateral resonant structures at elevated temperatures. Mater. Sci. Forum 264-268 (1998) 889-892
22. Han J., Zhu C., Liu J., and He Y. Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature. Sensor Actuator A 101 (2002) 37-41