Energy dissipation in folded-beam MEMS resonators made from singleCrystal and poly crystalline 3C-SiC films

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 740-744

  Chang, Wen Teng ^a,c   Mehregany, Mehran ^b   Zorman, Christian A ^b  

^a NATIONAL UNIVERSITY OF KAOHSIUNG   (Taiwan)

^b Case Western Reserve University   (United States)

^c National University of Kaohsiung ^*  (Taiwan)

Author keywords

3C SiC; Quality factor; Resonator

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ENERGY DISSIPATION; MEMS; POLYCRYSTALLINE MATERIALS; Q FACTOR MEASUREMENT; SILICON CARBIDE; SINGLE CRYSTALS;

ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION (APCVD); FOLDED BEAM RESONATORS; POLYCRYSTALLINE FILMS;

RESONATORS;

EID: 34548120188     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352124     Document Type: Conference Paper

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