Fabrication and testing of single crystalline 3C-SiC devices using a novel SiC-on-insulator substrate

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 742-745

  Kuo, Hung I ^a   Zorman, C A ^a   Mehregany, M ^a  

^a Case Western Reserve University   (United States)

Author keywords

Bonding; Capacitive sensors; Crystallization; Dielectric films; Dielectric substrates; Etching; Fabrication; Piezoresistance; Resonance; Testing

Indexed keywords

ACTUATORS; BONDING; CAPACITIVE SENSORS; CRYSTALLIZATION; DIELECTRIC FILMS; ETCHING; FABRICATION; MICROSYSTEMS; RESONANCE; SILICON CARBIDE; SINGLE CRYSTALS; STRAIN GAGES; SUBSTRATES; SURFACE MICROMACHINING; TESTING; TRANSDUCERS;

CONVENTIONAL METHODS; DIELECTRIC SUBSTRATES; INSULATOR SUBSTRATES; PIEZO-RESISTIVE; PIEZORESISTANCE; PIEZORESISTANCE COEFFICIENTS; RESONANT STRUCTURES; SINGLE-CRYSTALLINE 3C-SIC;

SOLID-STATE SENSORS;

EID: 84944750987     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215580     Document Type: Conference Paper

References (7)

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