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Volumn 75, Issue 2, 1999, Pages 95-101

Modelling of a microelectromechanical thermoelectric cooler

Author keywords

[No Author keywords available]

Indexed keywords

COOLING SYSTEMS; CURRENT DENSITY; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; SILICON CARBIDE; SILICON NITRIDE; THERMAL GRADIENTS; THERMOELECTRIC EQUIPMENT; THIN FILM DEVICES;

EID: 0038096916     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00002-3     Document Type: Article
Times cited : (74)

References (16)
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    • Module design and fabrication
    • in: D.M. Rowe (Ed.), CRC Press, Boca Raton, FL
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    • (1995) CRC Handbook of Thermoelectrics , pp. 597-607
    • Marlow, R.1    Burke, E.2
  • 2
    • 0024303095 scopus 로고
    • Miniature low-power/high-voltage thermoelectric generator
    • Rowe D.M., Morgan D.V., Keily J.H. Miniature low-power/high-voltage thermoelectric generator. Electron. Lett. 25:1989;166.
    • (1989) Electron. Lett. , vol.25 , pp. 166
    • Rowe, D.M.1    Morgan, D.V.2    Keily, J.H.3
  • 3
    • 0026255118 scopus 로고
    • High sensitivity radiation thermopiles made of Bi-Sb-Te films
    • Völklein F., Wiegand A. High sensitivity radiation thermopiles made of Bi-Sb-Te films. Sensors Actuators A. 29:1991;87.
    • (1991) Sensors Actuators a , vol.29 , pp. 87
    • Völklein, F.1    Wiegand, A.2
  • 5
    • 0024647545 scopus 로고
    • Accurate thin film-multijunction thermal converter on a silicon chip
    • Klonz M., Weimann T. Accurate thin film-multijunction thermal converter on a silicon chip. IEEE Trans. Instr. Meas. IM. 38:1988;335.
    • (1988) IEEE Trans. Instr. Meas. IM , vol.38 , pp. 335
    • Klonz, M.1    Weimann, T.2
  • 6
    • 0344284127 scopus 로고
    • Thermal thin-film sensors for r.m.s. value measurements
    • Berlicki T., Osadnik S., Prociow E. Thermal thin-film sensors for r.m.s. value measurements. Sensors Actuators A. 629:1991;25-27.
    • (1991) Sensors Actuators a , vol.629 , pp. 25-27
    • Berlicki, T.1    Osadnik, S.2    Prociow, E.3
  • 9
    • 0345578206 scopus 로고
    • Silicon gas flow sensors using industrial CMOS and bipolar IC technology
    • Moser D., Lengenhager R., Baltes H. Silicon gas flow sensors using industrial CMOS and bipolar IC technology. Sensors Actuators A. 577:1991;25-27.
    • (1991) Sensors Actuators a , vol.577 , pp. 25-27
    • Moser, D.1    Lengenhager, R.2    Baltes, H.3
  • 11
    • 0009988837 scopus 로고
    • A vacuum microsensor for the low vacuum range
    • Völklein F., Schnelle W. A vacuum microsensor for the low vacuum range. Sensors Mater. 3:1991;41.
    • (1991) Sensors Mater. , vol.3 , pp. 41
    • Völklein, F.1    Schnelle, W.2
  • 13
    • 21344488867 scopus 로고
    • Cooling of silicon structures using an integrated peltier element
    • Mansfeld M., Lang W. Cooling of silicon structures using an integrated peltier element. Sensors Mater. 6:1994;1.
    • (1994) Sensors Mater. , vol.6 , pp. 1
    • Mansfeld, M.1    Lang, W.2
  • 16
    • 0026840184 scopus 로고
    • Properties of thin film thermoelectric materials: Application to sensors using the seebeck effect
    • Boyer A., Cisse E. Properties of thin film thermoelectric materials: application to sensors using the seebeck effect. Mater. Sci. Eng. B13:1992;103.
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    • Boyer, A.1    Cisse, E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.