Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 224-228

  Berthold, A ^a   Nicola, L ^b   Sarro, P M ^a   Vellekoop, M J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF TRENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS BONDING; THIN FILMS;

GLASS-TO-GLASS ANODIC BONDING;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0033751490     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00376-3     Document Type: Article

References (6)

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