Characterization of the elastic properties of amorphous silicon carbide thin films by acoustic microscopy

Journal of Non-Crystalline Solids

Volumn 209, Issue 3, 1997, Pages 273-282

  Cros, B ^a,c   Gat, E ^b   Saurel, J M ^c  

^a LTM   (France)

^b INRS EMT   (Canada)

^c UNIV MONTPELLIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MICROSCOPES; CHARACTERIZATION; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; ELASTICITY; LASER ABLATION; MECHANICAL VARIABLES MEASUREMENT; PLASMA APPLICATIONS;

ACOUSTIC MICROSCOPY; ACOUSTIC RESPONSE; AMORPHOUS SILICON CARBIDE THIN FILMS; FOURIER TRANSFORM TREATMENT; HOMOGENEITY; LAMB MODE VELOCITIES; POISSON RATIO; SURFACE ACOUSTIC IMAGES; YOUNG MODULUS;

AMORPHOUS FILMS;

EID: 0031078638     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(96)00569-8     Document Type: Article

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