Amorphous SixC1-x films: An example of material presenting low indentation hardness and high wear resistance

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1053-1057

  Esteve, J ^a   Lousa, A ^a   Martinez, E ^a   Huck, H ^b   Halac, E B ^b   Reinoso, M ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b Instituto de Tecnologia   (Argentina)

Author keywords

Amorphous silicon carbon films; Hardness; Wear resistance

Indexed keywords

COATINGS; ELASTIC MODULI; ION BEAM ASSISTED DEPOSITION; SILICON; THERMODYNAMIC STABILITY;

HIGH WEAR RESISTANCE;

THIN FILMS;

HARDNESS; INORGANIC COATING; SILICON CARBIDE; WEAR RESISTANCE;

EID: 0035269355     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00497-0     Document Type: Article

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9. To be published.