A highly stable SiC based microhotplate NO2 gas-sensor

Sensors and Actuators, B: Chemical

Volumn 78, Issue 1-3, 2001, Pages 216-220

  Solzbacher, F ^a   Imawan, C ^b   Steffes, H ^b   Obermeier, E ^b   Eickhoff, M ^c  

^a First Sensor Technology GmbH   (Germany)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^c DAIMLER AG   (Germany)

Author keywords

Gas sensor; In2O3; Microhotplate; SiC

Indexed keywords

DEPOSITION; MICROELECTRODES; NITROGEN OXIDES; OXIDES; SEMICONDUCTING INDIUM COMPOUNDS; SILICON CARBIDE; THERMODYNAMIC PROPERTIES; THIN FILMS;

MICROHOTPLATES;

CHEMICAL SENSORS;

EID: 0035975077     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00815-2     Document Type: Article

References (4)

1. 2-based microhotplate with integrated IDC for metal oxide gas-sensors