Linear dependence of both the hardness and the elastic modulus of pulsed laser deposited a-SiC films upon their Si-C bond density

Journal of Applied Physics

Volumn 82, Issue 9, 1997, Pages 4310-4318

  El Khakani, M A ^a   Chaker, M ^a   O'Hern, M E ^b   Oliver, W C ^b  

^a INRS EMT   (Canada)

^b Nano Instruments Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000424721     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366249     Document Type: Article

References (31)

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