PECVD amorphous silicon carbide membranes for cell culturing

Sensors and Actuators, B: Chemical

Volumn 129, Issue 1, 2008, Pages 404-411

  Iliescu, Ciprian ^a   Chen, Bangtao ^a   Poenar, Daniel P ^b   Lee, Yong Yeow ^a  

^a INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Amorphous silicon carbide; Cell culture substrate; Low stress

Indexed keywords

AMORPHOUS MATERIALS; BIOMEDICAL EQUIPMENT; COMPRESSIVE STRESS; ION BOMBARDMENT; MICROMACHINING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CELL CULTURING; INERT MASKING MATERIALS; LOW ETCHING RATES;

SILICON CARBIDE;

EID: 38149121497     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.08.043     Document Type: Article

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