Relative humidity sensors using porous SiC membranes and Al electrodes

Sensors and Actuators, B: Chemical

Volumn 100, Issue 1-2, 2004, Pages 216-220

  Connolly, E J ^a   Pham, H T M ^a   Groeneweg, J ^a   Sarro, P M ^a   French, P J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Al electrodes; Humidity sensors; Porous SiC

Indexed keywords

ALUMINUM; ATMOSPHERIC HUMIDITY; CURRENT DENSITY; ELECTROCHEMISTRY; ELECTRODES; ETCHING; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SENSORS; SURFACE PROPERTIES;

AL ELECTRODES; ANODIZATION; HUMIDITY SENSORS; POROUS SIC;

SILICON CARBIDE;

EID: 2342513438     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2003.12.064     Document Type: Article

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