a-SiC:H films as perspective wear-resistant coatings

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 122-126

  Porada, O K ^a   Ivashchenko, V I ^a   Ivashchenko, L A ^a   Rusakov, G V ^a   Dub, S N ^b   Stegnij, A I ^a  

^a FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

^b BAKUL INSTITUTE FOR SUPERHARD MATERIALS   (Ukraine)

Author keywords

Amorphous hydrogenated silicon carbide; Methyltrichlorosilane; PECVD; Wear resistant coatings

Indexed keywords

AMORPHOUS FILMS; HYDROGENATION; SILICON CARBIDE; SILICON WAFERS; TRIBOLOGY; WEAR RESISTANCE;

AS-DEPOSITED FILMS; WEAR RESISTANCE COATINGS;

PROTECTIVE COATINGS;

COATING; FILM THICKNESS; SILICON CARBIDE; TRIBOLOGY; WEAR RESISTANCE;

EID: 1842715064     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.140     Document Type: Article

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