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Volumn , Issue , 2006, Pages 1-182
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Silicon carbide micro electromechanical systems for harsh environments
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROMECHANICAL DEVICES;
HIGH TEMPERATURE APPLICATIONS;
MEMS;
SILICON CARBIDE;
HARSH ENVIRONMENT;
HIGH TEMPERATURE;
MEMS MATERIALS;
MICRO ELECTROMECHANICAL SYSTEM (MEMS);
MICRO ELECTRO MECHANICAL SYSTEM;
SCIENCE AND TECHNOLOGY;
SCIENTIFIC INFORMATION;
SILICON CARBIDES (SIC);
SILICON COMPOUNDS;
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EID: 84967622880
PISSN: None
EISSN: None
Source Type: Book
DOI: 10.1142/P426 Document Type: Book |
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Times cited : (155)
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References (0)
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