Microfabricated silicon carbide microengine structures

Materials Research Society Symposium - Proceedings

Volumn 546, Issue , 1999, Pages 85-90

  Lohner, Kevin A ^a   Chen, Kuo Shen ^a   Ayon, Arturo A ^a   Mark Spearing, S ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CREEP; ETCHING; GAS TURBINES; RESIDUAL STRESSES; ROTATION; SILICON CARBIDE; STRAIN; SURFACE ROUGHNESS;

MICRO-GAS TURBINE ENGINES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033324415     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. A. H. Epslein, et al, "Micro-Heat Engines, Gas Turbines, and Rocket Engines -the MIT Microengine Project", 28"" AIAA Fluid Dynamics and 4th AIAA Shear Flow Control Conference, (June 1997).
2. T. Rogers, "Vapour Deposited Silicon Carbide", IEE Colloquium on Extremely Hard Materials for Micromechanics, (April 1997).
3. N. Rajan, M. Mehregany, C.A. Zorman, and T.P Richer, "Fabrication and Testing of Micromachined Silicon Carbide and Nickel Fuel Atomizers for Gas Turbine Engines", Solid State Sensor and Actuator Workshop, (June 1998).
4. W. Steffier, Hyper-Therm, Inc., Huntington Beach, CA, (private communication).
5. K-S. Chen, A. Ayon, S. M. Spearing, "Tailoring and Testing the Fracture Strength of Silicon at the Mesoscale", J. American Ceramic Society, (June 1997).
6. C. H. Carter Jr., R. F. Davis, and J. Bentley, "Kinetics and Mechanisms of High Temperature Creep in Silicon Carbide: II, Chemically Vapor Deposited," J. American Ceramic Society, Vol. 67, pp. 732740, (1984).