Silicon carbide micro-reaction-sintering using micromachined silicon molds

Journal of Microelectromechanical Systems

Volumn 10, Issue 1, 2001, Pages 55-61

  Tanaka, Shuji ^b   Sugimoto, Shinya ^b   Li, Jing Feng ^b   Watanabe, Ryuzo ^b   Esashi, Masayoshi ^a,b  

^a IEEE

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Lost mold method; Mechanical properties; Micromachined gas turbine; Micromachining reaction sintering; Silicon carbide; Silicon mold

Indexed keywords

BENDING STRENGTH; BINDING ENERGY; HOT ISOSTATIC PRESSING; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SINTERING; VICKERS HARDNESS TESTING; X RAY DIFFRACTION ANALYSIS;

LOST MOLD METHOD; MICRO-REACTION SINTERING;

SILICON CARBIDE;

EID: 0035278834     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.911092     Document Type: Article

References (9)

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8. Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines