Study on a PECVD SiC-coated pressure sensor

Journal of Micromechanics and Microengineering

Volumn 17, Issue 3, 2007, Pages 426-431

  Zhang, Haixia ^a   Guo, Hui ^a   Wang, Yu ^a   Zhang, Guobing ^a   Li, Zhihong ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL STABILITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON CARBIDE; THERMAL EFFECTS; THIN FILMS;

ANTI-EROSION PROTECTIVE LAYERS; COATING LAYERS; TEMPERATURE COEFFICIENT;

PRESSURE SENSORS;

EID: 34248993622     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/3/002     Document Type: Article

References (13)

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