A CMOS compatible SiC accelerometer

Proceedings of IEEE Sensors

Volumn 2, Issue 2, 2003, Pages 761-764

  Pakula, L S ^a   Yang, H ^a   French, P J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ALUMINUM; CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTROCHEMICAL ELECTRODES; ETCHING; MICROMACHINING; MICROPROCESSOR CHIPS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYIMIDES; SILICON CARBIDE;

READOUT CIRCUITS; SURFACE MICROMACHINING;

SENSOR DATA FUSION;

EID: 1542544594     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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