Magnetron sputtering SiC films investigated by AFM

Thin Solid Films

Volumn 377, Issue 378, 2000, Pages 490-494

  Simao R A ^a   Costa, A K ^a   Achete, C A ^a   Camargo, S S ^a  

^a FEDERAL UNIVERSITY OF RIO DE JANEIRO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; FILM PREPARATION; MAGNETRON SPUTTERING; PRESSURE EFFECTS; SEMICONDUCTING SILICON; SILICON CARBIDE; SINTERING; SUBSTRATES;

LATERAL FORCE MICROSCOPY;

AMORPHOUS FILMS;

EID: 16744362755     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01371-7     Document Type: Article

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