Silicon carbide coated mems strain sensor for harsh environment applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 643-646

  Azevedo, Robert G ^a,b   Zhang, Jingchun ^b   Jones, Debbie G ^a   Myers, David R ^a   Jog, Anand V ^a   Jamshidi, Babak ^a   Wijesundara, Muthu B J ^a   Maboudian, Roya ^b   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION RESISTANCE; ETCHING; INFRARED LAMPS; MEMS; POLYCRYSTALLINE MATERIALS; POTASSIUM HYDROXIDE; SILICON CARBIDE;

DEPOSITION THICKNESS; DOUBLE-ENDED TUNING FORKS; HARSH ENVIRONMENT; MECHANICAL PERFORMANCE; MICROFABRICATION PROCESS; OPERATING TEMPERATURE; PERFORMANCE CHARACTERISTICS; TEMPERATURE SENSITIVITY;

CORROSION RESISTANT COATINGS;

EID: 52249106640     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433166     Document Type: Conference Paper

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