Mechanical properties of a 3C-SiC film between room temperature and 600 °c

Journal of Physics D: Applied Physics

Volumn 40, Issue 11, 2007, Pages 3335-3342

  Pozzi, Michele ^a   Hassan, Musaab ^a,d   Harris, Alun J ^a   Burdess, Jim S ^a   Jiang, Liudi ^b   Lee, Kin K ^b   Cheung, Rebecca ^b   Phelps, Gordon J ^a   Wright, Nick G ^a   Zorman, Christian A ^c   Mehregany, Mehran ^c  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF EDINBURGH   (United Kingdom)

^c Case Western Reserve University   (United States)

^d Academy of Medical Sciences and Technology Sudan   (Sudan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; LASER DOPPLER VELOCIMETERS; MEMS; POLYSILICON; RESIDUAL STRESSES; TENSILE STRESS;

ANALYTICAL EXPRESSION; OPTICAL OBSERVATIONS; SURFACE PROFILING; TEMPERATURE DEPENDENCE;

SILICON CARBIDE;

EID: 34249277079     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/11/012     Document Type: Article

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