Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 251-257

  Rajan, N ^a   Mehregany, M ^a   Zorman, Christian A ^a   Stefanescu, S ^a   Kicher, T P ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIZERS; GAS TURBINES; MICROMACHINING; NICKEL; SILICON CARBIDE;

NICKEL FUEL ATOMIZERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032595009     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788628     Document Type: Article

References (10)

1. N. Rajan, C. A. Zorman, M. Mehregany, R. DeAnna, and R. J. Harvey, "Effect of MEMS-compatible thin-film hard coatings on the erosion resistance of silicon micromachined fuel atomizers," Surface and Coatings Technology, vol. 108/109, pp. 391-397, 1998.
2. R. J. Harvey, "Progress on comparison study of the erosion of conventionally machined and macrolaminated pressure-swirl atomizers," in Int. Gas Turbine and Aeroengine Congress and Exhibition, 1997.
3. A. Fleischman, S. Roy, C. A. Zorman, M. Mehregany, and L. G. Matus, "Polycrystalline silicon carbide for surface micromachining," in 9th Annu. Workshop on Microelectromechanical Systems, San Diego, CA, Feb. 1996, pp. 234-238.
4. J. S. Shor, X. G. Zhang, and R. M. Osgood, "Laser assisted photoelectrochemical etching of n-type β-SiC," J. Electrochem. Soc., vol. 139, pp. 1213-1216, 1992.
5. R. Okojie, A. Ned, A. Kurtz, and W. Carr, "6H-SiC pressure sensors for high temperature applications," in Proc. 9th Ann. Int. Workshop Microelectromechanical Systems, M. Allen and M. Reed, Eds., San Diego, CA, Feb. 11-15, 1996, pp. 146-149.
6. A. Singh, M. Mehregany, S. Phillips, R. Harvey, and M. Benjamin, "Micromachined silicon fuel atomizers for gas turbine engines," Atomization and Sprays, vol. 8, pp. 405-418, 1998.
7. C. C. Chiu, S. B. Desu, G. Vhen, C. Y. Tsai, and W. T. Reynolds, Jr., "Deposition of epitaxial β-SiC films on porous (100) from MTS in a hot wall LPCVD reactor," J. Mater. Res., vol. 10, p. 1099, 1995.
8. C. A. Zorman, A. J. Fleischman, A. S. Dewa, M. Mehregany, C. Jacob, S. Nishino, and P. Pirouz, "Epitaxial growth 3C-SiC films on 4 in diam (100) silicon wafers by atmospheric pressure chemical vapor deposition," J. Appl. Phys., vol. 78, pp. 5186-5138, 1995.
9. N. Rajan, C. A. Zorman, M. Mehregany, R. DeAnna, and R. Harvey, "Performance of 3C-SiC thin films as protective coatings for silicon-micromachined fuel atomizers," Thin Solid Films, vol. 315, pp. 170-178, 1998.
10. B. Bhushan, C. A. Zorman, and M. Mehregany, "Micro/nanotribological studies of single-crystal silicon and polysilicon and SiC films for use in MEMS devices," in Tribology Issues and Opportunities in MEMS, B. Bhushan, Ed. The Netherlands: Kluwer Academic, 1998, pp. 407-430.