Low-stress, heavily-doped polycrystalline silicon carbide for MEMS applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 451-454

  Trevino, Jacob ^a   Fu, Xiao An ^a   Mehregany, Mehran ^a   Zorman, Christian ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELEVATED TEMPERATURES; LOW-PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); MICROMACHINED MEMBRANES; TENSILE RESIDUAL STRESS;

CHEMICAL VAPOR DEPOSITION; DURABILITY; ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; RESIDUAL STRESSES; RESONATORS; SILICON CARBIDE; SILICON WAFERS; STRESS ANALYSIS;

POLYSILICON;

EID: 26944464232     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. C.A. Zorman, S. Rajgopal, X.A. Fu, R. Jezeski, J. Melzak, M. Mehregany, Electrochem. Solid State Lett., vol. 5, pp. G99-G101, 2002.
2. C. R. Stoldt, C. Carraro, W. R. Ashurst, D. Gao, R. T. Howe, and R. Maboudian, Sens. Actuators A 97, pp. 410-415, 2002.
3. M. Wijesundara, D. Gao, C. Carraro, R. Howe, R. Maboudian, J. of Cryst Growth, vol. 259, pp. 18-25, 2003.
4. M. Wijesundara, C. Stoldt, C. Carraro, R. Howe, R Maboudian, Thin Solid Films, 419, pp. 69-75, 2002.
5. G. Krotz, H. Moller, M. Eickhoff, S. Zappe, R. Ziermann, E. Obermeier, Mater. Sci. Eng., vol. B61-62, pp. 516-521, 1999.
6. X.A. Fu, R. Jezeski, C. Zorman, M. Mehregany, Appl. Phys. Lett., vol. 84, pp. 341-343, 2004.
7. C. Hill, R. O'Mahony, A. Duane, J. Mathewson, J. Micromech. Microeng., vol. 13, pg. S133-S133, (2003).
8. B.P. van Drieenhuizen, J.F.L. Goosen, P.J. French, R.F. Wolffenbuttel: Sens, and Act. A, vol. 37-38, pg. 756-765, (1993).
9. J. Mitchell, C.A. Zorman, T. Kicher, S. Roy, and M. Mehregany, J. Aerospace Eng., vol. 16, pp. 46-54, 2003.
10. X.A. Fu, J.L. Dunning, C.A. Zorman, M. Mehregany, Mater. Sci. Forum, vols. 457-460, pp. 1519-1522, 2004.
11. W.C. Tang: PhD Thesis, U. C. Berkeley, 1991.