Fabrication and testing of surface micromachined polycrystalline SiC micromotors

IEEE Electron Device Letters

Volumn 21, Issue 4, 2000, Pages 164-166

  Yasseen, A Azzam ^a   Wu, Chien Hung ^a   Zorman, Christian A ^a   Mehregany, Mehran ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL POLISHING; CHEMICAL VAPOR DEPOSITION; ELECTRIC POWER SUPPLIES TO APPARATUS; LITHOGRAPHY; MICROMACHINING; POLYCRYSTALLINE MATERIALS; REACTIVE ION ETCHING; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING; SILICON CARBIDE; SILICON WAFERS;

HARSH ENVIRONMENTS; MICROMOLDING TECHNIQUE; MICROMOTORS; SURFACE MICROMACHINING; WOBBLE MICROMOTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033902750     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.830969     Document Type: Article

References (10)

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