Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO2 and polysilicon

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 237-242

  Yasseen, A Azzam ^a   Zorman, Christian A ^a   Mehregany, Mehran ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACTUATORS; MICROMACHINING; POLYCRYSTALLINE MATERIALS; REACTIVE ION ETCHING; SILICA;

MICROFABRICATED MOLDS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032595007     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788626     Document Type: Article

References (13)

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