α(6H)-SIC pressure sensors for high temperature applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 146-149

  Okojie, Robert S ^a   Ned, Alex A ^a   Kurtz, Anthony D ^a   Carr, William N ^a  

^a Kulite Semiconductor Products ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; ELECTRIC FIELDS; ENERGY GAP; ETCHING; HEAT RESISTANCE; HETEROJUNCTIONS; HIGH TEMPERATURE APPLICATIONS; SILICON CARBIDE; SILICON WAFERS; SUBSTRATES;

SILICON CARBIDE PRESSURE SENSORS; TEMPERATURE COEFFICIENT OF GAGE FACTOR; TEMPERATURE COEFFICIENT OF RESISTANCE;

SILICON SENSORS;

EID: 0029770937     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)