Elastic constants of low-k and barrier dielectric films measured by Brillouin light scattering

Thin Solid Films

Volumn 493, Issue 1-2, 2005, Pages 175-178

  Carlotti, G ^a,b   Cherault N ^c   Casanova, N ^c   Goldberg, C ^d   Socino, G ^a  

^a UNIVERSITY OF PERUGIA   (Italy)

^b CNR Consiglio Nazionale delle Ricerche   (Italy)

^c STMICROELECTRONICS   (France)

^d FREESCALE SEMICONDUCTOR INC   (United States)

Author keywords

Brillouin scattering; Elastic constants of thin films; Surface acoustic waves

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; BRILLOUIN SCATTERING; DATA ACQUISITION; NETWORKS (CIRCUITS); SILICATE MINERALS; SILICON CARBIDE; SILICON COMPOUNDS;

ELASTIC CONSTANTS OF THIN FILMS; NANO-INDENTATION TECHNIQUES; SCALE INTEGRATED CIRCUITS; SILICATE GLASSES;

DIELECTRIC FILMS;

EID: 27144482671     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.06.019     Document Type: Article

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