-
1
-
-
0000670335
-
Hot embossing - The molding technique for plastic microstructures
-
Heckele M, Bacher W and Müller K 1998 Hot embossing - the molding technique for plastic microstructures Microsyst. Technol. 4 122-4 (Pubitemid 128529381)
-
(1998)
Microsystem Technologies
, vol.4
, Issue.3
, pp. 122-124
-
-
Heckele, M.1
Bacher, W.2
Muller, K.D.3
-
3
-
-
0014868123
-
Embossed hologram motion pictures for television playback
-
10.1364/AO.9.002283 0003-6935
-
Bartolini R, Hannan W, Karlsons D and Lurie M 1970 Embossed hologram motion pictures for television playback Appl. Opt. 9 2283-90
-
(1970)
Appl. Opt.
, vol.9
, pp. 2283-2290
-
-
Bartolini, R.1
Hannan, W.2
Karlsons, D.3
Lurie, M.4
-
4
-
-
1642585252
-
Embossed optical waveguides
-
10.1063/1.1654115
-
Ulrich R, Weber H, Chandross E, Tomlinson W and Franke E 1972 Embossed optical waveguides Appl. Phys. Lett. 20 213-5
-
(1972)
Appl. Phys. Lett.
, vol.20
, pp. 213-215
-
-
Ulrich, R.1
Weber, H.2
Chandross, E.3
Tomlinson, W.4
Franke, E.5
-
5
-
-
0142037327
-
Imprint of sub-25 nm vias and trenches in polymers
-
10.1063/1.114851
-
Chou S Y, Krauss P R and Renstrom P J 1995 Imprint of sub-25 nm vias and trenches in polymers Appl. Phys. Lett. 67 3114-6
-
(1995)
Appl. Phys. Lett.
, vol.67
, pp. 3114-3116
-
-
Chou, S.Y.1
Krauss, P.R.2
Renstrom, P.J.3
-
6
-
-
43049113845
-
Hot embossing of microstructures: Characterization of friction during demolding
-
10.1007/s00542-007-0492-0 0946-7076
-
Worgull M, Hétu J, Kabanemi K and Heckele M 2008 Hot embossing of microstructures: characterization of friction during demolding Microsyst. Technol. 14 767-73
-
(2008)
Microsyst. Technol.
, vol.14
, pp. 767-773
-
-
Worgull, M.1
Hétu, J.2
Kabanemi, K.3
Heckele, M.4
-
7
-
-
79958803257
-
Hot embossing of micro and sub-micro structured inserts for polymer replication
-
10.1007/s00542-010-1182-x 0946-7076
-
Kolew A, Münch D, Sikora K and Worgull M 2011 Hot embossing of micro and sub-micro structured inserts for polymer replication Microsyst. Technol. 17 609-18
-
(2011)
Microsyst. Technol.
, vol.17
, pp. 609-618
-
-
Kolew, A.1
Münch, D.2
Sikora, K.3
Worgull, M.4
-
8
-
-
70450285211
-
Deformation behavior of solid polymer during hot embossing process
-
10.1016/j.mee.2009.07.014 0167-9317
-
Liu C, Li J, Liu J and Wang L 2010 Deformation behavior of solid polymer during hot embossing process Microelectron. Eng. 87 200-7
-
(2010)
Microelectron. Eng.
, vol.87
, pp. 200-207
-
-
Liu, C.1
Li, J.2
Liu, J.3
Wang, L.4
-
11
-
-
84856604140
-
Recent developments and design challenges in continuous roller micro- and nanoimprinting
-
10.1116/1.3661355 0734-211X B 010801
-
Dumond J J and Low H Y 2012 Recent developments and design challenges in continuous roller micro- and nanoimprinting J. Vac. Sci. Technol. B 30 010801
-
(2012)
J. Vac. Sci. Technol.
, vol.30
-
-
Dumond, J.J.1
Low, H.Y.2
-
12
-
-
3543075123
-
Towards roll-to-roll fabrication of electronics, optics, and optoelectronics for smart and intelligent packaging
-
10.1117/12.535456
-
Kololuoma T K, Tuomikoski M, Makela T, Heilmann J, Haring T, Kallioinen J, Hagberg J, Kettunen I and Kopola H K 2004 Towards roll-to-roll fabrication of electronics, optics, and optoelectronics for smart and intelligent packaging Proc. SPIE 5363 77-85
-
(2004)
Proc. SPIE
, vol.5363
, pp. 77-85
-
-
Kololuoma, T.K.1
Tuomikoski, M.2
Makela, T.3
Heilmann, J.4
Haring, T.5
Kallioinen, J.6
Hagberg, J.7
Kettunen, I.8
Kopola, H.K.9
-
13
-
-
84055207541
-
Disposable roll-to-roll hot embossed electrophoresis chip for detection of antibiotic resistance gene mecA in bacteria
-
10.1039/c1lc20782b
-
Liedert R, Amundsen L K, Hokkanen A, Mäki M, Aittakorpi A, Pakanen M, Scherer J R, Mathies R A, Kurkinen M and Uusitalo S 2012 Disposable roll-to-roll hot embossed electrophoresis chip for detection of antibiotic resistance gene mecA in bacteria Lab. Chip 12 333-9
-
(2012)
Lab. Chip
, vol.12
, pp. 333-339
-
-
Liedert, R.1
Amundsen, L.K.2
Hokkanen, A.3
Mäki, M.4
Aittakorpi, A.5
Pakanen, M.6
Scherer, J.R.7
Mathies, R.A.8
Kurkinen, M.9
Uusitalo, S.10
-
14
-
-
84867490015
-
3D nanomolding for lab on a chip applications
-
10.1039/c2lc40572e
-
Park S, Choi J, Amirsadeghi A, Lee J and Park S 2012 3D nanomolding for lab-on-a-chip applications Lab. Chip 12 4764-71
-
(2012)
Lab. Chip
, vol.12
, pp. 4764-4771
-
-
Park, S.1
Choi, J.2
Amirsadeghi, A.3
Lee, J.4
Park, S.5
-
15
-
-
79952688084
-
Roll-to-roll fabricated lab on a chip devices
-
10.1088/0960-1317/21/3/035006 0960-1317 035006
-
Vig A L, Mäkelä T, Majander P, Lambertini V, Ahopelto J and Kristensen A 2011 Roll-to-roll fabricated lab-on-a-chip devices J. Micromech. Microeng. 21 035006
-
(2011)
J. Micromech. Microeng.
, vol.21
, Issue.3
-
-
Vig, A.L.1
Mäkelä, T.2
Majander, P.3
Lambertini, V.4
Ahopelto, J.5
Kristensen, A.6
-
16
-
-
84857356569
-
Roll manufacturing of flexible microfluidic devices in thin PMMA and COC foils by embossing and lamination
-
10.1007/s00542-011-1358-z 0946-7076
-
Metwally K, Robert L, Queste S, Gauthier-Manuel B and Khan-Malek C 2012 Roll manufacturing of flexible microfluidic devices in thin PMMA and COC foils by embossing and lamination Microsyst. Technol. 18 199-207
-
(2012)
Microsyst. Technol.
, vol.18
, pp. 199-207
-
-
Metwally, K.1
Robert, L.2
Queste, S.3
Gauthier-Manuel, B.4
Khan-Malek, C.5
-
17
-
-
84865500682
-
Roll-to-roll pilot nanoimprinting process for backlight devices
-
10.1016/j.mee.2012.03.031 0167-9317
-
Mäkelä T and Haatainen T 2012 Roll-to-roll pilot nanoimprinting process for backlight devices Microelectron. Eng. 97 89-91
-
(2012)
Microelectron. Eng.
, vol.97
, pp. 89-91
-
-
Mäkelä, T.1
Haatainen, T.2
-
19
-
-
1642603474
-
Review on micro molding of thermoplastic polymers
-
10.1088/0960-1317/14/3/R01 0960-1317 R01
-
Heckele M and Schomburg W K 2004 Review on micro molding of thermoplastic polymers J. Micromech. Microeng. 14 R1-14
-
(2004)
J. Micromech. Microeng.
, vol.14
, Issue.3
, pp. 1-14
-
-
Heckele, M.1
Schomburg, W.K.2
-
21
-
-
67349196368
-
Experimental and numerical study on the viscoelastic property of polycarbonate near glass transition temperature for micro thermal imprint process
-
10.1016/j.matdes.2009.03.045 0264-1275
-
Lan S, Lee H J, Lee S H, Ni J and Lai X 2009 Experimental and numerical study on the viscoelastic property of polycarbonate near glass transition temperature for micro thermal imprint process Mater. Des. 30 3879-84
-
(2009)
Mater. Des.
, vol.30
, pp. 3879-3884
-
-
Lan, S.1
Lee, H.J.2
Lee, S.H.3
Ni, J.4
Lai, X.5
-
22
-
-
2942558559
-
Recent progress in nanoimprint technology and its applications
-
10.1088/0022-3727/37/11/R01 0022-3727 R01
-
Guo L J 2004 Recent progress in nanoimprint technology and its applications J. Phys. D: Appl. Phys. 37 R123-41
-
(2004)
J. Phys. D: Appl. Phys.
, vol.37
, Issue.11
-
-
Guo, L.J.1
-
25
-
-
0028370983
-
Strain gradient plasticity: Theory and experiment
-
10.1016/0956-7151(94)90502-9 0956-7151
-
Fleck N, Muller G, Ashby M and Hutchinson J 1994 Strain gradient plasticity: theory and experiment Acta Metall. Mater. 42 475-87
-
(1994)
Acta Metall. Mater.
, vol.42
, pp. 475-487
-
-
Fleck, N.1
Muller, G.2
Ashby, M.3
Hutchinson, J.4
-
26
-
-
0032020971
-
Indentation size effects in crystalline materials: A law for strain gradient plasticity
-
Nix W D and Gao H 1998 Indentation size effects in crystalline materials: a law for strain gradient plasticity J. Mech. Phys. Solids 46 411-25 (Pubitemid 128394207)
-
(1998)
Journal of the Mechanics and Physics of Solids
, vol.46
, Issue.3
, pp. 411-425
-
-
Nix, W.D.1
Gao, H.2
-
27
-
-
33845196254
-
Size effects in thin sheet metal forming and its elastic-plastic constitutive model
-
DOI 10.1016/j.matdes.2006.02.011, PII S0261306906000604
-
Peng L, Liu F, Ni J and Lai X 2007 Size effects in thin sheet metal forming and its elastic-plastic constitutive model Mater. Des. 28 1731-6 (Pubitemid 44849254)
-
(2007)
Materials and Design
, vol.28
, Issue.5
, pp. 1731-1736
-
-
Peng, L.1
Liu, F.2
Ni, J.3
Lai, X.4
-
28
-
-
52949129057
-
Material behavior modelling in micro/meso-scale forming process with considering size/scale effects
-
10.1016/j.commatsci.2008.02.017 0927-0256
-
Lai X, Peng L, Hu P, Lan S and Ni J 2008 Material behavior modelling in micro/meso-scale forming process with considering size/scale effects Comput. Mater. Sci. 43 1003-9
-
(2008)
Comput. Mater. Sci.
, vol.43
, pp. 1003-1009
-
-
Lai, X.1
Peng, L.2
Hu, P.3
Lan, S.4
Ni, J.5
-
29
-
-
70349261288
-
Analysis of micro/mesoscale sheet forming process with uniform size dependent material constitutive model
-
10.1016/j.msea.2009.06.061 0921-5093 A
-
Peng L, Lai X, Lee H J, Song J H and Ni J 2009 Analysis of micro/mesoscale sheet forming process with uniform size dependent material constitutive model Mater. Sci. Eng. A 526 93-9
-
(2009)
Mater. Sci. Eng.
, vol.526
, pp. 93-99
-
-
Peng, L.1
Lai, X.2
Lee, H.J.3
Song, J.H.4
Ni, J.5
-
30
-
-
72749104360
-
Friction behavior modeling and analysis in micro/meso scale metal forming process
-
10.1016/j.matdes.2009.10.040 0264-1275
-
Peng L, Lai X, Lee H J, Song J H and Ni J 2010 Friction behavior modeling and analysis in micro/meso scale metal forming process Mater. Des. 31 1953-61
-
(2010)
Mater. Des.
, vol.31
, pp. 1953-1961
-
-
Peng, L.1
Lai, X.2
Lee, H.J.3
Song, J.H.4
Ni, J.5
-
31
-
-
0036578046
-
Effects of thickness on mechanical properties of conducting polythiophene films
-
DOI 10.1023/A:1015737106002
-
Wang X S and Feng X Q 2002 Effects of thickness on mechanical properties of conducting polythiophene films J. Mater. Sci. Lett. 21 715-7 (Pubitemid 34758923)
-
(2002)
Journal of Materials Science Letters
, vol.21
, Issue.9
, pp. 715-717
-
-
Wang, X.-S.1
Feng, X.-Q.2
-
32
-
-
2942668061
-
Influence of thickness on the mechanical properties for starch films
-
10.1016/j.carbpol.2004.03.019 0144-8617
-
Jansson A and Thuvander F 2004 Influence of thickness on the mechanical properties for starch films Carbohydr. Polym. 56 499-503
-
(2004)
Carbohydr. Polym.
, vol.56
, pp. 499-503
-
-
Jansson, A.1
Thuvander, F.2
-
33
-
-
61849142854
-
Thickness-dependent mechanical properties of polydimethylsiloxane membranes
-
10.1088/0960-1317/19/3/035028 0960-1317 035028
-
Liu M, Sun J, Sun Y, Bock C and Chen Q 2009 Thickness-dependent mechanical properties of polydimethylsiloxane membranes J. Micromech. Microeng. 19 035028
-
(2009)
J. Micromech. Microeng.
, vol.19
, Issue.3
-
-
Liu, M.1
Sun, J.2
Sun, Y.3
Bock, C.4
Chen, Q.5
-
34
-
-
0033277018
-
Strain gradient plasticity effect in indentation hardness of polymers
-
Chong A C M and Lam D C C 1999 Strain gradient plasticity effect in indentation hardness of polymers J. Mater. Res. 14 4103-10 (Pubitemid 32872144)
-
(1999)
Journal of Materials Research
, vol.14
, Issue.10
, pp. 4103-4110
-
-
Chong, A.C.M.1
Lam, D.C.C.2
-
35
-
-
0032595451
-
Indentation model and strain gradient plasticity law for glassy polymers
-
10.1557/JMR.1999.0512 0884-2914
-
Lam D C C and Chong A 1999 Indentation model and strain gradient plasticity law for glassy polymers J. Mater. Res. 14 3784-8
-
(1999)
J. Mater. Res.
, vol.14
, pp. 3784-3788
-
-
Lam, D.C.C.1
Chong, A.2
-
36
-
-
71849087175
-
Size dependent hardness of polyamide/imide
-
10.2174/1874158400802010089
-
Tatiraju R V S, Han C S and Nikolov S 2008 Size dependent hardness of polyamide/imide Open Mech. J. 2 89-92
-
(2008)
Open Mech. J.
, vol.2
, pp. 89-92
-
-
Tatiraju, R.V.S.1
Han, C.S.2
Nikolov, S.3
-
37
-
-
33846080731
-
On the origin of size effects in small-strain elasticity of solid polymers
-
DOI 10.1016/j.ijsolstr.2006.06.039, PII S0020768306002496
-
Nikolov S, Han C S and Raabe D 2007 On the origin of size effects in small-strain elasticity of solid polymers Int. J. Solids. Struct. 44 1582-92 (Pubitemid 46072862)
-
(2007)
International Journal of Solids and Structures
, vol.44
, Issue.5
, pp. 1582-1592
-
-
Nikolov, S.1
Han, C.-S.2
Raabe, D.3
-
38
-
-
0009189983
-
Effect of cross-link density on strain gradient plasticity in epoxy
-
DOI 10.1016/S0921-5093(99)00724-8
-
Lam D C C and Chong A 2000 Effect of cross-link density on strain gradient plasticity in epoxy Mater. Sci. Eng. A 281 156-61 (Pubitemid 30561102)
-
(2000)
Materials Science and Engineering A
, vol.281
, Issue.1
, pp. 156-161
-
-
Lam, D.C.C.1
Chong, A.C.M.2
-
39
-
-
34347254180
-
Indentation size effects in polymers and related rotation gradients
-
DOI 10.1557/jmr.2007.0197
-
Han C S and Nikolova S 2007 Indentation size effects in polymers and related rotation gradients J. Mater. Res. 22 1662-72 (Pubitemid 47008240)
-
(2007)
Journal of Materials Research
, vol.22
, Issue.6
, pp. 1662-1672
-
-
Han, C.-S.1
Nikolov, S.2
-
40
-
-
71849098664
-
Influence of the molecular structure on indentation size effect in polymers
-
10.1016/j.msea.2009.08.033 0921-5093 A
-
Han C S 2010 Influence of the molecular structure on indentation size effect in polymers Mater. Sci. Eng. A 527 619-24
-
(2010)
Mater. Sci. Eng.
, vol.527
, pp. 619-624
-
-
Han, C.S.1
-
41
-
-
0015673725
-
A theory for the low-temperature plastic deformation of glassy polymers
-
10.1080/14786437308220987 0031-8086
-
Argon A 1973 A theory for the low-temperature plastic deformation of glassy polymers Philos. Mag. 28 839-65
-
(1973)
Philos. Mag.
, vol.28
, pp. 839-865
-
-
Argon, A.1
-
42
-
-
24144462483
-
Role of material microstructure in plate stiffness with relevance to microcantilever sensors
-
DOI 10.1088/0960-1317/15/5/024
-
McFarland A W and Colton J S 2005 Role of material microstructure in plate stiffness with relevance to microcantilever sensors J. Micromech. Microeng. 15 1060 (Pubitemid 41237440)
-
(2005)
Journal of Micromechanics and Microengineering
, vol.15
, Issue.5
, pp. 1060-1067
-
-
Mcfarland, A.W.1
Colton, J.S.2
-
43
-
-
0038721068
-
Experiments and theory in strain gradient elasticity
-
10.1016/S0022-5096(03)00053-X 0022-5096
-
Lam D C C, Yang F, Chong A C M, Wang J and Tong P 2003 Experiments and theory in strain gradient elasticity J. Mech. Phys. Solids 51 1477-508
-
(2003)
J. Mech. Phys. Solids
, vol.51
, pp. 1477-1508
-
-
Lam, D.C.C.1
Yang, F.2
Chong, A.C.M.3
Wang, J.4
Tong, P.5
-
44
-
-
77957585959
-
Size-dependent behavior of macromolecular solids I: Molecular origin of the size effect
-
Wei W and Lam D C C 2010 Size-dependent behavior of macromolecular solids I: molecular origin of the size effect Comp. Model. Eng. Sci. 64 213-26
-
(2010)
Comp. Model. Eng. Sci.
, vol.64
, pp. 213-226
-
-
Wei, W.1
Lam, D.C.C.2
-
45
-
-
78649847435
-
Size-dependent behavior of macromolecular solids II: Higher-order viscoelastic theory and experiments
-
Lam D C C, Keung L H and Tong P 2010 Size-dependent behavior of macromolecular solids II: higher-order viscoelastic theory and experiments Comp. Model. Eng. Sci. 66 73-99
-
(2010)
Comp. Model. Eng. Sci.
, vol.66
, pp. 73-99
-
-
Lam, D.C.C.1
Keung, L.H.2
Tong, P.3
-
46
-
-
0037150391
-
Couple stress based strain gradient theory for elasticity
-
DOI 10.1016/S0020-7683(02)00152-X, PII S002076830200152X
-
Yang F, Chong A C M, Lam D C C and Tong P 2002 Couple stress based strain gradient theory for elasticity Int. J. Solids. Struct. 39 2731-43 (Pubitemid 34617098)
-
(2002)
International Journal of Solids and Structures
, vol.39
, Issue.10
, pp. 2731-2743
-
-
Yang, F.1
Chong, A.C.M.2
Lam, D.C.C.3
Tong, P.4
-
47
-
-
0031238385
-
Thickness dependence of work of fracture parameters of an amorphous copolyester
-
PII S0032386196010610
-
Karger-Kocsis J, Czigány T and Moskala E J 1997 Thickness dependence of work of fracture parameters of an amorphous copolyester Polymer 38 4587-93 (Pubitemid 127704520)
-
(1997)
Polymer
, vol.38
, Issue.18
, pp. 4587-4593
-
-
Karger-Kocsis, J.1
Czigany, T.2
Moskala, E.J.3
-
49
-
-
0032494328
-
Nano-indentation of polymeric surfaces
-
10.1088/0022-3727/31/19/006 0022-3727 006
-
Briscoe B, Fiori L and Pelillo E 1998 Nano-indentation of polymeric surfaces J. Phys. D: Appl. Phys. 31 2395
-
(1998)
J. Phys. D: Appl. Phys.
, vol.31
, Issue.19
, pp. 2395
-
-
Briscoe, B.1
Fiori, L.2
Pelillo, E.3
-
50
-
-
0034507393
-
Continuous stiffness measurement and creep behavior of composite magnetic tapes
-
DOI 10.1016/S0040-6090(00)01368-7
-
Li X and Bhushan B 2000 Continuous stiffness measurement and creep behavior of composite magnetic tapes Thin Solid Films 377-378 401-6 (Pubitemid 32035244)
-
(2000)
Thin Solid Films
, vol.377-378
, pp. 401-406
-
-
Li, X.1
Bhushan, B.2
-
51
-
-
23844442341
-
Polishing effect on nanoindentation behavior of nylon 66 and its nanocomposites
-
DOI 10.1016/j.polymertesting.2005.04.004, PII S014294180500067X
-
Shen L, Liu T and Lv P 2005 Polishing effect on nanoindentation behavior of nylon 66 and its nanocomposites Polym. Test. 24 746-9 (Pubitemid 41165566)
-
(2005)
Polymer Testing
, vol.24
, Issue.6
, pp. 746-749
-
-
Shen, L.1
Liu, T.2
Lv, P.3
-
55
-
-
84891083224
-
-
Karlsruhe Institute of Technology (KIT)
-
Karlsruhe Institute of Technology (KIT) www.imt.kit.edu/english/285.php
-
-
-
-
56
-
-
74149086557
-
Filling modes of polymer during submicron and nano-fabrication near glass transition temperature
-
10.1016/j.jmatprotec.2009.12.008 0924-0136
-
Liu C, Li J, Liang Y, Peng J and Wang L 2010 Filling modes of polymer during submicron and nano-fabrication near glass transition temperature J. Mater. Process. Technol. 210 696-702
-
(2010)
J. Mater. Process. Technol.
, vol.210
, pp. 696-702
-
-
Liu, C.1
Li, J.2
Liang, Y.3
Peng, J.4
Wang, L.5
-
57
-
-
77952932536
-
Effect of forming conditions on linear patterning of polymer materials by hot embossing process
-
10.1007/s12541-010-0015-2
-
Lee C S, Kang C G and Youn S W 2010 Effect of forming conditions on linear patterning of polymer materials by hot embossing process Int. J. Precis. Eng. Manuf. 11 119-27
-
(2010)
Int. J. Precis. Eng. Manuf.
, vol.11
, pp. 119-127
-
-
Lee, C.S.1
Kang, C.G.2
Youn, S.W.3
-
58
-
-
84861348080
-
Hot-embossing experiments of polymethyl methacrylate across the glass transition temperature with variation in temperature and hold times
-
10.1002/pen.23066 0032-3888
-
Singh K and Dupaix R B 2012 Hot-embossing experiments of polymethyl methacrylate across the glass transition temperature with variation in temperature and hold times Polym. Eng. Sci. 52 1284-92
-
(2012)
Polym. Eng. Sci.
, vol.52
, pp. 1284-1292
-
-
Singh, K.1
Dupaix, R.B.2
-
59
-
-
84874274901
-
Study on the replication accuracy of polymer hot embossed microchannels
-
10.1016/j.icheatmasstransfer.2012.12.008
-
Lin M C, Yeh J P, Chen S C, Chien R D and Hsu C L 2013 Study on the replication accuracy of polymer hot embossed microchannels Int. Commun. Heat Mass 42 55-61
-
(2013)
Int. Commun. Heat Mass
, vol.42
, pp. 55-61
-
-
Lin, M.C.1
Yeh, J.P.2
Chen, S.C.3
Chien, R.D.4
Hsu, C.L.5
-
60
-
-
84878090820
-
A high-brightness light guide plate with high precise double-sided microstructures fabricated using the fixed boundary hot embossing technique
-
10.1088/0960-1317/23/3/035033 0960-1317 035033
-
Yang C H and Yang S Y 2013 A high-brightness light guide plate with high precise double-sided microstructures fabricated using the fixed boundary hot embossing technique J. Micromech. Microeng. 23 035033
-
(2013)
J. Micromech. Microeng.
, vol.23
, Issue.3
-
-
Yang, C.H.1
Yang, S.Y.2
-
61
-
-
70350450949
-
Finite element analysis of PMMA pattern formation during hot embossing process
-
Kiew C M, Lin W J, Teo T J, Tan J L, Lin W and Yang G 2009 Finite element analysis of PMMA pattern formation during hot embossing process IEEE/ASME Conf. on Adv. Intell. Mechatron. (AIM) pp 314-9
-
(2009)
IEEE/ASME Conf. on Adv. Intell. Mechatron. (AIM)
, pp. 314-319
-
-
Kiew, C.M.1
Lin, W.J.2
Teo, T.J.3
Tan, J.L.4
Lin, W.5
Yang, G.6
-
62
-
-
84858960192
-
Numerical simulation of hot imprint process of periodical lamellar microstructure into polycarbonate
-
10.1117/12.915107
-
Gaidys R, Narijauskaitė B, Palevičius A and Janušas G 2012 Numerical simulation of hot imprint process of periodical lamellar microstructure into polycarbonate Proc. SPIE 8248 82480I-9
-
(2012)
Proc. SPIE
, vol.8248
-
-
Gaidys, R.1
Narijauskaite, B.2
Palevičius, A.3
Janušas, G.4
-
63
-
-
80053343532
-
Numerical simulation of hot embossing filling stage using a viscoelastic constitutive model
-
10.1007/s13367-011-0017-3
-
Park J M, Kang T G and Park S J 2011 Numerical simulation of hot embossing filling stage using a viscoelastic constitutive model Korea-Aust. Rheol. J. 23 139-46
-
(2011)
Korea-Aust. Rheol. J.
, vol.23
, pp. 139-146
-
-
Park, J.M.1
Kang, T.G.2
Park, S.J.3
-
64
-
-
77952331155
-
A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers
-
10.1088/0960-1317/20/6/065001 0960-1317 065001
-
Taylor H, Hale M, Lam Y C and Boning D 2010 A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers J. Micromech. Microeng. 20 065001
-
(2010)
J. Micromech. Microeng.
, vol.20
, Issue.6
-
-
Taylor, H.1
Hale, M.2
Lam, Y.C.3
Boning, D.4
-
65
-
-
62449290432
-
Finite element modeling of polymer hot embossing using a glass-rubber finite strain constitutive model
-
10.1002/pen.21323 0032-3888
-
Dupaix R B and Cash W 2009 Finite element modeling of polymer hot embossing using a glass-rubber finite strain constitutive model Polym. Eng. Sci. 49 531-43
-
(2009)
Polym. Eng. Sci.
, vol.49
, pp. 531-543
-
-
Dupaix, R.B.1
Cash, W.2
-
66
-
-
84878272825
-
Enhanced polymer filling and uniform shrinkage of polymer and mold in a hot embossing process
-
10.1002/pen.23379 0032-3888
-
He Y, Fu J, Zhao P and Chen Z C 2012 Enhanced polymer filling and uniform shrinkage of polymer and mold in a hot embossing process Polym. Eng. Sci. 53 1314-29
-
(2012)
Polym. Eng. Sci.
, vol.53
, pp. 1314-1329
-
-
He, Y.1
Fu, J.2
Zhao, P.3
Chen, Z.C.4
-
67
-
-
80051946949
-
Finite element modeling of polymer flow during hot embossing with different mold structures and embossing conditions
-
10.4028/www.scientific.net/AMR.305.144 1435-1889
-
Zhang T, He Y and Fu J 2011 Finite element modeling of polymer flow during hot embossing with different mold structures and embossing conditions Adv. Mater. Res. 305 144-8
-
(2011)
Adv. Mater. Res.
, vol.305
, pp. 144-148
-
-
Zhang, T.1
He, Y.2
Fu, J.3
-
68
-
-
77955517183
-
A thermo-mechanically-coupled large-deformation theory for amorphous polymers in a temperature range which spans their glass transition
-
10.1016/j.ijplas.2010.01.004 0749-6419
-
Srivastava V, Chester S A, Ames N M and Anand L 2010 A thermo-mechanically-coupled large-deformation theory for amorphous polymers in a temperature range which spans their glass transition Int. J. Plast. 26 1138-82
-
(2010)
Int. J. Plast.
, vol.26
, pp. 1138-1182
-
-
Srivastava, V.1
Chester, S.A.2
Ames, N.M.3
Anand, L.4
-
69
-
-
79957964422
-
Effect of polymer orientation on pattern replication in a micro-hot embossing process: Experiments and numerical simulation
-
10.1088/0960-1317/21/6/065007 0960-1317 065007
-
Jena R K, Taylor H K, Lam Y C, Boning D S and Yue C Y 2011 Effect of polymer orientation on pattern replication in a micro-hot embossing process: experiments and numerical simulation J. Micromech. Microeng. 21 065007
-
(2011)
J. Micromech. Microeng.
, vol.21
, Issue.6
-
-
Jena, R.K.1
Taylor, H.K.2
Lam, Y.C.3
Boning, D.S.4
Yue, C.Y.5
-
70
-
-
77958473652
-
High fidelity hot-embossing of COC microdevices using a one-step process without pre-annealing of polymer substrate
-
10.1016/j.snb.2010.08.018 B
-
Jena R K, Yue C Y, Lam Y C and Wang Z Y 2010 High fidelity hot-embossing of COC microdevices using a one-step process without pre-annealing of polymer substrate Sensors Actuator B 150 692-9
-
(2010)
Sensors Actuator
, vol.150
, pp. 692-699
-
-
Jena, R.K.1
Yue, C.Y.2
Lam, Y.C.3
Wang, Z.Y.4
-
71
-
-
79956370091
-
Large-strain thermo-mechanical behavior of cyclic olefin copolymers: Application to hot embossing and thermal bonding for the fabrication of microfluidic devices
-
10.1016/j.snb.2010.11.031 B
-
Jena R K, Chester S A, Srivastava V, Yue C Y, Anand L and Lam Y C 2011 Large-strain thermo-mechanical behavior of cyclic olefin copolymers: application to hot embossing and thermal bonding for the fabrication of microfluidic devices Sensors Actuator B 155 93-105
-
(2011)
Sensors Actuator
, vol.155
, pp. 93-105
-
-
Jena, R.K.1
Chester, S.A.2
Srivastava, V.3
Yue, C.Y.4
Anand, L.5
Lam, Y.C.6
-
72
-
-
79961212056
-
Rheological (visco-elastic behaviour) analysis of cyclic olefin copolymers with application to hot embossing for microfabrication
-
10.1088/0960-1317/21/8/085029 0960-1317 085029
-
Jena R K, Chen X, Yue C Y and Lam Y C 2011 Rheological (visco-elastic behaviour) analysis of cyclic olefin copolymers with application to hot embossing for microfabrication J. Micromech. Microeng. 21 085029
-
(2011)
J. Micromech. Microeng.
, vol.21
, Issue.8
-
-
Jena, R.K.1
Chen, X.2
Yue, C.Y.3
Lam, Y.C.4
-
73
-
-
79961225715
-
Analysis and characterization of demolding of hot embossed polymer microstructures
-
10.1088/0960-1317/21/8/085024 0960-1317 085024
-
Dirckx M E and Hardt D E 2011 Analysis and characterization of demolding of hot embossed polymer microstructures J. Micromech. Microeng. 21 085024
-
(2011)
J. Micromech. Microeng.
, vol.21
, Issue.8
-
-
Dirckx, M.E.1
Hardt, D.E.2
-
74
-
-
79957960484
-
A razor-blade test of the demolding energy in a thermoplastic embossing process
-
10.1088/0960-1317/21/6/067002 0960-1317 067002
-
Taylor H, Boning D and Iliescu C 2011 A razor-blade test of the demolding energy in a thermoplastic embossing process J. Micromech. Microeng. 21 067002
-
(2011)
J. Micromech. Microeng.
, vol.21
, Issue.6
-
-
Taylor, H.1
Boning, D.2
Iliescu, C.3
-
75
-
-
81155152477
-
Hot-embossing performance of silicon micromold coated with self-assembled n-octadecyltrichlorosilane
-
10.1016/j.snb.2011.07.036 B
-
Saha B, Tor S B, Liu E, Hardt D E and Chun J H 2011 Hot-embossing performance of silicon micromold coated with self-assembled n- octadecyltrichlorosilane Sensors Actuator B 160 207-14
-
(2011)
Sensors Actuator
, vol.160
, pp. 207-214
-
-
Saha, B.1
Tor, S.B.2
Liu, E.3
Hardt, D.E.4
Chun, J.H.5
-
76
-
-
77949877277
-
Replication performance of Si-N-DLC-coated Si micro-molds in micro-hot-embossing
-
10.1088/0960-1317/20/4/045007 0960-1317 045007
-
Saha B, Liu E, Tor S, Khun N, Hardt D and Chun J 2010 Replication performance of Si-N-DLC-coated Si micro-molds in micro-hot-embossing J. Micromech. Microeng. 20 045007
-
(2010)
J. Micromech. Microeng.
, vol.20
, Issue.4
-
-
Saha, B.1
Liu, E.2
Tor, S.3
Khun, N.4
Hardt, D.5
Chun, J.6
-
77
-
-
77949300919
-
Numerical simulation of a thermoviscoelastic frictional problem with application to the hot-embossing process for manufacturing of microcomponents
-
10.3139/217.2227 0930-777X
-
Kabanemi K, Marcotte J P, Hétu J F, Worgull M and Heckele M 2009 Numerical simulation of a thermoviscoelastic frictional problem with application to the hot-embossing process for manufacturing of microcomponents Int. Polym. Process. 174-84
-
(2009)
Int. Polym. Process.
, pp. 174-184
-
-
Kabanemi, K.1
Marcotte, J.P.2
Hétu, J.F.3
Worgull, M.4
Heckele, M.5
-
78
-
-
44249109514
-
Studies of polymer deformation and recovery in micro hot embossing
-
10.1007/s00542-007-0486-y 0946-7076
-
Shan X, Liu Y and Lam Y 2008 Studies of polymer deformation and recovery in micro hot embossing Microsyst. Technol. 14 1055-60
-
(2008)
Microsyst. Technol.
, vol.14
, pp. 1055-1060
-
-
Shan, X.1
Liu, Y.2
Lam, Y.3
-
79
-
-
34247591461
-
Structure size dependent recovery of thin polystyrene layers in thermal imprint lithography
-
DOI 10.1016/j.mee.2007.01.093, PII S0167931707000494, Proceedings of the 32nd International Conference on Micro- and Nano-Engineering
-
Bogdanski N, Wissen M, Möllenbeck S and Scheer H-C 2007 Structure size dependent recovery of thin polystyrene layers in thermal imprint lithography Microelectron. Eng. 84 860-3 (Pubitemid 46678304)
-
(2007)
Microelectronic Engineering
, vol.84
, Issue.5-8
, pp. 860-863
-
-
Bogdanski, N.1
Wissen, M.2
Mollenbeck, S.3
Scheer, H.-C.4
-
80
-
-
57249103620
-
Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process
-
10.1116/1.2987956 0734-211X B
-
Takagi H, Takahashi M, Maeda R, Onishi Y, Iriye Y, Iwasaki T and Hirai Y 2008 Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process J. Vac. Sci. Technol. B 26 2399-403
-
(2008)
J. Vac. Sci. Technol.
, vol.26
, pp. 2399-2403
-
-
Takagi, H.1
Takahashi, M.2
Maeda, R.3
Onishi, Y.4
Iriye, Y.5
Iwasaki, T.6
Hirai, Y.7
-
81
-
-
2342624122
-
Computer aided modelling of flexible forming process
-
10.1016/j.jmatprotec.2004.02.049 0924-0136
-
Dirikolu M H and Akdemir E 2004 Computer aided modelling of flexible forming process J. Mater. Process. Technol. 148 376-81
-
(2004)
J. Mater. Process. Technol.
, vol.148
, pp. 376-381
-
-
Dirikolu, M.H.1
Akdemir, E.2
-
82
-
-
57149106123
-
Investigation of micro/meso sheet soft punch stamping process - Simulation and experiments
-
10.1016/j.matdes.2008.05.074 0264-1275
-
Peng L, Hu P, Lai X, Mei D and Ni J 2009 Investigation of micro/meso sheet soft punch stamping process - simulation and experiments Mater. Des. 30 783-90
-
(2009)
Mater. Des.
, vol.30
, pp. 783-790
-
-
Peng, L.1
Hu, P.2
Lai, X.3
Mei, D.4
Ni, J.5
-
83
-
-
55149088338
-
Rubber-assisted micro forming of polymer thin films
-
10.1007/s00542-008-0680-6 0946-7076
-
Nagarajan P and Yao D 2009 Rubber-assisted micro forming of polymer thin films Microsyst. Technol. 15 251-7
-
(2009)
Microsyst. Technol.
, vol.15
, pp. 251-257
-
-
Nagarajan, P.1
Yao, D.2
-
84
-
-
79951741207
-
Uniform shell patterning using rubber-assisted hot embossing process: I. Experimental
-
10.1002/pen.21855 0032-3888
-
Nagarajan P and Yao D 2011 Uniform shell patterning using rubber-assisted hot embossing process: I. Experimental Polym. Eng. Sci. 51 592-600
-
(2011)
Polym. Eng. Sci.
, vol.51
, pp. 592-600
-
-
Nagarajan, P.1
Yao, D.2
-
85
-
-
79951749928
-
Uniform shell patterning using rubber-assisted hot embossing process: II. Process analysis
-
10.1002/pen.21854 0032-3888
-
Nagarajan P and Yao D 2011 Uniform shell patterning using rubber-assisted hot embossing process: II. Process analysis Polym. Eng. Sci. 51 601-8
-
(2011)
Polym. Eng. Sci.
, vol.51
, pp. 601-608
-
-
Nagarajan, P.1
Yao, D.2
-
86
-
-
23844552425
-
Hot embossing precise structure onto plastic plates by ultrasonic vibration
-
DOI 10.1002/pen.20357
-
Liu S J and Dung Y T 2005 Hot embossing precise structure onto plastic plates by ultrasonic vibration Polym. Eng. Sci. 45 915-25 (Pubitemid 41164880)
-
(2005)
Polymer Engineering and Science
, vol.45
, Issue.7
, pp. 915-925
-
-
Liu, S.-J.1
Dung, Y.-T.2
-
87
-
-
33845732271
-
Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration
-
DOI 10.1007/s00542-006-0203-2, HARMST, High Aspect Ration Micro Structure Technology Workshop
-
Mekaru H, Nakamura O, Maruyama O, Maeda R and Hattori T 2007 Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration Microsyst. Technol. 13 385-91 (Pubitemid 46012836)
-
(2007)
Microsystem Technologies
, vol.13
, Issue.3-4
, pp. 385-391
-
-
Mekaru, H.1
Nakamura, O.2
Maruyama, O.3
Maeda, R.4
Hattori, T.5
-
89
-
-
84891066322
-
Ultrasonic hot embossing and welding of micro structures
-
10.1007/978-94-007-2721-2-11 2211-0984
-
Burlage K, Gerhardy C and Schomburg W 2012 Ultrasonic hot embossing and welding of micro structures Micromech. Microactuators 2 113-23
-
(2012)
Micromech. Microactuators
, vol.2
, pp. 113
-
-
Burlage, K.1
Gerhardy, C.2
Schomburg, W.3
-
90
-
-
70349685386
-
Manufacture of dual-side surface-relief diffusers with various cross angles using ultrasonic embossing technique
-
10.1364/OE.17.018083 1094-4087
-
Liu S J and Huang Y C 2009 Manufacture of dual-side surface-relief diffusers with various cross angles using ultrasonic embossing technique Opt. Express 20 18083-92
-
(2009)
Opt. Express
, vol.20
, pp. 18083-18092
-
-
Liu, S.J.1
Huang, Y.C.2
-
91
-
-
80055064295
-
Polymer microreplication using ultrasonic vibration energy
-
10.1117/1.3129824 021113
-
Yu H W, Lee C H, Jung P G, Shin B S, Kim J-H, Hwang K-Y and Ko J S 2009 Polymer microreplication using ultrasonic vibration energy J. Micro/Nanolith. MEMS MOEMS. 8 021113
-
(2009)
J. Micro/Nanolith. MEMS MOEMS.
, vol.8
-
-
Yu, H.W.1
Lee, C.H.2
Jung, P.G.3
Shin, B.S.4
Kim, J.-H.5
Hwang, K.-Y.6
Ko, J.S.7
-
92
-
-
84870250195
-
Direct patterning of micro-features on a polymer substrate using ultrasonic vibration
-
10.1007/s00542-012-1524-y 0946-7076
-
Seo Y-S and Park K 2012 Direct patterning of micro-features on a polymer substrate using ultrasonic vibration Microsyst. Technol. 18 2053-61
-
(2012)
Microsyst. Technol.
, vol.18
, pp. 2053-2061
-
-
Seo, Y.-S.1
Park, K.2
-
94
-
-
34547595558
-
Effects of mold geometries and imprinted polymer resist thickness on ultrasonic nanoimprint lithography
-
DOI 10.1088/0960-1317/17/7/002, PII S0960131707418502, 002
-
Lin C H and Chen R 2007 Effects of mold geometries and imprinted polymer resist thickness on ultrasonic nanoimprint lithography J. Micromech. Microeng. 17 1220 (Pubitemid 47192940)
-
(2007)
Journal of Micromechanics and Microengineering
, vol.17
, Issue.7
, pp. 1220-1231
-
-
Lin, C.-H.1
Chen, R.2
-
95
-
-
41649101904
-
Replication of microlens arrays by gas-assisted hot embossing
-
DOI 10.1080/10426910701860830, PII 791863071
-
Hocheng H, Wen T T and Yang S Y 2008 Replication of microlens arrays by gas-assisted hot embossing Mater. Manuf. Process. 23 261-8 (Pubitemid 351479192)
-
(2008)
Materials and Manufacturing Processes
, vol.23
, Issue.3
, pp. 261-268
-
-
Hocheng, H.1
Wen, T.-T.2
Yang, S.-Y.3
-
96
-
-
84857556096
-
A novel fabrication of polymer film with tapered sub-wavelength structures for anti-reflection
-
10.1016/j.mee.2009.12.004 0167-9317
-
Wu J T, Yang S Y, Deng W C and Chang W Y 2010 A novel fabrication of polymer film with tapered sub-wavelength structures for anti-reflection Microelectron. Eng. 87 1951-4
-
(2010)
Microelectron. Eng.
, vol.87
, pp. 1951-1954
-
-
Wu, J.T.1
Yang, S.Y.2
Deng, W.C.3
Chang, W.Y.4
-
97
-
-
33646684320
-
Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold
-
DOI 10.1016/j.infrared.2005.10.002, PII S1350449505001222
-
Chang C Y, Yang S Y, Huang L S and Chang J H 2006 Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold Infrared. Phys. Technol. 48 163-73 (Pubitemid 43736954)
-
(2006)
Infrared Physics and Technology
, vol.48
, Issue.2
, pp. 163-173
-
-
Chang, C.-Y.1
Yang, S.-Y.2
Huang, L.-S.3
Chang, J.-H.4
-
98
-
-
42549116624
-
A compact system for large-area thermal nanoimprint lithography using smart stamps
-
DOI 10.1088/0960-1317/18/5/055018, PII S0960131708700986
-
Pedersen R H, Hansen O and Kristensen A 2008 A compact system for large-area thermal nanoimprint lithography using smart stamps J. Micromech. Microeng. 18 055018 (Pubitemid 351591375)
-
(2008)
Journal of Micromechanics and Microengineering
, vol.18
, Issue.5
, pp. 055018
-
-
Pedersen, R.H.1
Hansen, O.2
Kristensen, A.3
-
99
-
-
78049234618
-
3D structuring of polymer parts using thermoforming processes
-
10.1016/j.mee.2010.08.003 0167-9317
-
Senn T, Waberski C, Wolf J, Esquivel J P, Sabaté N and Löchel B 2011 3D structuring of polymer parts using thermoforming processes Microelectron. Eng. 88 11-6
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 11-16
-
-
Senn, T.1
Waberski, C.2
Wolf, J.3
Esquivel, J.P.4
Sabaté, N.5
Löchel, B.6
-
100
-
-
77953900269
-
Fabrication of a nano/micro hybrid lens using gas-assisted hot embossing with an anodic aluminum oxide (AAO) template
-
10.1088/0960-1317/20/7/075023 0960-1317 075023
-
Wu J T, Chang W Y and Yang S Y 2010 Fabrication of a nano/micro hybrid lens using gas-assisted hot embossing with an anodic aluminum oxide (AAO) template J. Micromech. Microeng. 20 075023
-
(2010)
J. Micromech. Microeng.
, vol.20
, Issue.7
-
-
Wu, J.T.1
Chang, W.Y.2
Yang, S.Y.3
-
101
-
-
84864383135
-
Sub-wavelength structures (SWSs) on the polycarbonate film for antireflection by using gas-assisted hot embossing
-
10.1166/asl.2012.2336
-
Cheng F S and Hsue A W J 2012 Sub-wavelength structures (SWSs) on the polycarbonate film for antireflection by using gas-assisted hot embossing Adv. Sci. Lett. 8 573-7
-
(2012)
Adv. Sci. Lett.
, vol.8
, pp. 573-577
-
-
Cheng, F.S.1
Hsue, A.W.J.2
-
103
-
-
77958072043
-
Continuous roll-to-flat thermal imprinting process for large-area micro-pattern replication on polymer substrate
-
10.1016/j.mee.2010.07.021 0167-9317
-
Lan S, Song J H, Lee M G, Ni J, Lee N K and Lee H J 2010 Continuous roll-to-flat thermal imprinting process for large-area micro-pattern replication on polymer substrate Microelectron. Eng. 87 2596-601
-
(2010)
Microelectron. Eng.
, vol.87
, pp. 2596-2601
-
-
Lan, S.1
Song, J.H.2
Lee, M.G.3
Ni, J.4
Lee, N.K.5
Lee, H.J.6
-
104
-
-
2642533437
-
Large-area fabrication of a nanostructure-induced hydrophobic surface from a hydrophilic polymer
-
10.1002/cphc.200400013 1439-4235
-
Guo C, Feng L, Zhai J, Wang G, Song Y, Jiang L and Zhu D 2004 Large-area fabrication of a nanostructure-induced hydrophobic surface from a hydrophilic polymer Chem. Phys. Chem. 5 750-3
-
(2004)
Chem. Phys. Chem.
, vol.5
, pp. 750-753
-
-
Guo, C.1
Feng, L.2
Zhai, J.3
Wang, G.4
Song, Y.5
Jiang, L.6
Zhu, D.7
-
105
-
-
77955852975
-
A polymer-metal hybrid flexible mould and application for large area hot roller embossing
-
10.1007/s00542-009-0991-2 0946-7076
-
Shan X, Jin L, Soh Y C and Lu C W 2010 A polymer-metal hybrid flexible mould and application for large area hot roller embossing Microsyst. Technol. 16 1393-8
-
(2010)
Microsyst. Technol.
, vol.16
, pp. 1393-1398
-
-
Shan, X.1
Jin, L.2
Soh, Y.C.3
Lu, C.W.4
-
106
-
-
42949169953
-
Prototype development of a roller imprint system and its application to large area polymer replication for a microstructured optical device
-
DOI 10.1016/j.jmatprotec.2007.08.069, PII S0924013607008527
-
Youn S W, Ogiwara M, Goto H, Takahashi M and Maeda R 2008 Prototype development of a roller imprint system and its application to large area polymer replication for a microstructured optical device J. Mater. Process. Technol. 202 76-85 (Pubitemid 351615548)
-
(2008)
Journal of Materials Processing Technology
, vol.202
, Issue.1-3
, pp. 76-85
-
-
Youn, S.-W.1
Ogiwara, M.2
Goto, H.3
Takahashi, M.4
Maeda, R.5
-
107
-
-
79960040447
-
Roller nanoimprint lithography for flexible electronic devices of a sub-micron scale
-
10.1016/j.mee.2011.02.018 0167-9317
-
Lim H J, Choi K B, Kim G H, Park S Y, Ryu J H and Lee J J 2011 Roller nanoimprint lithography for flexible electronic devices of a sub-micron scale Microelectron. Eng. 88 2017-20
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 2017-2020
-
-
Lim, H.J.1
Choi, K.B.2
Kim, G.H.3
Park, S.Y.4
Ryu, J.H.5
Lee, J.J.6
-
108
-
-
79960055878
-
Hot roll embossing in thermoplastic foils using dry-etched silicon stamp and multiple passes
-
10.1016/j.mee.2011.02.009 0167-9317
-
Metwally K, Queste S, Robert L, Salut R and Khan-Malek C 2011 Hot roll embossing in thermoplastic foils using dry-etched silicon stamp and multiple passes Microelectron. Eng. 88 2679-82
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 2679-2682
-
-
Metwally, K.1
Queste, S.2
Robert, L.3
Salut, R.4
Khan-Malek, C.5
-
109
-
-
84859168988
-
Development of roll-to-roll hot embossing system with induction heater for micro fabrication
-
10.1063/1.3675574 015108
-
Yun D, Son Y, Kyung J, Park H, Park C, Lee S and Kim B 2012 Development of roll-to-roll hot embossing system with induction heater for micro fabrication Rev. Sci. Instrum. 83 015108
-
(2012)
Rev. Sci. Instrum.
, vol.83
-
-
Yun, D.1
Son, Y.2
Kyung, J.3
Park, H.4
Park, C.5
Lee, S.6
Kim, B.7
-
110
-
-
67349157146
-
Micro-fabrication of polymeric devices using hot roller embossing
-
10.1016/j.mee.2008.12.021 0167-9317
-
Yeo L P, Ng S H, Wang Z, Wang Z and De Rooij N F 2009 Micro-fabrication of polymeric devices using hot roller embossing Microelectron. Eng. 86 933-6
-
(2009)
Microelectron. Eng.
, vol.86
, pp. 933-936
-
-
Yeo, L.P.1
Ng, S.H.2
Wang, Z.3
Wang, Z.4
De Rooij, N.F.5
-
111
-
-
79958814740
-
Roll-to-roll hot embossing of microstructures
-
10.1007/s00542-010-1158-x 0946-7076
-
Velten T, Bauerfeld F, Schuck H, Scherbaum S, Landesberger C and Bock K 2011 Roll-to-roll hot embossing of microstructures Microsyst. Technol. 17 619-27
-
(2011)
Microsyst. Technol.
, vol.17
, pp. 619-627
-
-
Velten, T.1
Bauerfeld, F.2
Schuck, H.3
Scherbaum, S.4
Landesberger, C.5
Bock, K.6
-
112
-
-
34648825543
-
Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist
-
DOI 10.1364/OE.15.012088
-
Jiang L T, Huang T C, Chiu C R, Chang C Y and Yang S Y 2007 Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist Opt. Express 15 12088-94 (Pubitemid 47460073)
-
(2007)
Optics Express
, vol.15
, Issue.19
, pp. 12088-12094
-
-
Jiang, L.-T.1
Huang, T.-C.2
Chiu, C.-R.3
Chang, C.-Y.4
Yang, S.-Y.5
-
113
-
-
75149177638
-
A novel process for continuous thermal embossing of large-area nanopatterns onto polymer films
-
10.1002/adv.20167 0730-6679
-
Fagan M D, Kim B H and Yao D 2009 A novel process for continuous thermal embossing of large-area nanopatterns onto polymer films Adv. Polym. Tech. 28 246-56
-
(2009)
Adv. Polym. Tech.
, vol.28
, pp. 246-256
-
-
Fagan, M.D.1
Kim, B.H.2
Yao, D.3
-
114
-
-
55049129863
-
Continuous double-sided roll-to-roll imprinting of polymer film
-
10.1143/JJAP.47.5142 0021-4922
-
Mäkelä T, Haatainen T, Majander P, Ahopelto J and Lambertini V 2008 Continuous double-sided roll-to-roll imprinting of polymer film Japan. J. Appl. Phys. 47 5142
-
(2008)
Japan. J. Appl. Phys.
, vol.47
, pp. 5142
-
-
Mäkelä, T.1
Haatainen, T.2
Majander, P.3
Ahopelto, J.4
Lambertini, V.5
-
115
-
-
84862820207
-
Continuous infrared-assisted double-sided roll-to-roll embossing of flexible polymer substrates
-
10.1002/pen.23068 0032-3888
-
Liu S J, Huang C C and Liao C T 2012 Continuous infrared-assisted double-sided roll-to-roll embossing of flexible polymer substrates Polym. Eng. Sci. 52 1395-401
-
(2012)
Polym. Eng. Sci.
, vol.52
, pp. 1395-1401
-
-
Liu, S.J.1
Huang, C.C.2
Liao, C.T.3
-
116
-
-
76949107323
-
Iterative roller imprint of multilayered nanostructures
-
10.1016/j.mee.2009.11.029 0167-9317
-
Nagato K, Sugimoto S, Hamaguchi T and Nakao M 2010 Iterative roller imprint of multilayered nanostructures Microelectron. Eng. 87 1543-5
-
(2010)
Microelectron. Eng.
, vol.87
, pp. 1543-1545
-
-
Nagato, K.1
Sugimoto, S.2
Hamaguchi, T.3
Nakao, M.4
-
117
-
-
79960035415
-
Roll-to-roll printed gratings in cellulose acetate web using novel nanoimprinting device
-
10.1016/j.mee.2011.02.016 0167-9317
-
Mäkelä T, Haatainen T and Ahopelto J 2011 Roll-to-roll printed gratings in cellulose acetate web using novel nanoimprinting device Microelectron. Eng. 88 2045-7
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 2045-2047
-
-
Mäkelä, T.1
Haatainen, T.2
Ahopelto, J.3
-
118
-
-
49949083440
-
Resin micromachining by roller hot embossing
-
10.1007/s00542-007-0552-5 0946-7076
-
Ishizawa N, Idei K, Kimura T, Noda D and Hattori T 2008 Resin micromachining by roller hot embossing Microsyst. Technol. 14 1381-8
-
(2008)
Microsyst. Technol.
, vol.14
, pp. 1381-1388
-
-
Ishizawa, N.1
Idei, K.2
Kimura, T.3
Noda, D.4
Hattori, T.5
-
120
-
-
84948652202
-
Investigation of hot roller embossing for microfluidic devices
-
10.1088/0960-1317/20/1/015017 0960-1317 015017
-
Yeo L, Ng S, Wang Z, Xia H, Wang Z, Thang V, Zhong Z and De Rooij N 2010 Investigation of hot roller embossing for microfluidic devices J. Micromech. Microeng. 20 015017
-
(2010)
J. Micromech. Microeng.
, vol.20
, Issue.1
-
-
Yeo, L.1
Ng, S.2
Wang, Z.3
Xia, H.4
Wang, Z.5
Thang, V.6
Zhong, Z.7
De Rooij, N.8
-
121
-
-
84946657020
-
Some new three level designs for the study of quantitative variables
-
10.1080/00401706.1960.10489912 0040-1706
-
Box G E P and Behnken D W 1960 Some new three level designs for the study of quantitative variables Technometrics 2 455-75
-
(1960)
Technometrics
, vol.2
, pp. 455-475
-
-
Box, G.E.P.1
Behnken, D.W.2
-
122
-
-
67649207983
-
Hot roller embossing for microfluidics: Process and challenges
-
10.1007/s00542-008-0722-0 0946-7076
-
Ng S and Wang Z 2009 Hot roller embossing for microfluidics: process and challenges Microsyst. Technol. 15 1149-56
-
(2009)
Microsyst. Technol.
, vol.15
, pp. 1149-1156
-
-
Ng, S.1
Wang, Z.2
-
123
-
-
34547546700
-
Rolling contact between rigid cylinder and semi-infinite elastic body with sliding and adhesion
-
DOI 10.1115/1.2736431
-
Hao S and Keer L 2007 Rolling contact between rigid cylinder and semi-infinite elastic body with sliding and adhesion J. Tribol.: Trans. ASME 129 481-94 (Pubitemid 47180748)
-
(2007)
Journal of Tribology
, vol.129
, Issue.3
, pp. 481-494
-
-
Hao, S.1
Keer, L.M.2
-
124
-
-
84856036925
-
3D modelling and simulation of the filling of cavities by viscoelastic polymer in roll embossing process
-
10.1007/s12289-009-0542-5
-
Sahli M, Malek C K and Gelin J C 2009 3D modelling and simulation of the filling of cavities by viscoelastic polymer in roll embossing process Int. J. Mater. Form. 2 725-8
-
(2009)
Int. J. Mater. Form.
, vol.2
, pp. 725-728
-
-
Sahli, M.1
Malek, C.K.2
Gelin, J.C.3
-
125
-
-
78651594749
-
Numerical modelling of the polymers replication in micro-cavities by the roll embossing process
-
10.1007/s12289-010-0843-8
-
Sahli M, Gelin J and Barrière T 2010 Numerical modelling of the polymers replication in micro-cavities by the roll embossing process Int. J. Mater. Form. 3 607-10
-
(2010)
Int. J. Mater. Form.
, vol.3
, pp. 607-610
-
-
Sahli, M.1
Gelin, J.2
Barrière, T.3
-
127
-
-
79961054101
-
Direct machining of micro patterns on nickel alloy and mold steel by vibration assisted cutting
-
10.1007/s12541-011-0075-y
-
Kim G D and Loh B G 2011 Direct machining of micro patterns on nickel alloy and mold steel by vibration assisted cutting Int. J. Precis. Eng. Manuf. 12 583-8
-
(2011)
Int. J. Precis. Eng. Manuf.
, vol.12
, pp. 583-588
-
-
Kim, G.D.1
Loh, B.G.2
-
128
-
-
84864279994
-
Diamond micro chiseling of large-scale retroreflective arrays
-
10.1016/j.precisioneng.2012.06.001 0141-6359
-
Brinksmeier E, Gläbe R and Schönemann L 2012 Diamond micro chiseling of large-scale retroreflective arrays Precis. Eng. 36 650-7
-
(2012)
Precis. Eng.
, vol.36
, pp. 650-657
-
-
Brinksmeier, E.1
Gläbe, R.2
Schönemann, L.3
-
129
-
-
79955586206
-
Improvement of machining quality of copper-plated roll mold by controlling temperature variation
-
10.1016/S1003-6326(11)61057-1
-
Je T J, Jeon E C, Park S C, Choi D S, Whang K H and Kang M C 2011 Improvement of machining quality of copper-plated roll mold by controlling temperature variation Trans. Nonferr. Met. Soc. 21 s37-41
-
(2011)
Trans. Nonferr. Met. Soc.
, vol.21
-
-
Je, T.J.1
Jeon, E.C.2
Park, S.C.3
Choi, D.S.4
Whang, K.H.5
Kang, M.C.6
-
130
-
-
61449130599
-
Effect of conventional EDM parameters on the micromachined surface roughness and fabrication of a hot embossing master microtool
-
10.1080/10426910802714373 1042-6914
-
Ali M Y and Mohammad A S 2009 Effect of conventional EDM parameters on the micromachined surface roughness and fabrication of a hot embossing master microtool Mater. Manuf. Process. 24 454-8
-
(2009)
Mater. Manuf. Process.
, vol.24
, pp. 454-458
-
-
Ali, M.Y.1
Mohammad, A.S.2
-
131
-
-
83455208284
-
Fabrication of microfluidic chip using micro-hot embossing with micro electrical discharge machining mold
-
10.1002/pat.1823 1042-7147
-
Huang M S, Chiang Y C, Lin S C, Cheng H C, Huang C F, Shen Y K and Lin Y 2012 Fabrication of microfluidic chip using micro-hot embossing with micro electrical discharge machining mold Polym. Adv. Technol. 23 57-64
-
(2012)
Polym. Adv. Technol.
, vol.23
, pp. 57-64
-
-
Huang, M.S.1
Chiang, Y.C.2
Lin, S.C.3
Cheng, H.C.4
Huang, C.F.5
Shen, Y.K.6
Lin, Y.7
-
132
-
-
33745215629
-
Fabrication of high-aspect-ratio microscale mold inserts by parallel eDM
-
10.1007/s00542-006-0131-1 0946-7076
-
Cao D M, Jiang J, Yang R and Meng W J 2006 Fabrication of high-aspect-ratio microscale mold inserts by parallel EDM Microsyst. Technol. 12 839-45
-
(2006)
Microsyst. Technol.
, vol.12
, pp. 839-845
-
-
Cao, D.M.1
Jiang, J.2
Yang, R.3
Meng, W.J.4
-
133
-
-
80051546743
-
Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser
-
10.1016/j.mee.2011.03.023 0167-9317
-
Yao T F, Wu P H, Wu T M, Cheng C W and Yang S Y 2011 Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser Microelectron. Eng. 88 2908-12
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 2908-2912
-
-
Yao, T.F.1
Wu, P.H.2
Wu, T.M.3
Cheng, C.W.4
Yang, S.Y.5
-
134
-
-
77952916166
-
Femtosecond laser micromachining and application of hot embossing molds for microfluid device fabrication
-
10.2351/1.3263118 1042-346X
-
Choi H W, Bong S, Farson D F, Lu C and Lee L J 2009 Femtosecond laser micromachining and application of hot embossing molds for microfluid device fabrication J. Laser Appl. 21 196-204
-
(2009)
J. Laser Appl.
, vol.21
, pp. 196-204
-
-
Choi, H.W.1
Bong, S.2
Farson, D.F.3
Lu, C.4
Lee, L.J.5
-
135
-
-
77953883114
-
Fabrication of corrugated artificial insect wings using laser micromachined molds
-
10.1088/0960-1317/20/7/075008 0960-1317 075008
-
Tanaka H and Wood R J 2010 Fabrication of corrugated artificial insect wings using laser micromachined molds J. Micromech. Microeng. 20 075008
-
(2010)
J. Micromech. Microeng.
, vol.20
, Issue.7
-
-
Tanaka, H.1
Wood, R.J.2
-
136
-
-
78650126290
-
Fabrication of random microspikes on mold metal by ultrashort laser ablation for hydrophilic surface
-
10.1143/JJAP.49.106503 0021-4922 106503
-
Noh J, Lee J H, Lee S Y and Na S 2010 Fabrication of random microspikes on mold metal by ultrashort laser ablation for hydrophilic surface Japan. J. Appl. Phys. 49 106503
-
(2010)
Japan. J. Appl. Phys.
, vol.49
-
-
Noh, J.1
Lee, J.H.2
Lee, S.Y.3
Na, S.4
-
137
-
-
75149197680
-
Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer
-
10.1016/j.solmat.2009.11.028
-
Chen J Y and Sun K W 2010 Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer Sol. Energ. Mater. Sol. C. 94 629-33
-
(2010)
Sol. Energ. Mater. Sol. C.
, vol.94
, pp. 629-633
-
-
Chen, J.Y.1
Sun, K.W.2
-
138
-
-
76949084128
-
Direct e-beam writing of high aspect ratio nanostructures in PMMA: A tool for diffractive x-ray optics fabrication
-
10.1016/j.mee.2009.11.091 0167-9317
-
Gorelick S, Vila-Comamala J, Guzenko V, Mokso R, Stampanoni M and David C 2010 Direct e-beam writing of high aspect ratio nanostructures in PMMA: a tool for diffractive x-ray optics fabrication Microelectron. Eng. 87 1052-6
-
(2010)
Microelectron. Eng.
, vol.87
, pp. 1052-1056
-
-
Gorelick, S.1
Vila-Comamala, J.2
Guzenko, V.3
Mokso, R.4
Stampanoni, M.5
David, C.6
-
139
-
-
79551705666
-
Hot embossing of photonic crystal polymer structures with a high aspect ratio
-
10.1088/0960-1317/21/2/025017 0960-1317 025017
-
Schelb M, Vannahme C, Kolew A and Mappes T 2011 Hot embossing of photonic crystal polymer structures with a high aspect ratio J. Micromech. Microeng. 21 025017
-
(2011)
J. Micromech. Microeng.
, vol.21
, Issue.2
-
-
Schelb, M.1
Vannahme, C.2
Kolew, A.3
Mappes, T.4
-
140
-
-
77955847986
-
Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application
-
10.1007/s00542-009-1012-1 0946-7076
-
Chung C K, Sher K, Syu Y and Cheng C 2010 Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application Microsyst. Technol. 16 1619-24
-
(2010)
Microsyst. Technol.
, vol.16
, pp. 1619-1624
-
-
Chung, C.K.1
Sher, K.2
Syu, Y.3
Cheng, C.4
-
141
-
-
33744542984
-
Fabrication of PMMA microchip of capillary electrophoresis by optimized UV-LIGA process
-
DOI 10.1088/1742-6596/34/1/145
-
Xuelin Z, Gang L, Ying X, Yuhua G and Yangchao T 2006 Fabrication of PMMA microchip of capillary electrophoresis by optimized UV-LIGA process J. Phys.: Conf. Ser. 34 875 (Pubitemid 43812535)
-
(2006)
Journal of Physics: Conference Series
, vol.34
, Issue.1
, pp. 875-879
-
-
Zhu, X.1
Liu, G.2
Xiong, Y.3
Guo, Y.4
Tian, Y.5
-
142
-
-
77956268230
-
Microfabrication of a nickel mold insert by a modified deep x-ray lithography process and its application to hot embossing
-
10.1016/j.mee.2010.04.023 0167-9317
-
Lee B K, Kim J H, Kim D S, Chang S S and Kwon T H 2010 Microfabrication of a nickel mold insert by a modified deep x-ray lithography process and its application to hot embossing Microelectron. Eng. 87 2449-55
-
(2010)
Microelectron. Eng.
, vol.87
, pp. 2449-2455
-
-
Lee, B.K.1
Kim, J.H.2
Kim, D.S.3
Chang, S.S.4
Kwon, T.H.5
-
143
-
-
77955847613
-
Development of separated micromold system for an efficient replication of high aspect ratio microstructures
-
10.1007/s00542-009-0990-3 0946-7076
-
Lee B-K and Kwon T 2010 Development of separated micromold system for an efficient replication of high aspect ratio microstructures Microsyst. Technol. 16 1385-92
-
(2010)
Microsyst. Technol.
, vol.16
, pp. 1385-1392
-
-
Lee, B.-K.1
Kwon, T.2
-
144
-
-
49949105395
-
Submicron polymer structures with x-ray lithography and hot embossing
-
10.1007/s00542-007-0499-6 0946-7076
-
Mappes T, Worgull M, Heckele M and Mohr J 2008 Submicron polymer structures with x-ray lithography and hot embossing Microsyst. Technol. 14 1721-5
-
(2008)
Microsyst. Technol.
, vol.14
, pp. 1721-1725
-
-
Mappes, T.1
Worgull, M.2
Heckele, M.3
Mohr, J.4
-
145
-
-
84878542848
-
Fabrication of flexible light guide plate using CO2 laser LIGA-like technology
-
10.1007/s00542-012-1665-z 0946-7076
-
Chung C K, Syu Y J, Wang H Y, Cheng C C, Lin S L and Tu K Z 2013 Fabrication of flexible light guide plate using CO2 laser LIGA-like technology Microsyst. Technol. 19 439-43
-
(2013)
Microsyst. Technol.
, vol.19
, pp. 439-443
-
-
Chung, C.K.1
Syu, Y.J.2
Wang, H.Y.3
Cheng, C.C.4
Lin, S.L.5
Tu, K.Z.6
-
147
-
-
79960031188
-
Fabrication of flexible mold for hybrid nanoimprint-soft lithography
-
10.1016/j.mee.2010.12.107 0167-9317
-
Zhang J, Cui B and Ge H 2011 Fabrication of flexible mold for hybrid nanoimprint-soft lithography Microelectron. Eng. 88 2192-5
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 2192-2195
-
-
Zhang, J.1
Cui, B.2
Ge, H.3
-
148
-
-
70149108495
-
Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography
-
10.1088/0022-3727/42/11/115503 0022-3727 115503
-
Han J, Choi S, Lim J, Lee B and Kang S 2009 Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography J. Phys. D: Appl. Phys. 42 115503
-
(2009)
J. Phys. D: Appl. Phys.
, vol.42
, Issue.11
-
-
Han, J.1
Choi, S.2
Lim, J.3
Lee, B.4
Kang, S.5
-
149
-
-
84864482749
-
Microstructure formation via roll-to-roll UV embossing using a flexible mould made from a laminated polymer-copper film
-
10.1088/0960-1317/22/8/085010 0960-1317 085010
-
Zhong Z and Shan X 2012 Microstructure formation via roll-to-roll UV embossing using a flexible mould made from a laminated polymer-copper film J. Micromech. Microeng. 22 085010
-
(2012)
J. Micromech. Microeng.
, vol.22
, Issue.8
-
-
Zhong, Z.1
Shan, X.2
-
150
-
-
65349178341
-
High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis
-
10.1117/12.809821
-
Ahn S H and Guo L J 2009 High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis Proc. SPIE 7205 72050U
-
(2009)
Proc. SPIE
, vol.7205
-
-
Ahn, S.H.1
Guo, L.J.2
-
151
-
-
84865268682
-
Diffusion driven optofluidic dye lasers encapsulated into polymer chips
-
10.1039/c2lc40494j
-
Wienhold T, Breithaupt F, Vannahme C, Brokner Christiansen M, Dorfler W, Kristensen A and Mappes T 2012 Diffusion driven optofluidic dye lasers encapsulated into polymer chips Lab. Chip 12 3734-9
-
(2012)
Lab. Chip
, vol.12
, pp. 3734-3739
-
-
Wienhold, T.1
Breithaupt, F.2
Vannahme, C.3
Brokner Christiansen, M.4
Dorfler, W.5
Kristensen, A.6
Mappes, T.7
-
152
-
-
58149348679
-
Design and fabrication of a microfluidic device for near-single cell mRNA isolation using a copper hot embossing master
-
10.1007/s00542-008-0694-0 0946-7076
-
Nugen S R, Asiello P and Baeumner A 2009 Design and fabrication of a microfluidic device for near-single cell mRNA isolation using a copper hot embossing master Microsyst. Technol. 15 477-83
-
(2009)
Microsyst. Technol.
, vol.15
, pp. 477-483
-
-
Nugen, S.R.1
Asiello, P.2
Baeumner, A.3
-
153
-
-
33846202968
-
Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process
-
DOI 10.1016/j.mee.2006.11.004, PII S0167931706006265, VLSI Design and Test
-
Chang C Y, Yang S Y and Chu M H 2007 Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process Microelectron. Eng. 84 355-61 (Pubitemid 46097158)
-
(2007)
Microelectronic Engineering
, vol.84
, Issue.2
, pp. 355-361
-
-
Chang, C.-Y.1
Yang, S.-Y.2
Chu, M.-H.3
-
154
-
-
84859713926
-
Fabrication of seamless roller mold for continuous roller imprinting of microlens array films
-
10.1109/JMEMS.2011.2178115 1057-7157
-
Lee Y C, Chen H W and Hsiao F B 2012 Fabrication of seamless roller mold for continuous roller imprinting of microlens array films J. Microelectromech. Syst. 21 316-23
-
(2012)
J. Microelectromech. Syst.
, vol.21
, pp. 316-323
-
-
Lee, Y.C.1
Chen, H.W.2
Hsiao, F.B.3
-
155
-
-
67349163246
-
Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating
-
10.1016/j.mee.2009.01.008 0167-9317
-
Huang T C, Wu J T, Yang S Y, Huang P H and Chang S H 2009 Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating Microelectron. Eng. 86 615-8
-
(2009)
Microelectron. Eng.
, vol.86
, pp. 615-618
-
-
Huang, T.C.1
Wu, J.T.2
Yang, S.Y.3
Huang, P.H.4
Chang, S.H.5
-
156
-
-
77955516348
-
Dip coating cooperated with stepped rotating lithography to fabricate rigid microstructures onto a metal roller
-
10.1016/j.mee.2010.01.003 0167-9317
-
Wu J T, Lai H C, Yang S Y, Huang T C and Wu S H 2010 Dip coating cooperated with stepped rotating lithography to fabricate rigid microstructures onto a metal roller Microelectron. Eng. 87 2091-6
-
(2010)
Microelectron. Eng.
, vol.87
, pp. 2091-2096
-
-
Wu, J.T.1
Lai, H.C.2
Yang, S.Y.3
Huang, T.C.4
Wu, S.H.5
-
157
-
-
79960056116
-
Fabrication of the metal nano pattern on plastic substrate using roll nanoimprint
-
10.1016/j.mee.2011.02.006 0167-9317
-
Unno N and Taniguchi J 2011 Fabrication of the metal nano pattern on plastic substrate using roll nanoimprint Microelectron. Eng. 88 2149-53
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 2149-2153
-
-
Unno, N.1
Taniguchi, J.2
-
158
-
-
72849148575
-
Fabrication of a seamless roll mold by direct writing with an electron beam on a rotating cylindrical substrate
-
10.1116/1.3237141 0734-211X B
-
Taniguchi J and Aratani M 2009 Fabrication of a seamless roll mold by direct writing with an electron beam on a rotating cylindrical substrate J. Vac. Sci. Technol. B 27 2841-5
-
(2009)
J. Vac. Sci. Technol.
, vol.27
, pp. 2841-2845
-
-
Taniguchi, J.1
Aratani, M.2
-
159
-
-
79551710940
-
Replication of optical components by hot embossing
-
10.1117/12.859077 771604
-
Worgull M, Schneider M, Heilig M, Kolew A, Dinglreiter H and Mohr J 2010 Replication of optical components by hot embossing Proc. SPIE 7716 771604
-
(2010)
Proc. SPIE
, vol.7716
-
-
Worgull, M.1
Schneider, M.2
Heilig, M.3
Kolew, A.4
Dinglreiter, H.5
Mohr, J.6
-
161
-
-
78650873866
-
Experimental study on the fabrication of the light guide plate with hot embossing method
-
10.4028/www.scientific.net/AMM.37-38.448 1660-9336
-
He Y, Zhang T, Fu J and Chen Z C 2010 Experimental study on the fabrication of the light guide plate with hot embossing method Appl. Mech. Mater. 37 448-52
-
(2010)
Appl. Mech. Mater.
, vol.37
, pp. 448-452
-
-
He, Y.1
Zhang, T.2
Fu, J.3
Chen, Z.C.4
-
162
-
-
42549123521
-
Fabrication of an LCD light guide plate using closed-die hot embossing
-
DOI 10.1088/0960-1317/18/3/035006, PII S0960131708591121
-
Wu C H and Lu C H 2008 Fabrication of an LCD light guide plate using closed-die hot embossing J. Micromech. Microeng. 18 035006 (Pubitemid 351591289)
-
(2008)
Journal of Micromechanics and Microengineering
, vol.18
, Issue.3
, pp. 035006
-
-
Wu, C.-H.1
Lu, C.-H.2
-
164
-
-
9344253335
-
Replication technology for optical microsystems
-
10.1016/j.optlaseng.2004.02.007 0143-8166
-
Gale M T, Gimkiewicz C, Obi S, Schnieper M, Söchtig J, Thiele H and Westenhöfer S 2005 Replication technology for optical microsystems Opt. Laser. Eng. 43 373-86
-
(2005)
Opt. Laser. Eng.
, vol.43
, pp. 373-386
-
-
Gale, M.T.1
Gimkiewicz, C.2
Obi, S.3
Schnieper, M.4
Söchtig, J.5
Thiele, H.6
Westenhöfer, S.7
-
165
-
-
84875959102
-
Fresnel lens fabrication for MidIR optics and fiberoptic technique by using hot embossing process
-
10.1117/12.2019058 869804
-
Kujawa I, Kasztelanic R, Waluk P, Stȩpień R, Haraśny K, Pysz D, Klimczak M and Buczyński R 2013 Fresnel lens fabrication for MidIR optics and fiberoptic technique by using hot embossing process Proc. SPIE 8698 869804
-
(2013)
Proc. SPIE
, vol.8698
-
-
Kujawa, I.1
Kasztelanic, R.2
Waluk, P.3
Stȩpień, R.4
Haraśny, K.5
Pysz, D.6
Klimczak, M.7
Buczyński, R.8
-
166
-
-
29344433242
-
Coupling efficiency enhancement in organic light-emitting devices using microlens array - Theory and experiment
-
DOI 10.1109/JDT.2005.858944
-
Peng H, Ho Y L, Yu X-J, Wong M and Kwok H-S 2005 Coupling efficiency enhancement in organic light-emitting devices using microlens array-theory and experiment J. Disp. Technol. 1 278-82 (Pubitemid 43001025)
-
(2005)
IEEE/OSA Journal of Display Technology
, vol.1
, Issue.2
, pp. 278-282
-
-
Peng, H.1
Ho, Y.L.2
Yu, X.-J.3
Wong, M.4
Kwok, H.-S.5
-
168
-
-
79957652039
-
Nanostructured thin films for anti-reflection applications
-
10.1016/j.tsf.2011.01.110 0040-6090
-
Chen J Y and Sun K W 2011 Nanostructured thin films for anti-reflection applications Thin Solid Films 519 5194-8
-
(2011)
Thin Solid Films
, vol.519
, pp. 5194-5198
-
-
Chen, J.Y.1
Sun, K.W.2
-
169
-
-
67349105702
-
Fabrication of anti-reflection structure on protective layer of solar cells by hot-embossing method
-
10.1016/j.solmat.2009.01.002 C
-
Han K S, Lee H, Kim D and Lee H 2009 Fabrication of anti-reflection structure on protective layer of solar cells by hot-embossing method Sol. Energ. Mater. Sol. C 93 1214-7
-
(2009)
Sol. Energ. Mater. Sol.
, vol.93
, pp. 1214-1217
-
-
Han, K.S.1
Lee, H.2
Kim, D.3
Lee, H.4
-
170
-
-
84871748224
-
Nanofeatured anti-reflective films manufactured using hot roller imprinting and self-assembly nanosphere lithography
-
10.1016/j.optlastec.2012.10.033 0030-3992
-
Liu S-J and Chen W-A 2013 Nanofeatured anti-reflective films manufactured using hot roller imprinting and self-assembly nanosphere lithography Opt. Laser Technol. 48 226-34
-
(2013)
Opt. Laser Technol.
, vol.48
, pp. 226-234
-
-
Liu, S.-J.1
Chen, W.-A.2
-
171
-
-
84859950917
-
Optical simulation and fabrication of periodic triangular gratings for the enhancement of photovoltaic solar panels
-
10.1117/12.916786
-
Dey R, Bordatchev E V, Tauhiduzzaman M and Reshef H 2012 Optical simulation and fabrication of periodic triangular gratings for the enhancement of photovoltaic solar panels Proc. SPIE 8256 82561Z
-
(2012)
Proc. SPIE
, vol.8256
-
-
Dey, R.1
Bordatchev, E.V.2
Tauhiduzzaman, M.3
Reshef, H.4
-
172
-
-
79955428360
-
Plastic lab on a chip for fluorescence excitation with integrated organic semiconductor lasers
-
10.1364/OE.19.008179 1094-4087
-
Vannahme C, Klinkhammer S, Lemmer U and Mappes T 2011 Plastic lab-on-a-chip for fluorescence excitation with integrated organic semiconductor lasers Opt. Express 19 8179-86
-
(2011)
Opt. Express
, vol.19
, pp. 8179-8186
-
-
Vannahme, C.1
Klinkhammer, S.2
Lemmer, U.3
Mappes, T.4
-
173
-
-
33645156416
-
Polymer nanoengineering for biomedical applications
-
10.1007/s10439-005-9011-6
-
Lee L J 2006 Polymer nanoengineering for biomedical applications Ann. Biomed. Eng. 34 75-88
-
(2006)
Ann. Biomed. Eng.
, vol.34
, pp. 75-88
-
-
Lee, L.J.1
-
174
-
-
9144224433
-
Microthermoforming of flexible, not-buried hollow microstructures for chip-based life sciences applications
-
10.1049/ip-nbt:20040823
-
Truckenmuller R and Giselbrecht S 2004 Microthermoforming of flexible, not-buried hollow microstructures for chip-based life sciences applications IEE Proc.: Nanobiotechnol. 151 163-6
-
(2004)
IEE Proc.: Nanobiotechnol.
, vol.151
, pp. 163-166
-
-
Truckenmuller, R.1
Giselbrecht, S.2
-
175
-
-
0001295402
-
Fabrication of plastic microchips by hot embossing
-
DOI 10.1039/b109775j
-
Kricka L J, Fortina P, Panaro N J, Wilding P, Alonso-Amigo G and Becker H 2002 Fabrication of plastic microchips by hot embossing Lab Chip 2 1-4 (Pubitemid 37248108)
-
(2002)
Lab on a Chip - Miniaturisation for Chemistry and Biology
, vol.2
, Issue.1
, pp. 1-4
-
-
Kricka, L.J.1
Fortina, P.2
Panaro, N.J.3
Wilding, P.4
Alonso-Amigo, G.5
Becker, H.6
-
176
-
-
9144260184
-
Microthermoforming as a novel technique for manufacturing scaffolds in tissue engineering (CellChips)
-
10.1049/ip-nbt:20040824
-
Giselbrecht S, Gietzelt T, Gottwald E, Guber A E, Trautmann C, Truckenmuller R and Weibezahn K F 2004 Microthermoforming as a novel technique for manufacturing scaffolds in tissue engineering (CellChips) IEE Proc.: Nanobiotechnol. 151 151-7
-
(2004)
IEE Proc.: Nanobiotechnol.
, vol.151
, pp. 151-157
-
-
Giselbrecht, S.1
Gietzelt, T.2
Gottwald, E.3
Guber, A.E.4
Trautmann, C.5
Truckenmuller, R.6
Weibezahn, K.F.7
-
177
-
-
33747014865
-
3D tissue culture substrates produced by microthermoforming of pre-processed polymer films
-
DOI 10.1007/s10544-006-8174-8
-
Giselbrecht S, Gietzelt T, Gottwald E, Trautmann C, Truckenmüller R, Weibezahn K F and Welle A 2006 3D tissue culture substrates produced by microthermoforming of pre-processed polymer films Biomed. Microdevices 8 191-9 (Pubitemid 44203835)
-
(2006)
Biomedical Microdevices
, vol.8
, Issue.3
, pp. 191-199
-
-
Giselbrecht, S.1
Gietzelt, T.2
Gottwald, E.3
Trautmann, C.4
Truckenmuller, R.5
-
178
-
-
63049091465
-
Hot embossing of pyramidal micro-structures in PMMA for cell culture
-
10.1002/pssa.200880476 0031-8965 A
-
Schneider P, Steitz C, Schäfer K H and Ziegler C 2009 Hot embossing of pyramidal micro-structures in PMMA for cell culture Phys. Status Solidi A 206 501-7
-
(2009)
Phys. Status Solidi
, vol.206
, pp. 501-507
-
-
Schneider, P.1
Steitz, C.2
Schäfer, K.H.3
Ziegler, C.4
-
179
-
-
79958145000
-
Hot embossing for fabrication of a microfluidic 3D cell culture platform
-
10.1007/s10544-010-9496-0
-
Jeon J S, Chung S, Kamm R D and Charest J L 2011 Hot embossing for fabrication of a microfluidic 3D cell culture platform Biomed. Microdevices 13 325-33
-
(2011)
Biomed. Microdevices
, vol.13
, pp. 325-333
-
-
Jeon, J.S.1
Chung, S.2
Kamm, R.D.3
Charest, J.L.4
-
180
-
-
0035971924
-
Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection
-
DOI 10.1016/S0925-4005(00)00745-0, PII S0925400500007450
-
Lee G B, Chen S H, Huang G R, Sung W C and Lin Y H 2001 Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection Sensors Actuator B 75 142-8 (Pubitemid 32408938)
-
(2001)
Sensors and Actuators, B: Chemical
, vol.75
, Issue.1-2
, pp. 142-148
-
-
Lee, G.-B.1
Chen, S.-H.2
Huang, G.-R.3
Sung, W.-C.4
Lin, Y.-H.5
-
181
-
-
60849112814
-
Improvement in antigen-delivery using fabrication of a grooves-embedded microneedle array
-
10.1016/j.snb.2008.11.017 B
-
Han M, Kim D K, Kang S H, Yoon H-R, Kim B-Y, Lee S S, Kim K D and Lee H G 2009 Improvement in antigen-delivery using fabrication of a grooves-embedded microneedle array Sensors Actuator B 137 274-80
-
(2009)
Sensors Actuator
, vol.137
, pp. 274-280
-
-
Han, M.1
Kim, D.K.2
Kang, S.H.3
Yoon, H.-R.4
Kim, B.-Y.5
Lee, S.S.6
Kim, K.D.7
Lee, H.G.8
-
182
-
-
78751481939
-
Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology
-
10.1117/1.3268366 043065
-
Amaya S, Dao D V and Sugiyama S 2009 Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology J. Micro/Nanolith. MEMS MOEMS 8 043065
-
(2009)
J. Micro/Nanolith. MEMS MOEMS
, vol.8
-
-
Amaya, S.1
Dao, D.V.2
Sugiyama, S.3
-
183
-
-
76949087421
-
Fabrication of an all-polymer electrochemical sensor by using a one-step hot embossing procedure
-
10.1016/j.mee.2009.11.137 0167-9317
-
Kafka J, Larsen N B, Skaarup S and Geschke O 2010 Fabrication of an all-polymer electrochemical sensor by using a one-step hot embossing procedure Microelectron. Eng. 87 1239-41
-
(2010)
Microelectron. Eng.
, vol.87
, pp. 1239-1241
-
-
Kafka, J.1
Larsen, N.B.2
Skaarup, S.3
Geschke, O.4
-
184
-
-
67649207422
-
Sub-m structured lotus surfaces manufacturing
-
10.1007/s00542-008-0744-7 0946-7076
-
Worgull M, Heckele M, Mappes T, Matthis B, Tosello G, Metz T, Gavillet J, Koltay P and Hansen H N 2009 Sub-m structured lotus surfaces manufacturing Microsyst. Technol. 15 1327-33
-
(2009)
Microsyst. Technol.
, vol.15
, pp. 1327-1333
-
-
Worgull, M.1
Heckele, M.2
Mappes, T.3
Matthis, B.4
Tosello, G.5
Metz, T.6
Gavillet, J.7
Koltay, P.8
Hansen, H.N.9
-
185
-
-
79959469372
-
Flexible polyimide micropump fabricated using hot embossing
-
10.1143/JJAP.50.06GM09 0021-4922
-
Komatsuzaki H, Suzuki K, Liu Y, Kosugi T, Ikoma R, Youn S-W, Takahashi M, Maeda R and Nishioka Y 2011 Flexible polyimide micropump fabricated using hot embossing Japan. J. Appl. Phys. 50 06GM9
-
(2011)
Japan. J. Appl. Phys.
, vol.50
-
-
Komatsuzaki, H.1
Suzuki, K.2
Liu, Y.3
Kosugi, T.4
Ikoma, R.5
Youn, S.-W.6
Takahashi, M.7
Maeda, R.8
Nishioka, Y.9
-
186
-
-
84873659500
-
Fabrication of electroosmotic flow pump on polymethylemethacrylate substrate using hot embossing
-
10.4028/www.scientific.net/KEM.538.125 1013-9826
-
Saito H, Komatsuzaki H, Ikoma R, Komori T, Kuroda K, Kimura Y, Fukushi Y, Maenosono H, Koide S, Satano M and Nishioka Y 2013 Fabrication of electroosmotic flow pump on polymethylemethacrylate substrate using hot embossing Key Eng. Mater. 538 125-8
-
(2013)
Key Eng. Mater.
, vol.538
, pp. 125-128
-
-
Saito, H.1
Komatsuzaki, H.2
Ikoma, R.3
Komori, T.4
Kuroda, K.5
Kimura, Y.6
Fukushi, Y.7
Maenosono, H.8
Koide, S.9
Satano, M.10
Nishioka, Y.11
-
187
-
-
84874706803
-
Electroosmotic flow pump on transparent polyimide substrate fabricated using hot embossing
-
10.4028/www.scientific.net/AMM.300-301.1356 1660-9336
-
Saito H, Komatsuzaki H, Ikoma R, Komori T, Kuroda K, Kimura Y, Fukushi Y, Maenosono H, Koide S, Satano M and Nishioka Y 2013 Electroosmotic flow pump on transparent polyimide substrate fabricated using hot embossing Appl. Mech. Mater. 300-301 1356-9
-
(2013)
Appl. Mech. Mater.
, vol.300-301
, pp. 1356-1359
-
-
Saito, H.1
Komatsuzaki, H.2
Ikoma, R.3
Komori, T.4
Kuroda, K.5
Kimura, Y.6
Fukushi, Y.7
Maenosono, H.8
Koide, S.9
Satano, M.10
Nishioka, Y.11
-
188
-
-
29044433915
-
Topas-based lab on a chip microsystems fabricated by thermal nanoimprint lithography
-
DOI 10.1116/1.2091089
-
Bilenberg B, Hansen M, Johansen D, Ozkapici V, Jeppesen C, Szabo P, Obieta I M, Arroyo O, Tegenfeldt J O and Kristensen A 2005 Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography J. Vac. Sci. Technol. B 23 2944-9 (Pubitemid 41788788)
-
(2005)
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
, vol.23
, Issue.6
, pp. 2944-2949
-
-
Bilenberg, B.1
Hansen, M.2
Johansen, D.3
Ozkapici, V.4
Jeppesen, C.5
Szabo, P.6
Obieta, I.M.7
Arroyo, O.8
Tegenfeldt, J.O.9
Kristensen, A.10
|