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Volumn 24, Issue 1, 2014, Pages

Micro hot embossing of thermoplastic polymers: A review

Author keywords

[No Author keywords available]

Indexed keywords

FUTURE TRENDS; HIGH QUALITY; INDUSTRIAL PRODUCTION; MICRO HOT EMBOSSING; MOLD FABRICATION; RECENT PROGRESS; TECHNICAL CHALLENGES; THERMOPLASTIC POLYMER;

EID: 84891094293     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/24/1/013001     Document Type: Review
Times cited : (208)

References (188)
  • 1
    • 0000670335 scopus 로고    scopus 로고
    • Hot embossing - The molding technique for plastic microstructures
    • Heckele M, Bacher W and Müller K 1998 Hot embossing - the molding technique for plastic microstructures Microsyst. Technol. 4 122-4 (Pubitemid 128529381)
    • (1998) Microsystem Technologies , vol.4 , Issue.3 , pp. 122-124
    • Heckele, M.1    Bacher, W.2    Muller, K.D.3
  • 3
    • 0014868123 scopus 로고
    • Embossed hologram motion pictures for television playback
    • 10.1364/AO.9.002283 0003-6935
    • Bartolini R, Hannan W, Karlsons D and Lurie M 1970 Embossed hologram motion pictures for television playback Appl. Opt. 9 2283-90
    • (1970) Appl. Opt. , vol.9 , pp. 2283-2290
    • Bartolini, R.1    Hannan, W.2    Karlsons, D.3    Lurie, M.4
  • 5
    • 0142037327 scopus 로고
    • Imprint of sub-25 nm vias and trenches in polymers
    • 10.1063/1.114851
    • Chou S Y, Krauss P R and Renstrom P J 1995 Imprint of sub-25 nm vias and trenches in polymers Appl. Phys. Lett. 67 3114-6
    • (1995) Appl. Phys. Lett. , vol.67 , pp. 3114-3116
    • Chou, S.Y.1    Krauss, P.R.2    Renstrom, P.J.3
  • 6
    • 43049113845 scopus 로고    scopus 로고
    • Hot embossing of microstructures: Characterization of friction during demolding
    • 10.1007/s00542-007-0492-0 0946-7076
    • Worgull M, Hétu J, Kabanemi K and Heckele M 2008 Hot embossing of microstructures: characterization of friction during demolding Microsyst. Technol. 14 767-73
    • (2008) Microsyst. Technol. , vol.14 , pp. 767-773
    • Worgull, M.1    Hétu, J.2    Kabanemi, K.3    Heckele, M.4
  • 7
    • 79958803257 scopus 로고    scopus 로고
    • Hot embossing of micro and sub-micro structured inserts for polymer replication
    • 10.1007/s00542-010-1182-x 0946-7076
    • Kolew A, Münch D, Sikora K and Worgull M 2011 Hot embossing of micro and sub-micro structured inserts for polymer replication Microsyst. Technol. 17 609-18
    • (2011) Microsyst. Technol. , vol.17 , pp. 609-618
    • Kolew, A.1    Münch, D.2    Sikora, K.3    Worgull, M.4
  • 8
    • 70450285211 scopus 로고    scopus 로고
    • Deformation behavior of solid polymer during hot embossing process
    • 10.1016/j.mee.2009.07.014 0167-9317
    • Liu C, Li J, Liu J and Wang L 2010 Deformation behavior of solid polymer during hot embossing process Microelectron. Eng. 87 200-7
    • (2010) Microelectron. Eng. , vol.87 , pp. 200-207
    • Liu, C.1    Li, J.2    Liu, J.3    Wang, L.4
  • 11
    • 84856604140 scopus 로고    scopus 로고
    • Recent developments and design challenges in continuous roller micro- and nanoimprinting
    • 10.1116/1.3661355 0734-211X B 010801
    • Dumond J J and Low H Y 2012 Recent developments and design challenges in continuous roller micro- and nanoimprinting J. Vac. Sci. Technol. B 30 010801
    • (2012) J. Vac. Sci. Technol. , vol.30
    • Dumond, J.J.1    Low, H.Y.2
  • 14
    • 84867490015 scopus 로고    scopus 로고
    • 3D nanomolding for lab on a chip applications
    • 10.1039/c2lc40572e
    • Park S, Choi J, Amirsadeghi A, Lee J and Park S 2012 3D nanomolding for lab-on-a-chip applications Lab. Chip 12 4764-71
    • (2012) Lab. Chip , vol.12 , pp. 4764-4771
    • Park, S.1    Choi, J.2    Amirsadeghi, A.3    Lee, J.4    Park, S.5
  • 16
    • 84857356569 scopus 로고    scopus 로고
    • Roll manufacturing of flexible microfluidic devices in thin PMMA and COC foils by embossing and lamination
    • 10.1007/s00542-011-1358-z 0946-7076
    • Metwally K, Robert L, Queste S, Gauthier-Manuel B and Khan-Malek C 2012 Roll manufacturing of flexible microfluidic devices in thin PMMA and COC foils by embossing and lamination Microsyst. Technol. 18 199-207
    • (2012) Microsyst. Technol. , vol.18 , pp. 199-207
    • Metwally, K.1    Robert, L.2    Queste, S.3    Gauthier-Manuel, B.4    Khan-Malek, C.5
  • 17
    • 84865500682 scopus 로고    scopus 로고
    • Roll-to-roll pilot nanoimprinting process for backlight devices
    • 10.1016/j.mee.2012.03.031 0167-9317
    • Mäkelä T and Haatainen T 2012 Roll-to-roll pilot nanoimprinting process for backlight devices Microelectron. Eng. 97 89-91
    • (2012) Microelectron. Eng. , vol.97 , pp. 89-91
    • Mäkelä, T.1    Haatainen, T.2
  • 19
    • 1642603474 scopus 로고    scopus 로고
    • Review on micro molding of thermoplastic polymers
    • 10.1088/0960-1317/14/3/R01 0960-1317 R01
    • Heckele M and Schomburg W K 2004 Review on micro molding of thermoplastic polymers J. Micromech. Microeng. 14 R1-14
    • (2004) J. Micromech. Microeng. , vol.14 , Issue.3 , pp. 1-14
    • Heckele, M.1    Schomburg, W.K.2
  • 20
    • 80051683252 scopus 로고    scopus 로고
    • Replication of micro and nano surface geometries
    • 10.1016/j.cirp.2011.05.008
    • Hansen H N, Hocken R J and Tosello G 2011 Replication of micro and nano surface geometries CIRP Ann.: Manuf. Technol. 60 695-714
    • (2011) CIRP Ann.: Manuf. Technol. , vol.60 , pp. 695-714
    • Hansen, H.N.1    Hocken, R.J.2    Tosello, G.3
  • 21
    • 67349196368 scopus 로고    scopus 로고
    • Experimental and numerical study on the viscoelastic property of polycarbonate near glass transition temperature for micro thermal imprint process
    • 10.1016/j.matdes.2009.03.045 0264-1275
    • Lan S, Lee H J, Lee S H, Ni J and Lai X 2009 Experimental and numerical study on the viscoelastic property of polycarbonate near glass transition temperature for micro thermal imprint process Mater. Des. 30 3879-84
    • (2009) Mater. Des. , vol.30 , pp. 3879-3884
    • Lan, S.1    Lee, H.J.2    Lee, S.H.3    Ni, J.4    Lai, X.5
  • 22
    • 2942558559 scopus 로고    scopus 로고
    • Recent progress in nanoimprint technology and its applications
    • 10.1088/0022-3727/37/11/R01 0022-3727 R01
    • Guo L J 2004 Recent progress in nanoimprint technology and its applications J. Phys. D: Appl. Phys. 37 R123-41
    • (2004) J. Phys. D: Appl. Phys. , vol.37 , Issue.11
    • Guo, L.J.1
  • 25
    • 0028370983 scopus 로고
    • Strain gradient plasticity: Theory and experiment
    • 10.1016/0956-7151(94)90502-9 0956-7151
    • Fleck N, Muller G, Ashby M and Hutchinson J 1994 Strain gradient plasticity: theory and experiment Acta Metall. Mater. 42 475-87
    • (1994) Acta Metall. Mater. , vol.42 , pp. 475-487
    • Fleck, N.1    Muller, G.2    Ashby, M.3    Hutchinson, J.4
  • 26
    • 0032020971 scopus 로고    scopus 로고
    • Indentation size effects in crystalline materials: A law for strain gradient plasticity
    • Nix W D and Gao H 1998 Indentation size effects in crystalline materials: a law for strain gradient plasticity J. Mech. Phys. Solids 46 411-25 (Pubitemid 128394207)
    • (1998) Journal of the Mechanics and Physics of Solids , vol.46 , Issue.3 , pp. 411-425
    • Nix, W.D.1    Gao, H.2
  • 27
    • 33845196254 scopus 로고    scopus 로고
    • Size effects in thin sheet metal forming and its elastic-plastic constitutive model
    • DOI 10.1016/j.matdes.2006.02.011, PII S0261306906000604
    • Peng L, Liu F, Ni J and Lai X 2007 Size effects in thin sheet metal forming and its elastic-plastic constitutive model Mater. Des. 28 1731-6 (Pubitemid 44849254)
    • (2007) Materials and Design , vol.28 , Issue.5 , pp. 1731-1736
    • Peng, L.1    Liu, F.2    Ni, J.3    Lai, X.4
  • 28
    • 52949129057 scopus 로고    scopus 로고
    • Material behavior modelling in micro/meso-scale forming process with considering size/scale effects
    • 10.1016/j.commatsci.2008.02.017 0927-0256
    • Lai X, Peng L, Hu P, Lan S and Ni J 2008 Material behavior modelling in micro/meso-scale forming process with considering size/scale effects Comput. Mater. Sci. 43 1003-9
    • (2008) Comput. Mater. Sci. , vol.43 , pp. 1003-1009
    • Lai, X.1    Peng, L.2    Hu, P.3    Lan, S.4    Ni, J.5
  • 29
    • 70349261288 scopus 로고    scopus 로고
    • Analysis of micro/mesoscale sheet forming process with uniform size dependent material constitutive model
    • 10.1016/j.msea.2009.06.061 0921-5093 A
    • Peng L, Lai X, Lee H J, Song J H and Ni J 2009 Analysis of micro/mesoscale sheet forming process with uniform size dependent material constitutive model Mater. Sci. Eng. A 526 93-9
    • (2009) Mater. Sci. Eng. , vol.526 , pp. 93-99
    • Peng, L.1    Lai, X.2    Lee, H.J.3    Song, J.H.4    Ni, J.5
  • 30
    • 72749104360 scopus 로고    scopus 로고
    • Friction behavior modeling and analysis in micro/meso scale metal forming process
    • 10.1016/j.matdes.2009.10.040 0264-1275
    • Peng L, Lai X, Lee H J, Song J H and Ni J 2010 Friction behavior modeling and analysis in micro/meso scale metal forming process Mater. Des. 31 1953-61
    • (2010) Mater. Des. , vol.31 , pp. 1953-1961
    • Peng, L.1    Lai, X.2    Lee, H.J.3    Song, J.H.4    Ni, J.5
  • 31
    • 0036578046 scopus 로고    scopus 로고
    • Effects of thickness on mechanical properties of conducting polythiophene films
    • DOI 10.1023/A:1015737106002
    • Wang X S and Feng X Q 2002 Effects of thickness on mechanical properties of conducting polythiophene films J. Mater. Sci. Lett. 21 715-7 (Pubitemid 34758923)
    • (2002) Journal of Materials Science Letters , vol.21 , Issue.9 , pp. 715-717
    • Wang, X.-S.1    Feng, X.-Q.2
  • 32
    • 2942668061 scopus 로고    scopus 로고
    • Influence of thickness on the mechanical properties for starch films
    • 10.1016/j.carbpol.2004.03.019 0144-8617
    • Jansson A and Thuvander F 2004 Influence of thickness on the mechanical properties for starch films Carbohydr. Polym. 56 499-503
    • (2004) Carbohydr. Polym. , vol.56 , pp. 499-503
    • Jansson, A.1    Thuvander, F.2
  • 33
    • 61849142854 scopus 로고    scopus 로고
    • Thickness-dependent mechanical properties of polydimethylsiloxane membranes
    • 10.1088/0960-1317/19/3/035028 0960-1317 035028
    • Liu M, Sun J, Sun Y, Bock C and Chen Q 2009 Thickness-dependent mechanical properties of polydimethylsiloxane membranes J. Micromech. Microeng. 19 035028
    • (2009) J. Micromech. Microeng. , vol.19 , Issue.3
    • Liu, M.1    Sun, J.2    Sun, Y.3    Bock, C.4    Chen, Q.5
  • 34
    • 0033277018 scopus 로고    scopus 로고
    • Strain gradient plasticity effect in indentation hardness of polymers
    • Chong A C M and Lam D C C 1999 Strain gradient plasticity effect in indentation hardness of polymers J. Mater. Res. 14 4103-10 (Pubitemid 32872144)
    • (1999) Journal of Materials Research , vol.14 , Issue.10 , pp. 4103-4110
    • Chong, A.C.M.1    Lam, D.C.C.2
  • 35
    • 0032595451 scopus 로고    scopus 로고
    • Indentation model and strain gradient plasticity law for glassy polymers
    • 10.1557/JMR.1999.0512 0884-2914
    • Lam D C C and Chong A 1999 Indentation model and strain gradient plasticity law for glassy polymers J. Mater. Res. 14 3784-8
    • (1999) J. Mater. Res. , vol.14 , pp. 3784-3788
    • Lam, D.C.C.1    Chong, A.2
  • 36
    • 71849087175 scopus 로고    scopus 로고
    • Size dependent hardness of polyamide/imide
    • 10.2174/1874158400802010089
    • Tatiraju R V S, Han C S and Nikolov S 2008 Size dependent hardness of polyamide/imide Open Mech. J. 2 89-92
    • (2008) Open Mech. J. , vol.2 , pp. 89-92
    • Tatiraju, R.V.S.1    Han, C.S.2    Nikolov, S.3
  • 37
    • 33846080731 scopus 로고    scopus 로고
    • On the origin of size effects in small-strain elasticity of solid polymers
    • DOI 10.1016/j.ijsolstr.2006.06.039, PII S0020768306002496
    • Nikolov S, Han C S and Raabe D 2007 On the origin of size effects in small-strain elasticity of solid polymers Int. J. Solids. Struct. 44 1582-92 (Pubitemid 46072862)
    • (2007) International Journal of Solids and Structures , vol.44 , Issue.5 , pp. 1582-1592
    • Nikolov, S.1    Han, C.-S.2    Raabe, D.3
  • 38
    • 0009189983 scopus 로고    scopus 로고
    • Effect of cross-link density on strain gradient plasticity in epoxy
    • DOI 10.1016/S0921-5093(99)00724-8
    • Lam D C C and Chong A 2000 Effect of cross-link density on strain gradient plasticity in epoxy Mater. Sci. Eng. A 281 156-61 (Pubitemid 30561102)
    • (2000) Materials Science and Engineering A , vol.281 , Issue.1 , pp. 156-161
    • Lam, D.C.C.1    Chong, A.C.M.2
  • 39
    • 34347254180 scopus 로고    scopus 로고
    • Indentation size effects in polymers and related rotation gradients
    • DOI 10.1557/jmr.2007.0197
    • Han C S and Nikolova S 2007 Indentation size effects in polymers and related rotation gradients J. Mater. Res. 22 1662-72 (Pubitemid 47008240)
    • (2007) Journal of Materials Research , vol.22 , Issue.6 , pp. 1662-1672
    • Han, C.-S.1    Nikolov, S.2
  • 40
    • 71849098664 scopus 로고    scopus 로고
    • Influence of the molecular structure on indentation size effect in polymers
    • 10.1016/j.msea.2009.08.033 0921-5093 A
    • Han C S 2010 Influence of the molecular structure on indentation size effect in polymers Mater. Sci. Eng. A 527 619-24
    • (2010) Mater. Sci. Eng. , vol.527 , pp. 619-624
    • Han, C.S.1
  • 41
    • 0015673725 scopus 로고
    • A theory for the low-temperature plastic deformation of glassy polymers
    • 10.1080/14786437308220987 0031-8086
    • Argon A 1973 A theory for the low-temperature plastic deformation of glassy polymers Philos. Mag. 28 839-65
    • (1973) Philos. Mag. , vol.28 , pp. 839-865
    • Argon, A.1
  • 42
    • 24144462483 scopus 로고    scopus 로고
    • Role of material microstructure in plate stiffness with relevance to microcantilever sensors
    • DOI 10.1088/0960-1317/15/5/024
    • McFarland A W and Colton J S 2005 Role of material microstructure in plate stiffness with relevance to microcantilever sensors J. Micromech. Microeng. 15 1060 (Pubitemid 41237440)
    • (2005) Journal of Micromechanics and Microengineering , vol.15 , Issue.5 , pp. 1060-1067
    • Mcfarland, A.W.1    Colton, J.S.2
  • 43
    • 0038721068 scopus 로고    scopus 로고
    • Experiments and theory in strain gradient elasticity
    • 10.1016/S0022-5096(03)00053-X 0022-5096
    • Lam D C C, Yang F, Chong A C M, Wang J and Tong P 2003 Experiments and theory in strain gradient elasticity J. Mech. Phys. Solids 51 1477-508
    • (2003) J. Mech. Phys. Solids , vol.51 , pp. 1477-1508
    • Lam, D.C.C.1    Yang, F.2    Chong, A.C.M.3    Wang, J.4    Tong, P.5
  • 44
    • 77957585959 scopus 로고    scopus 로고
    • Size-dependent behavior of macromolecular solids I: Molecular origin of the size effect
    • Wei W and Lam D C C 2010 Size-dependent behavior of macromolecular solids I: molecular origin of the size effect Comp. Model. Eng. Sci. 64 213-26
    • (2010) Comp. Model. Eng. Sci. , vol.64 , pp. 213-226
    • Wei, W.1    Lam, D.C.C.2
  • 45
    • 78649847435 scopus 로고    scopus 로고
    • Size-dependent behavior of macromolecular solids II: Higher-order viscoelastic theory and experiments
    • Lam D C C, Keung L H and Tong P 2010 Size-dependent behavior of macromolecular solids II: higher-order viscoelastic theory and experiments Comp. Model. Eng. Sci. 66 73-99
    • (2010) Comp. Model. Eng. Sci. , vol.66 , pp. 73-99
    • Lam, D.C.C.1    Keung, L.H.2    Tong, P.3
  • 47
    • 0031238385 scopus 로고    scopus 로고
    • Thickness dependence of work of fracture parameters of an amorphous copolyester
    • PII S0032386196010610
    • Karger-Kocsis J, Czigány T and Moskala E J 1997 Thickness dependence of work of fracture parameters of an amorphous copolyester Polymer 38 4587-93 (Pubitemid 127704520)
    • (1997) Polymer , vol.38 , Issue.18 , pp. 4587-4593
    • Karger-Kocsis, J.1    Czigany, T.2    Moskala, E.J.3
  • 49
    • 0032494328 scopus 로고    scopus 로고
    • Nano-indentation of polymeric surfaces
    • 10.1088/0022-3727/31/19/006 0022-3727 006
    • Briscoe B, Fiori L and Pelillo E 1998 Nano-indentation of polymeric surfaces J. Phys. D: Appl. Phys. 31 2395
    • (1998) J. Phys. D: Appl. Phys. , vol.31 , Issue.19 , pp. 2395
    • Briscoe, B.1    Fiori, L.2    Pelillo, E.3
  • 50
    • 0034507393 scopus 로고    scopus 로고
    • Continuous stiffness measurement and creep behavior of composite magnetic tapes
    • DOI 10.1016/S0040-6090(00)01368-7
    • Li X and Bhushan B 2000 Continuous stiffness measurement and creep behavior of composite magnetic tapes Thin Solid Films 377-378 401-6 (Pubitemid 32035244)
    • (2000) Thin Solid Films , vol.377-378 , pp. 401-406
    • Li, X.1    Bhushan, B.2
  • 51
    • 23844442341 scopus 로고    scopus 로고
    • Polishing effect on nanoindentation behavior of nylon 66 and its nanocomposites
    • DOI 10.1016/j.polymertesting.2005.04.004, PII S014294180500067X
    • Shen L, Liu T and Lv P 2005 Polishing effect on nanoindentation behavior of nylon 66 and its nanocomposites Polym. Test. 24 746-9 (Pubitemid 41165566)
    • (2005) Polymer Testing , vol.24 , Issue.6 , pp. 746-749
    • Shen, L.1    Liu, T.2    Lv, P.3
  • 53
  • 55
    • 84891083224 scopus 로고    scopus 로고
    • Karlsruhe Institute of Technology (KIT)
    • Karlsruhe Institute of Technology (KIT) www.imt.kit.edu/english/285.php
  • 56
    • 74149086557 scopus 로고    scopus 로고
    • Filling modes of polymer during submicron and nano-fabrication near glass transition temperature
    • 10.1016/j.jmatprotec.2009.12.008 0924-0136
    • Liu C, Li J, Liang Y, Peng J and Wang L 2010 Filling modes of polymer during submicron and nano-fabrication near glass transition temperature J. Mater. Process. Technol. 210 696-702
    • (2010) J. Mater. Process. Technol. , vol.210 , pp. 696-702
    • Liu, C.1    Li, J.2    Liang, Y.3    Peng, J.4    Wang, L.5
  • 57
    • 77952932536 scopus 로고    scopus 로고
    • Effect of forming conditions on linear patterning of polymer materials by hot embossing process
    • 10.1007/s12541-010-0015-2
    • Lee C S, Kang C G and Youn S W 2010 Effect of forming conditions on linear patterning of polymer materials by hot embossing process Int. J. Precis. Eng. Manuf. 11 119-27
    • (2010) Int. J. Precis. Eng. Manuf. , vol.11 , pp. 119-127
    • Lee, C.S.1    Kang, C.G.2    Youn, S.W.3
  • 58
    • 84861348080 scopus 로고    scopus 로고
    • Hot-embossing experiments of polymethyl methacrylate across the glass transition temperature with variation in temperature and hold times
    • 10.1002/pen.23066 0032-3888
    • Singh K and Dupaix R B 2012 Hot-embossing experiments of polymethyl methacrylate across the glass transition temperature with variation in temperature and hold times Polym. Eng. Sci. 52 1284-92
    • (2012) Polym. Eng. Sci. , vol.52 , pp. 1284-1292
    • Singh, K.1    Dupaix, R.B.2
  • 59
    • 84874274901 scopus 로고    scopus 로고
    • Study on the replication accuracy of polymer hot embossed microchannels
    • 10.1016/j.icheatmasstransfer.2012.12.008
    • Lin M C, Yeh J P, Chen S C, Chien R D and Hsu C L 2013 Study on the replication accuracy of polymer hot embossed microchannels Int. Commun. Heat Mass 42 55-61
    • (2013) Int. Commun. Heat Mass , vol.42 , pp. 55-61
    • Lin, M.C.1    Yeh, J.P.2    Chen, S.C.3    Chien, R.D.4    Hsu, C.L.5
  • 60
    • 84878090820 scopus 로고    scopus 로고
    • A high-brightness light guide plate with high precise double-sided microstructures fabricated using the fixed boundary hot embossing technique
    • 10.1088/0960-1317/23/3/035033 0960-1317 035033
    • Yang C H and Yang S Y 2013 A high-brightness light guide plate with high precise double-sided microstructures fabricated using the fixed boundary hot embossing technique J. Micromech. Microeng. 23 035033
    • (2013) J. Micromech. Microeng. , vol.23 , Issue.3
    • Yang, C.H.1    Yang, S.Y.2
  • 62
    • 84858960192 scopus 로고    scopus 로고
    • Numerical simulation of hot imprint process of periodical lamellar microstructure into polycarbonate
    • 10.1117/12.915107
    • Gaidys R, Narijauskaitė B, Palevičius A and Janušas G 2012 Numerical simulation of hot imprint process of periodical lamellar microstructure into polycarbonate Proc. SPIE 8248 82480I-9
    • (2012) Proc. SPIE , vol.8248
    • Gaidys, R.1    Narijauskaite, B.2    Palevičius, A.3    Janušas, G.4
  • 63
    • 80053343532 scopus 로고    scopus 로고
    • Numerical simulation of hot embossing filling stage using a viscoelastic constitutive model
    • 10.1007/s13367-011-0017-3
    • Park J M, Kang T G and Park S J 2011 Numerical simulation of hot embossing filling stage using a viscoelastic constitutive model Korea-Aust. Rheol. J. 23 139-46
    • (2011) Korea-Aust. Rheol. J. , vol.23 , pp. 139-146
    • Park, J.M.1    Kang, T.G.2    Park, S.J.3
  • 64
    • 77952331155 scopus 로고    scopus 로고
    • A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers
    • 10.1088/0960-1317/20/6/065001 0960-1317 065001
    • Taylor H, Hale M, Lam Y C and Boning D 2010 A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers J. Micromech. Microeng. 20 065001
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.6
    • Taylor, H.1    Hale, M.2    Lam, Y.C.3    Boning, D.4
  • 65
    • 62449290432 scopus 로고    scopus 로고
    • Finite element modeling of polymer hot embossing using a glass-rubber finite strain constitutive model
    • 10.1002/pen.21323 0032-3888
    • Dupaix R B and Cash W 2009 Finite element modeling of polymer hot embossing using a glass-rubber finite strain constitutive model Polym. Eng. Sci. 49 531-43
    • (2009) Polym. Eng. Sci. , vol.49 , pp. 531-543
    • Dupaix, R.B.1    Cash, W.2
  • 66
    • 84878272825 scopus 로고    scopus 로고
    • Enhanced polymer filling and uniform shrinkage of polymer and mold in a hot embossing process
    • 10.1002/pen.23379 0032-3888
    • He Y, Fu J, Zhao P and Chen Z C 2012 Enhanced polymer filling and uniform shrinkage of polymer and mold in a hot embossing process Polym. Eng. Sci. 53 1314-29
    • (2012) Polym. Eng. Sci. , vol.53 , pp. 1314-1329
    • He, Y.1    Fu, J.2    Zhao, P.3    Chen, Z.C.4
  • 67
    • 80051946949 scopus 로고    scopus 로고
    • Finite element modeling of polymer flow during hot embossing with different mold structures and embossing conditions
    • 10.4028/www.scientific.net/AMR.305.144 1435-1889
    • Zhang T, He Y and Fu J 2011 Finite element modeling of polymer flow during hot embossing with different mold structures and embossing conditions Adv. Mater. Res. 305 144-8
    • (2011) Adv. Mater. Res. , vol.305 , pp. 144-148
    • Zhang, T.1    He, Y.2    Fu, J.3
  • 68
    • 77955517183 scopus 로고    scopus 로고
    • A thermo-mechanically-coupled large-deformation theory for amorphous polymers in a temperature range which spans their glass transition
    • 10.1016/j.ijplas.2010.01.004 0749-6419
    • Srivastava V, Chester S A, Ames N M and Anand L 2010 A thermo-mechanically-coupled large-deformation theory for amorphous polymers in a temperature range which spans their glass transition Int. J. Plast. 26 1138-82
    • (2010) Int. J. Plast. , vol.26 , pp. 1138-1182
    • Srivastava, V.1    Chester, S.A.2    Ames, N.M.3    Anand, L.4
  • 69
    • 79957964422 scopus 로고    scopus 로고
    • Effect of polymer orientation on pattern replication in a micro-hot embossing process: Experiments and numerical simulation
    • 10.1088/0960-1317/21/6/065007 0960-1317 065007
    • Jena R K, Taylor H K, Lam Y C, Boning D S and Yue C Y 2011 Effect of polymer orientation on pattern replication in a micro-hot embossing process: experiments and numerical simulation J. Micromech. Microeng. 21 065007
    • (2011) J. Micromech. Microeng. , vol.21 , Issue.6
    • Jena, R.K.1    Taylor, H.K.2    Lam, Y.C.3    Boning, D.S.4    Yue, C.Y.5
  • 70
    • 77958473652 scopus 로고    scopus 로고
    • High fidelity hot-embossing of COC microdevices using a one-step process without pre-annealing of polymer substrate
    • 10.1016/j.snb.2010.08.018 B
    • Jena R K, Yue C Y, Lam Y C and Wang Z Y 2010 High fidelity hot-embossing of COC microdevices using a one-step process without pre-annealing of polymer substrate Sensors Actuator B 150 692-9
    • (2010) Sensors Actuator , vol.150 , pp. 692-699
    • Jena, R.K.1    Yue, C.Y.2    Lam, Y.C.3    Wang, Z.Y.4
  • 71
    • 79956370091 scopus 로고    scopus 로고
    • Large-strain thermo-mechanical behavior of cyclic olefin copolymers: Application to hot embossing and thermal bonding for the fabrication of microfluidic devices
    • 10.1016/j.snb.2010.11.031 B
    • Jena R K, Chester S A, Srivastava V, Yue C Y, Anand L and Lam Y C 2011 Large-strain thermo-mechanical behavior of cyclic olefin copolymers: application to hot embossing and thermal bonding for the fabrication of microfluidic devices Sensors Actuator B 155 93-105
    • (2011) Sensors Actuator , vol.155 , pp. 93-105
    • Jena, R.K.1    Chester, S.A.2    Srivastava, V.3    Yue, C.Y.4    Anand, L.5    Lam, Y.C.6
  • 72
    • 79961212056 scopus 로고    scopus 로고
    • Rheological (visco-elastic behaviour) analysis of cyclic olefin copolymers with application to hot embossing for microfabrication
    • 10.1088/0960-1317/21/8/085029 0960-1317 085029
    • Jena R K, Chen X, Yue C Y and Lam Y C 2011 Rheological (visco-elastic behaviour) analysis of cyclic olefin copolymers with application to hot embossing for microfabrication J. Micromech. Microeng. 21 085029
    • (2011) J. Micromech. Microeng. , vol.21 , Issue.8
    • Jena, R.K.1    Chen, X.2    Yue, C.Y.3    Lam, Y.C.4
  • 73
    • 79961225715 scopus 로고    scopus 로고
    • Analysis and characterization of demolding of hot embossed polymer microstructures
    • 10.1088/0960-1317/21/8/085024 0960-1317 085024
    • Dirckx M E and Hardt D E 2011 Analysis and characterization of demolding of hot embossed polymer microstructures J. Micromech. Microeng. 21 085024
    • (2011) J. Micromech. Microeng. , vol.21 , Issue.8
    • Dirckx, M.E.1    Hardt, D.E.2
  • 74
    • 79957960484 scopus 로고    scopus 로고
    • A razor-blade test of the demolding energy in a thermoplastic embossing process
    • 10.1088/0960-1317/21/6/067002 0960-1317 067002
    • Taylor H, Boning D and Iliescu C 2011 A razor-blade test of the demolding energy in a thermoplastic embossing process J. Micromech. Microeng. 21 067002
    • (2011) J. Micromech. Microeng. , vol.21 , Issue.6
    • Taylor, H.1    Boning, D.2    Iliescu, C.3
  • 75
    • 81155152477 scopus 로고    scopus 로고
    • Hot-embossing performance of silicon micromold coated with self-assembled n-octadecyltrichlorosilane
    • 10.1016/j.snb.2011.07.036 B
    • Saha B, Tor S B, Liu E, Hardt D E and Chun J H 2011 Hot-embossing performance of silicon micromold coated with self-assembled n- octadecyltrichlorosilane Sensors Actuator B 160 207-14
    • (2011) Sensors Actuator , vol.160 , pp. 207-214
    • Saha, B.1    Tor, S.B.2    Liu, E.3    Hardt, D.E.4    Chun, J.H.5
  • 76
    • 77949877277 scopus 로고    scopus 로고
    • Replication performance of Si-N-DLC-coated Si micro-molds in micro-hot-embossing
    • 10.1088/0960-1317/20/4/045007 0960-1317 045007
    • Saha B, Liu E, Tor S, Khun N, Hardt D and Chun J 2010 Replication performance of Si-N-DLC-coated Si micro-molds in micro-hot-embossing J. Micromech. Microeng. 20 045007
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.4
    • Saha, B.1    Liu, E.2    Tor, S.3    Khun, N.4    Hardt, D.5    Chun, J.6
  • 77
    • 77949300919 scopus 로고    scopus 로고
    • Numerical simulation of a thermoviscoelastic frictional problem with application to the hot-embossing process for manufacturing of microcomponents
    • 10.3139/217.2227 0930-777X
    • Kabanemi K, Marcotte J P, Hétu J F, Worgull M and Heckele M 2009 Numerical simulation of a thermoviscoelastic frictional problem with application to the hot-embossing process for manufacturing of microcomponents Int. Polym. Process. 174-84
    • (2009) Int. Polym. Process. , pp. 174-184
    • Kabanemi, K.1    Marcotte, J.P.2    Hétu, J.F.3    Worgull, M.4    Heckele, M.5
  • 78
    • 44249109514 scopus 로고    scopus 로고
    • Studies of polymer deformation and recovery in micro hot embossing
    • 10.1007/s00542-007-0486-y 0946-7076
    • Shan X, Liu Y and Lam Y 2008 Studies of polymer deformation and recovery in micro hot embossing Microsyst. Technol. 14 1055-60
    • (2008) Microsyst. Technol. , vol.14 , pp. 1055-1060
    • Shan, X.1    Liu, Y.2    Lam, Y.3
  • 79
    • 34247591461 scopus 로고    scopus 로고
    • Structure size dependent recovery of thin polystyrene layers in thermal imprint lithography
    • DOI 10.1016/j.mee.2007.01.093, PII S0167931707000494, Proceedings of the 32nd International Conference on Micro- and Nano-Engineering
    • Bogdanski N, Wissen M, Möllenbeck S and Scheer H-C 2007 Structure size dependent recovery of thin polystyrene layers in thermal imprint lithography Microelectron. Eng. 84 860-3 (Pubitemid 46678304)
    • (2007) Microelectronic Engineering , vol.84 , Issue.5-8 , pp. 860-863
    • Bogdanski, N.1    Wissen, M.2    Mollenbeck, S.3    Scheer, H.-C.4
  • 80
    • 57249103620 scopus 로고    scopus 로고
    • Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process
    • 10.1116/1.2987956 0734-211X B
    • Takagi H, Takahashi M, Maeda R, Onishi Y, Iriye Y, Iwasaki T and Hirai Y 2008 Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process J. Vac. Sci. Technol. B 26 2399-403
    • (2008) J. Vac. Sci. Technol. , vol.26 , pp. 2399-2403
    • Takagi, H.1    Takahashi, M.2    Maeda, R.3    Onishi, Y.4    Iriye, Y.5    Iwasaki, T.6    Hirai, Y.7
  • 81
    • 2342624122 scopus 로고    scopus 로고
    • Computer aided modelling of flexible forming process
    • 10.1016/j.jmatprotec.2004.02.049 0924-0136
    • Dirikolu M H and Akdemir E 2004 Computer aided modelling of flexible forming process J. Mater. Process. Technol. 148 376-81
    • (2004) J. Mater. Process. Technol. , vol.148 , pp. 376-381
    • Dirikolu, M.H.1    Akdemir, E.2
  • 82
    • 57149106123 scopus 로고    scopus 로고
    • Investigation of micro/meso sheet soft punch stamping process - Simulation and experiments
    • 10.1016/j.matdes.2008.05.074 0264-1275
    • Peng L, Hu P, Lai X, Mei D and Ni J 2009 Investigation of micro/meso sheet soft punch stamping process - simulation and experiments Mater. Des. 30 783-90
    • (2009) Mater. Des. , vol.30 , pp. 783-790
    • Peng, L.1    Hu, P.2    Lai, X.3    Mei, D.4    Ni, J.5
  • 83
    • 55149088338 scopus 로고    scopus 로고
    • Rubber-assisted micro forming of polymer thin films
    • 10.1007/s00542-008-0680-6 0946-7076
    • Nagarajan P and Yao D 2009 Rubber-assisted micro forming of polymer thin films Microsyst. Technol. 15 251-7
    • (2009) Microsyst. Technol. , vol.15 , pp. 251-257
    • Nagarajan, P.1    Yao, D.2
  • 84
    • 79951741207 scopus 로고    scopus 로고
    • Uniform shell patterning using rubber-assisted hot embossing process: I. Experimental
    • 10.1002/pen.21855 0032-3888
    • Nagarajan P and Yao D 2011 Uniform shell patterning using rubber-assisted hot embossing process: I. Experimental Polym. Eng. Sci. 51 592-600
    • (2011) Polym. Eng. Sci. , vol.51 , pp. 592-600
    • Nagarajan, P.1    Yao, D.2
  • 85
    • 79951749928 scopus 로고    scopus 로고
    • Uniform shell patterning using rubber-assisted hot embossing process: II. Process analysis
    • 10.1002/pen.21854 0032-3888
    • Nagarajan P and Yao D 2011 Uniform shell patterning using rubber-assisted hot embossing process: II. Process analysis Polym. Eng. Sci. 51 601-8
    • (2011) Polym. Eng. Sci. , vol.51 , pp. 601-608
    • Nagarajan, P.1    Yao, D.2
  • 86
    • 23844552425 scopus 로고    scopus 로고
    • Hot embossing precise structure onto plastic plates by ultrasonic vibration
    • DOI 10.1002/pen.20357
    • Liu S J and Dung Y T 2005 Hot embossing precise structure onto plastic plates by ultrasonic vibration Polym. Eng. Sci. 45 915-25 (Pubitemid 41164880)
    • (2005) Polymer Engineering and Science , vol.45 , Issue.7 , pp. 915-925
    • Liu, S.-J.1    Dung, Y.-T.2
  • 87
    • 33845732271 scopus 로고    scopus 로고
    • Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration
    • DOI 10.1007/s00542-006-0203-2, HARMST, High Aspect Ration Micro Structure Technology Workshop
    • Mekaru H, Nakamura O, Maruyama O, Maeda R and Hattori T 2007 Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration Microsyst. Technol. 13 385-91 (Pubitemid 46012836)
    • (2007) Microsystem Technologies , vol.13 , Issue.3-4 , pp. 385-391
    • Mekaru, H.1    Nakamura, O.2    Maruyama, O.3    Maeda, R.4    Hattori, T.5
  • 89
    • 84891066322 scopus 로고    scopus 로고
    • Ultrasonic hot embossing and welding of micro structures
    • 10.1007/978-94-007-2721-2-11 2211-0984
    • Burlage K, Gerhardy C and Schomburg W 2012 Ultrasonic hot embossing and welding of micro structures Micromech. Microactuators 2 113-23
    • (2012) Micromech. Microactuators , vol.2 , pp. 113
    • Burlage, K.1    Gerhardy, C.2    Schomburg, W.3
  • 90
    • 70349685386 scopus 로고    scopus 로고
    • Manufacture of dual-side surface-relief diffusers with various cross angles using ultrasonic embossing technique
    • 10.1364/OE.17.018083 1094-4087
    • Liu S J and Huang Y C 2009 Manufacture of dual-side surface-relief diffusers with various cross angles using ultrasonic embossing technique Opt. Express 20 18083-92
    • (2009) Opt. Express , vol.20 , pp. 18083-18092
    • Liu, S.J.1    Huang, Y.C.2
  • 92
    • 84870250195 scopus 로고    scopus 로고
    • Direct patterning of micro-features on a polymer substrate using ultrasonic vibration
    • 10.1007/s00542-012-1524-y 0946-7076
    • Seo Y-S and Park K 2012 Direct patterning of micro-features on a polymer substrate using ultrasonic vibration Microsyst. Technol. 18 2053-61
    • (2012) Microsyst. Technol. , vol.18 , pp. 2053-2061
    • Seo, Y.-S.1    Park, K.2
  • 94
    • 34547595558 scopus 로고    scopus 로고
    • Effects of mold geometries and imprinted polymer resist thickness on ultrasonic nanoimprint lithography
    • DOI 10.1088/0960-1317/17/7/002, PII S0960131707418502, 002
    • Lin C H and Chen R 2007 Effects of mold geometries and imprinted polymer resist thickness on ultrasonic nanoimprint lithography J. Micromech. Microeng. 17 1220 (Pubitemid 47192940)
    • (2007) Journal of Micromechanics and Microengineering , vol.17 , Issue.7 , pp. 1220-1231
    • Lin, C.-H.1    Chen, R.2
  • 95
    • 41649101904 scopus 로고    scopus 로고
    • Replication of microlens arrays by gas-assisted hot embossing
    • DOI 10.1080/10426910701860830, PII 791863071
    • Hocheng H, Wen T T and Yang S Y 2008 Replication of microlens arrays by gas-assisted hot embossing Mater. Manuf. Process. 23 261-8 (Pubitemid 351479192)
    • (2008) Materials and Manufacturing Processes , vol.23 , Issue.3 , pp. 261-268
    • Hocheng, H.1    Wen, T.-T.2    Yang, S.-Y.3
  • 96
    • 84857556096 scopus 로고    scopus 로고
    • A novel fabrication of polymer film with tapered sub-wavelength structures for anti-reflection
    • 10.1016/j.mee.2009.12.004 0167-9317
    • Wu J T, Yang S Y, Deng W C and Chang W Y 2010 A novel fabrication of polymer film with tapered sub-wavelength structures for anti-reflection Microelectron. Eng. 87 1951-4
    • (2010) Microelectron. Eng. , vol.87 , pp. 1951-1954
    • Wu, J.T.1    Yang, S.Y.2    Deng, W.C.3    Chang, W.Y.4
  • 97
    • 33646684320 scopus 로고    scopus 로고
    • Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold
    • DOI 10.1016/j.infrared.2005.10.002, PII S1350449505001222
    • Chang C Y, Yang S Y, Huang L S and Chang J H 2006 Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold Infrared. Phys. Technol. 48 163-73 (Pubitemid 43736954)
    • (2006) Infrared Physics and Technology , vol.48 , Issue.2 , pp. 163-173
    • Chang, C.-Y.1    Yang, S.-Y.2    Huang, L.-S.3    Chang, J.-H.4
  • 98
    • 42549116624 scopus 로고    scopus 로고
    • A compact system for large-area thermal nanoimprint lithography using smart stamps
    • DOI 10.1088/0960-1317/18/5/055018, PII S0960131708700986
    • Pedersen R H, Hansen O and Kristensen A 2008 A compact system for large-area thermal nanoimprint lithography using smart stamps J. Micromech. Microeng. 18 055018 (Pubitemid 351591375)
    • (2008) Journal of Micromechanics and Microengineering , vol.18 , Issue.5 , pp. 055018
    • Pedersen, R.H.1    Hansen, O.2    Kristensen, A.3
  • 100
    • 77953900269 scopus 로고    scopus 로고
    • Fabrication of a nano/micro hybrid lens using gas-assisted hot embossing with an anodic aluminum oxide (AAO) template
    • 10.1088/0960-1317/20/7/075023 0960-1317 075023
    • Wu J T, Chang W Y and Yang S Y 2010 Fabrication of a nano/micro hybrid lens using gas-assisted hot embossing with an anodic aluminum oxide (AAO) template J. Micromech. Microeng. 20 075023
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.7
    • Wu, J.T.1    Chang, W.Y.2    Yang, S.Y.3
  • 101
    • 84864383135 scopus 로고    scopus 로고
    • Sub-wavelength structures (SWSs) on the polycarbonate film for antireflection by using gas-assisted hot embossing
    • 10.1166/asl.2012.2336
    • Cheng F S and Hsue A W J 2012 Sub-wavelength structures (SWSs) on the polycarbonate film for antireflection by using gas-assisted hot embossing Adv. Sci. Lett. 8 573-7
    • (2012) Adv. Sci. Lett. , vol.8 , pp. 573-577
    • Cheng, F.S.1    Hsue, A.W.J.2
  • 103
    • 77958072043 scopus 로고    scopus 로고
    • Continuous roll-to-flat thermal imprinting process for large-area micro-pattern replication on polymer substrate
    • 10.1016/j.mee.2010.07.021 0167-9317
    • Lan S, Song J H, Lee M G, Ni J, Lee N K and Lee H J 2010 Continuous roll-to-flat thermal imprinting process for large-area micro-pattern replication on polymer substrate Microelectron. Eng. 87 2596-601
    • (2010) Microelectron. Eng. , vol.87 , pp. 2596-2601
    • Lan, S.1    Song, J.H.2    Lee, M.G.3    Ni, J.4    Lee, N.K.5    Lee, H.J.6
  • 104
    • 2642533437 scopus 로고    scopus 로고
    • Large-area fabrication of a nanostructure-induced hydrophobic surface from a hydrophilic polymer
    • 10.1002/cphc.200400013 1439-4235
    • Guo C, Feng L, Zhai J, Wang G, Song Y, Jiang L and Zhu D 2004 Large-area fabrication of a nanostructure-induced hydrophobic surface from a hydrophilic polymer Chem. Phys. Chem. 5 750-3
    • (2004) Chem. Phys. Chem. , vol.5 , pp. 750-753
    • Guo, C.1    Feng, L.2    Zhai, J.3    Wang, G.4    Song, Y.5    Jiang, L.6    Zhu, D.7
  • 105
    • 77955852975 scopus 로고    scopus 로고
    • A polymer-metal hybrid flexible mould and application for large area hot roller embossing
    • 10.1007/s00542-009-0991-2 0946-7076
    • Shan X, Jin L, Soh Y C and Lu C W 2010 A polymer-metal hybrid flexible mould and application for large area hot roller embossing Microsyst. Technol. 16 1393-8
    • (2010) Microsyst. Technol. , vol.16 , pp. 1393-1398
    • Shan, X.1    Jin, L.2    Soh, Y.C.3    Lu, C.W.4
  • 106
    • 42949169953 scopus 로고    scopus 로고
    • Prototype development of a roller imprint system and its application to large area polymer replication for a microstructured optical device
    • DOI 10.1016/j.jmatprotec.2007.08.069, PII S0924013607008527
    • Youn S W, Ogiwara M, Goto H, Takahashi M and Maeda R 2008 Prototype development of a roller imprint system and its application to large area polymer replication for a microstructured optical device J. Mater. Process. Technol. 202 76-85 (Pubitemid 351615548)
    • (2008) Journal of Materials Processing Technology , vol.202 , Issue.1-3 , pp. 76-85
    • Youn, S.-W.1    Ogiwara, M.2    Goto, H.3    Takahashi, M.4    Maeda, R.5
  • 107
    • 79960040447 scopus 로고    scopus 로고
    • Roller nanoimprint lithography for flexible electronic devices of a sub-micron scale
    • 10.1016/j.mee.2011.02.018 0167-9317
    • Lim H J, Choi K B, Kim G H, Park S Y, Ryu J H and Lee J J 2011 Roller nanoimprint lithography for flexible electronic devices of a sub-micron scale Microelectron. Eng. 88 2017-20
    • (2011) Microelectron. Eng. , vol.88 , pp. 2017-2020
    • Lim, H.J.1    Choi, K.B.2    Kim, G.H.3    Park, S.Y.4    Ryu, J.H.5    Lee, J.J.6
  • 108
    • 79960055878 scopus 로고    scopus 로고
    • Hot roll embossing in thermoplastic foils using dry-etched silicon stamp and multiple passes
    • 10.1016/j.mee.2011.02.009 0167-9317
    • Metwally K, Queste S, Robert L, Salut R and Khan-Malek C 2011 Hot roll embossing in thermoplastic foils using dry-etched silicon stamp and multiple passes Microelectron. Eng. 88 2679-82
    • (2011) Microelectron. Eng. , vol.88 , pp. 2679-2682
    • Metwally, K.1    Queste, S.2    Robert, L.3    Salut, R.4    Khan-Malek, C.5
  • 109
    • 84859168988 scopus 로고    scopus 로고
    • Development of roll-to-roll hot embossing system with induction heater for micro fabrication
    • 10.1063/1.3675574 015108
    • Yun D, Son Y, Kyung J, Park H, Park C, Lee S and Kim B 2012 Development of roll-to-roll hot embossing system with induction heater for micro fabrication Rev. Sci. Instrum. 83 015108
    • (2012) Rev. Sci. Instrum. , vol.83
    • Yun, D.1    Son, Y.2    Kyung, J.3    Park, H.4    Park, C.5    Lee, S.6    Kim, B.7
  • 110
    • 67349157146 scopus 로고    scopus 로고
    • Micro-fabrication of polymeric devices using hot roller embossing
    • 10.1016/j.mee.2008.12.021 0167-9317
    • Yeo L P, Ng S H, Wang Z, Wang Z and De Rooij N F 2009 Micro-fabrication of polymeric devices using hot roller embossing Microelectron. Eng. 86 933-6
    • (2009) Microelectron. Eng. , vol.86 , pp. 933-936
    • Yeo, L.P.1    Ng, S.H.2    Wang, Z.3    Wang, Z.4    De Rooij, N.F.5
  • 112
    • 34648825543 scopus 로고    scopus 로고
    • Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist
    • DOI 10.1364/OE.15.012088
    • Jiang L T, Huang T C, Chiu C R, Chang C Y and Yang S Y 2007 Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist Opt. Express 15 12088-94 (Pubitemid 47460073)
    • (2007) Optics Express , vol.15 , Issue.19 , pp. 12088-12094
    • Jiang, L.-T.1    Huang, T.-C.2    Chiu, C.-R.3    Chang, C.-Y.4    Yang, S.-Y.5
  • 113
    • 75149177638 scopus 로고    scopus 로고
    • A novel process for continuous thermal embossing of large-area nanopatterns onto polymer films
    • 10.1002/adv.20167 0730-6679
    • Fagan M D, Kim B H and Yao D 2009 A novel process for continuous thermal embossing of large-area nanopatterns onto polymer films Adv. Polym. Tech. 28 246-56
    • (2009) Adv. Polym. Tech. , vol.28 , pp. 246-256
    • Fagan, M.D.1    Kim, B.H.2    Yao, D.3
  • 115
    • 84862820207 scopus 로고    scopus 로고
    • Continuous infrared-assisted double-sided roll-to-roll embossing of flexible polymer substrates
    • 10.1002/pen.23068 0032-3888
    • Liu S J, Huang C C and Liao C T 2012 Continuous infrared-assisted double-sided roll-to-roll embossing of flexible polymer substrates Polym. Eng. Sci. 52 1395-401
    • (2012) Polym. Eng. Sci. , vol.52 , pp. 1395-1401
    • Liu, S.J.1    Huang, C.C.2    Liao, C.T.3
  • 116
    • 76949107323 scopus 로고    scopus 로고
    • Iterative roller imprint of multilayered nanostructures
    • 10.1016/j.mee.2009.11.029 0167-9317
    • Nagato K, Sugimoto S, Hamaguchi T and Nakao M 2010 Iterative roller imprint of multilayered nanostructures Microelectron. Eng. 87 1543-5
    • (2010) Microelectron. Eng. , vol.87 , pp. 1543-1545
    • Nagato, K.1    Sugimoto, S.2    Hamaguchi, T.3    Nakao, M.4
  • 117
    • 79960035415 scopus 로고    scopus 로고
    • Roll-to-roll printed gratings in cellulose acetate web using novel nanoimprinting device
    • 10.1016/j.mee.2011.02.016 0167-9317
    • Mäkelä T, Haatainen T and Ahopelto J 2011 Roll-to-roll printed gratings in cellulose acetate web using novel nanoimprinting device Microelectron. Eng. 88 2045-7
    • (2011) Microelectron. Eng. , vol.88 , pp. 2045-2047
    • Mäkelä, T.1    Haatainen, T.2    Ahopelto, J.3
  • 121
    • 84946657020 scopus 로고
    • Some new three level designs for the study of quantitative variables
    • 10.1080/00401706.1960.10489912 0040-1706
    • Box G E P and Behnken D W 1960 Some new three level designs for the study of quantitative variables Technometrics 2 455-75
    • (1960) Technometrics , vol.2 , pp. 455-475
    • Box, G.E.P.1    Behnken, D.W.2
  • 122
    • 67649207983 scopus 로고    scopus 로고
    • Hot roller embossing for microfluidics: Process and challenges
    • 10.1007/s00542-008-0722-0 0946-7076
    • Ng S and Wang Z 2009 Hot roller embossing for microfluidics: process and challenges Microsyst. Technol. 15 1149-56
    • (2009) Microsyst. Technol. , vol.15 , pp. 1149-1156
    • Ng, S.1    Wang, Z.2
  • 123
    • 34547546700 scopus 로고    scopus 로고
    • Rolling contact between rigid cylinder and semi-infinite elastic body with sliding and adhesion
    • DOI 10.1115/1.2736431
    • Hao S and Keer L 2007 Rolling contact between rigid cylinder and semi-infinite elastic body with sliding and adhesion J. Tribol.: Trans. ASME 129 481-94 (Pubitemid 47180748)
    • (2007) Journal of Tribology , vol.129 , Issue.3 , pp. 481-494
    • Hao, S.1    Keer, L.M.2
  • 124
    • 84856036925 scopus 로고    scopus 로고
    • 3D modelling and simulation of the filling of cavities by viscoelastic polymer in roll embossing process
    • 10.1007/s12289-009-0542-5
    • Sahli M, Malek C K and Gelin J C 2009 3D modelling and simulation of the filling of cavities by viscoelastic polymer in roll embossing process Int. J. Mater. Form. 2 725-8
    • (2009) Int. J. Mater. Form. , vol.2 , pp. 725-728
    • Sahli, M.1    Malek, C.K.2    Gelin, J.C.3
  • 125
    • 78651594749 scopus 로고    scopus 로고
    • Numerical modelling of the polymers replication in micro-cavities by the roll embossing process
    • 10.1007/s12289-010-0843-8
    • Sahli M, Gelin J and Barrière T 2010 Numerical modelling of the polymers replication in micro-cavities by the roll embossing process Int. J. Mater. Form. 3 607-10
    • (2010) Int. J. Mater. Form. , vol.3 , pp. 607-610
    • Sahli, M.1    Gelin, J.2    Barrière, T.3
  • 127
    • 79961054101 scopus 로고    scopus 로고
    • Direct machining of micro patterns on nickel alloy and mold steel by vibration assisted cutting
    • 10.1007/s12541-011-0075-y
    • Kim G D and Loh B G 2011 Direct machining of micro patterns on nickel alloy and mold steel by vibration assisted cutting Int. J. Precis. Eng. Manuf. 12 583-8
    • (2011) Int. J. Precis. Eng. Manuf. , vol.12 , pp. 583-588
    • Kim, G.D.1    Loh, B.G.2
  • 128
    • 84864279994 scopus 로고    scopus 로고
    • Diamond micro chiseling of large-scale retroreflective arrays
    • 10.1016/j.precisioneng.2012.06.001 0141-6359
    • Brinksmeier E, Gläbe R and Schönemann L 2012 Diamond micro chiseling of large-scale retroreflective arrays Precis. Eng. 36 650-7
    • (2012) Precis. Eng. , vol.36 , pp. 650-657
    • Brinksmeier, E.1    Gläbe, R.2    Schönemann, L.3
  • 129
    • 79955586206 scopus 로고    scopus 로고
    • Improvement of machining quality of copper-plated roll mold by controlling temperature variation
    • 10.1016/S1003-6326(11)61057-1
    • Je T J, Jeon E C, Park S C, Choi D S, Whang K H and Kang M C 2011 Improvement of machining quality of copper-plated roll mold by controlling temperature variation Trans. Nonferr. Met. Soc. 21 s37-41
    • (2011) Trans. Nonferr. Met. Soc. , vol.21
    • Je, T.J.1    Jeon, E.C.2    Park, S.C.3    Choi, D.S.4    Whang, K.H.5    Kang, M.C.6
  • 130
    • 61449130599 scopus 로고    scopus 로고
    • Effect of conventional EDM parameters on the micromachined surface roughness and fabrication of a hot embossing master microtool
    • 10.1080/10426910802714373 1042-6914
    • Ali M Y and Mohammad A S 2009 Effect of conventional EDM parameters on the micromachined surface roughness and fabrication of a hot embossing master microtool Mater. Manuf. Process. 24 454-8
    • (2009) Mater. Manuf. Process. , vol.24 , pp. 454-458
    • Ali, M.Y.1    Mohammad, A.S.2
  • 131
    • 83455208284 scopus 로고    scopus 로고
    • Fabrication of microfluidic chip using micro-hot embossing with micro electrical discharge machining mold
    • 10.1002/pat.1823 1042-7147
    • Huang M S, Chiang Y C, Lin S C, Cheng H C, Huang C F, Shen Y K and Lin Y 2012 Fabrication of microfluidic chip using micro-hot embossing with micro electrical discharge machining mold Polym. Adv. Technol. 23 57-64
    • (2012) Polym. Adv. Technol. , vol.23 , pp. 57-64
    • Huang, M.S.1    Chiang, Y.C.2    Lin, S.C.3    Cheng, H.C.4    Huang, C.F.5    Shen, Y.K.6    Lin, Y.7
  • 132
    • 33745215629 scopus 로고    scopus 로고
    • Fabrication of high-aspect-ratio microscale mold inserts by parallel eDM
    • 10.1007/s00542-006-0131-1 0946-7076
    • Cao D M, Jiang J, Yang R and Meng W J 2006 Fabrication of high-aspect-ratio microscale mold inserts by parallel EDM Microsyst. Technol. 12 839-45
    • (2006) Microsyst. Technol. , vol.12 , pp. 839-845
    • Cao, D.M.1    Jiang, J.2    Yang, R.3    Meng, W.J.4
  • 133
    • 80051546743 scopus 로고    scopus 로고
    • Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser
    • 10.1016/j.mee.2011.03.023 0167-9317
    • Yao T F, Wu P H, Wu T M, Cheng C W and Yang S Y 2011 Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser Microelectron. Eng. 88 2908-12
    • (2011) Microelectron. Eng. , vol.88 , pp. 2908-2912
    • Yao, T.F.1    Wu, P.H.2    Wu, T.M.3    Cheng, C.W.4    Yang, S.Y.5
  • 134
    • 77952916166 scopus 로고    scopus 로고
    • Femtosecond laser micromachining and application of hot embossing molds for microfluid device fabrication
    • 10.2351/1.3263118 1042-346X
    • Choi H W, Bong S, Farson D F, Lu C and Lee L J 2009 Femtosecond laser micromachining and application of hot embossing molds for microfluid device fabrication J. Laser Appl. 21 196-204
    • (2009) J. Laser Appl. , vol.21 , pp. 196-204
    • Choi, H.W.1    Bong, S.2    Farson, D.F.3    Lu, C.4    Lee, L.J.5
  • 135
    • 77953883114 scopus 로고    scopus 로고
    • Fabrication of corrugated artificial insect wings using laser micromachined molds
    • 10.1088/0960-1317/20/7/075008 0960-1317 075008
    • Tanaka H and Wood R J 2010 Fabrication of corrugated artificial insect wings using laser micromachined molds J. Micromech. Microeng. 20 075008
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.7
    • Tanaka, H.1    Wood, R.J.2
  • 136
    • 78650126290 scopus 로고    scopus 로고
    • Fabrication of random microspikes on mold metal by ultrashort laser ablation for hydrophilic surface
    • 10.1143/JJAP.49.106503 0021-4922 106503
    • Noh J, Lee J H, Lee S Y and Na S 2010 Fabrication of random microspikes on mold metal by ultrashort laser ablation for hydrophilic surface Japan. J. Appl. Phys. 49 106503
    • (2010) Japan. J. Appl. Phys. , vol.49
    • Noh, J.1    Lee, J.H.2    Lee, S.Y.3    Na, S.4
  • 137
    • 75149197680 scopus 로고    scopus 로고
    • Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer
    • 10.1016/j.solmat.2009.11.028
    • Chen J Y and Sun K W 2010 Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer Sol. Energ. Mater. Sol. C. 94 629-33
    • (2010) Sol. Energ. Mater. Sol. C. , vol.94 , pp. 629-633
    • Chen, J.Y.1    Sun, K.W.2
  • 138
    • 76949084128 scopus 로고    scopus 로고
    • Direct e-beam writing of high aspect ratio nanostructures in PMMA: A tool for diffractive x-ray optics fabrication
    • 10.1016/j.mee.2009.11.091 0167-9317
    • Gorelick S, Vila-Comamala J, Guzenko V, Mokso R, Stampanoni M and David C 2010 Direct e-beam writing of high aspect ratio nanostructures in PMMA: a tool for diffractive x-ray optics fabrication Microelectron. Eng. 87 1052-6
    • (2010) Microelectron. Eng. , vol.87 , pp. 1052-1056
    • Gorelick, S.1    Vila-Comamala, J.2    Guzenko, V.3    Mokso, R.4    Stampanoni, M.5    David, C.6
  • 139
    • 79551705666 scopus 로고    scopus 로고
    • Hot embossing of photonic crystal polymer structures with a high aspect ratio
    • 10.1088/0960-1317/21/2/025017 0960-1317 025017
    • Schelb M, Vannahme C, Kolew A and Mappes T 2011 Hot embossing of photonic crystal polymer structures with a high aspect ratio J. Micromech. Microeng. 21 025017
    • (2011) J. Micromech. Microeng. , vol.21 , Issue.2
    • Schelb, M.1    Vannahme, C.2    Kolew, A.3    Mappes, T.4
  • 140
    • 77955847986 scopus 로고    scopus 로고
    • Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application
    • 10.1007/s00542-009-1012-1 0946-7076
    • Chung C K, Sher K, Syu Y and Cheng C 2010 Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application Microsyst. Technol. 16 1619-24
    • (2010) Microsyst. Technol. , vol.16 , pp. 1619-1624
    • Chung, C.K.1    Sher, K.2    Syu, Y.3    Cheng, C.4
  • 141
    • 33744542984 scopus 로고    scopus 로고
    • Fabrication of PMMA microchip of capillary electrophoresis by optimized UV-LIGA process
    • DOI 10.1088/1742-6596/34/1/145
    • Xuelin Z, Gang L, Ying X, Yuhua G and Yangchao T 2006 Fabrication of PMMA microchip of capillary electrophoresis by optimized UV-LIGA process J. Phys.: Conf. Ser. 34 875 (Pubitemid 43812535)
    • (2006) Journal of Physics: Conference Series , vol.34 , Issue.1 , pp. 875-879
    • Zhu, X.1    Liu, G.2    Xiong, Y.3    Guo, Y.4    Tian, Y.5
  • 142
    • 77956268230 scopus 로고    scopus 로고
    • Microfabrication of a nickel mold insert by a modified deep x-ray lithography process and its application to hot embossing
    • 10.1016/j.mee.2010.04.023 0167-9317
    • Lee B K, Kim J H, Kim D S, Chang S S and Kwon T H 2010 Microfabrication of a nickel mold insert by a modified deep x-ray lithography process and its application to hot embossing Microelectron. Eng. 87 2449-55
    • (2010) Microelectron. Eng. , vol.87 , pp. 2449-2455
    • Lee, B.K.1    Kim, J.H.2    Kim, D.S.3    Chang, S.S.4    Kwon, T.H.5
  • 143
    • 77955847613 scopus 로고    scopus 로고
    • Development of separated micromold system for an efficient replication of high aspect ratio microstructures
    • 10.1007/s00542-009-0990-3 0946-7076
    • Lee B-K and Kwon T 2010 Development of separated micromold system for an efficient replication of high aspect ratio microstructures Microsyst. Technol. 16 1385-92
    • (2010) Microsyst. Technol. , vol.16 , pp. 1385-1392
    • Lee, B.-K.1    Kwon, T.2
  • 144
    • 49949105395 scopus 로고    scopus 로고
    • Submicron polymer structures with x-ray lithography and hot embossing
    • 10.1007/s00542-007-0499-6 0946-7076
    • Mappes T, Worgull M, Heckele M and Mohr J 2008 Submicron polymer structures with x-ray lithography and hot embossing Microsyst. Technol. 14 1721-5
    • (2008) Microsyst. Technol. , vol.14 , pp. 1721-1725
    • Mappes, T.1    Worgull, M.2    Heckele, M.3    Mohr, J.4
  • 145
    • 84878542848 scopus 로고    scopus 로고
    • Fabrication of flexible light guide plate using CO2 laser LIGA-like technology
    • 10.1007/s00542-012-1665-z 0946-7076
    • Chung C K, Syu Y J, Wang H Y, Cheng C C, Lin S L and Tu K Z 2013 Fabrication of flexible light guide plate using CO2 laser LIGA-like technology Microsyst. Technol. 19 439-43
    • (2013) Microsyst. Technol. , vol.19 , pp. 439-443
    • Chung, C.K.1    Syu, Y.J.2    Wang, H.Y.3    Cheng, C.C.4    Lin, S.L.5    Tu, K.Z.6
  • 146
    • 34249700318 scopus 로고    scopus 로고
    • Microinjection molding of thermoplastic polymers: A review
    • DOI 10.1088/0960-1317/17/6/R02, PII S096013170733177X, R02
    • Julien G, Thierry C and Patrice M 2007 Microinjection molding of thermoplastic polymers: a review J. Micromech. Microeng. 17 R96-109 (Pubitemid 46838939)
    • (2007) Journal of Micromechanics and Microengineering , vol.17 , Issue.6
    • Giboz, J.1    Copponnex, T.2    Mele, P.3
  • 147
    • 79960031188 scopus 로고    scopus 로고
    • Fabrication of flexible mold for hybrid nanoimprint-soft lithography
    • 10.1016/j.mee.2010.12.107 0167-9317
    • Zhang J, Cui B and Ge H 2011 Fabrication of flexible mold for hybrid nanoimprint-soft lithography Microelectron. Eng. 88 2192-5
    • (2011) Microelectron. Eng. , vol.88 , pp. 2192-2195
    • Zhang, J.1    Cui, B.2    Ge, H.3
  • 148
    • 70149108495 scopus 로고    scopus 로고
    • Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography
    • 10.1088/0022-3727/42/11/115503 0022-3727 115503
    • Han J, Choi S, Lim J, Lee B and Kang S 2009 Fabrication of transparent conductive tracks and patterns on flexible substrate using a continuous UV roll imprint lithography J. Phys. D: Appl. Phys. 42 115503
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , Issue.11
    • Han, J.1    Choi, S.2    Lim, J.3    Lee, B.4    Kang, S.5
  • 149
    • 84864482749 scopus 로고    scopus 로고
    • Microstructure formation via roll-to-roll UV embossing using a flexible mould made from a laminated polymer-copper film
    • 10.1088/0960-1317/22/8/085010 0960-1317 085010
    • Zhong Z and Shan X 2012 Microstructure formation via roll-to-roll UV embossing using a flexible mould made from a laminated polymer-copper film J. Micromech. Microeng. 22 085010
    • (2012) J. Micromech. Microeng. , vol.22 , Issue.8
    • Zhong, Z.1    Shan, X.2
  • 150
    • 65349178341 scopus 로고    scopus 로고
    • High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis
    • 10.1117/12.809821
    • Ahn S H and Guo L J 2009 High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis Proc. SPIE 7205 72050U
    • (2009) Proc. SPIE , vol.7205
    • Ahn, S.H.1    Guo, L.J.2
  • 152
    • 58149348679 scopus 로고    scopus 로고
    • Design and fabrication of a microfluidic device for near-single cell mRNA isolation using a copper hot embossing master
    • 10.1007/s00542-008-0694-0 0946-7076
    • Nugen S R, Asiello P and Baeumner A 2009 Design and fabrication of a microfluidic device for near-single cell mRNA isolation using a copper hot embossing master Microsyst. Technol. 15 477-83
    • (2009) Microsyst. Technol. , vol.15 , pp. 477-483
    • Nugen, S.R.1    Asiello, P.2    Baeumner, A.3
  • 153
    • 33846202968 scopus 로고    scopus 로고
    • Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process
    • DOI 10.1016/j.mee.2006.11.004, PII S0167931706006265, VLSI Design and Test
    • Chang C Y, Yang S Y and Chu M H 2007 Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process Microelectron. Eng. 84 355-61 (Pubitemid 46097158)
    • (2007) Microelectronic Engineering , vol.84 , Issue.2 , pp. 355-361
    • Chang, C.-Y.1    Yang, S.-Y.2    Chu, M.-H.3
  • 154
    • 84859713926 scopus 로고    scopus 로고
    • Fabrication of seamless roller mold for continuous roller imprinting of microlens array films
    • 10.1109/JMEMS.2011.2178115 1057-7157
    • Lee Y C, Chen H W and Hsiao F B 2012 Fabrication of seamless roller mold for continuous roller imprinting of microlens array films J. Microelectromech. Syst. 21 316-23
    • (2012) J. Microelectromech. Syst. , vol.21 , pp. 316-323
    • Lee, Y.C.1    Chen, H.W.2    Hsiao, F.B.3
  • 155
    • 67349163246 scopus 로고    scopus 로고
    • Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating
    • 10.1016/j.mee.2009.01.008 0167-9317
    • Huang T C, Wu J T, Yang S Y, Huang P H and Chang S H 2009 Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating Microelectron. Eng. 86 615-8
    • (2009) Microelectron. Eng. , vol.86 , pp. 615-618
    • Huang, T.C.1    Wu, J.T.2    Yang, S.Y.3    Huang, P.H.4    Chang, S.H.5
  • 156
    • 77955516348 scopus 로고    scopus 로고
    • Dip coating cooperated with stepped rotating lithography to fabricate rigid microstructures onto a metal roller
    • 10.1016/j.mee.2010.01.003 0167-9317
    • Wu J T, Lai H C, Yang S Y, Huang T C and Wu S H 2010 Dip coating cooperated with stepped rotating lithography to fabricate rigid microstructures onto a metal roller Microelectron. Eng. 87 2091-6
    • (2010) Microelectron. Eng. , vol.87 , pp. 2091-2096
    • Wu, J.T.1    Lai, H.C.2    Yang, S.Y.3    Huang, T.C.4    Wu, S.H.5
  • 157
    • 79960056116 scopus 로고    scopus 로고
    • Fabrication of the metal nano pattern on plastic substrate using roll nanoimprint
    • 10.1016/j.mee.2011.02.006 0167-9317
    • Unno N and Taniguchi J 2011 Fabrication of the metal nano pattern on plastic substrate using roll nanoimprint Microelectron. Eng. 88 2149-53
    • (2011) Microelectron. Eng. , vol.88 , pp. 2149-2153
    • Unno, N.1    Taniguchi, J.2
  • 158
    • 72849148575 scopus 로고    scopus 로고
    • Fabrication of a seamless roll mold by direct writing with an electron beam on a rotating cylindrical substrate
    • 10.1116/1.3237141 0734-211X B
    • Taniguchi J and Aratani M 2009 Fabrication of a seamless roll mold by direct writing with an electron beam on a rotating cylindrical substrate J. Vac. Sci. Technol. B 27 2841-5
    • (2009) J. Vac. Sci. Technol. , vol.27 , pp. 2841-2845
    • Taniguchi, J.1    Aratani, M.2
  • 161
    • 78650873866 scopus 로고    scopus 로고
    • Experimental study on the fabrication of the light guide plate with hot embossing method
    • 10.4028/www.scientific.net/AMM.37-38.448 1660-9336
    • He Y, Zhang T, Fu J and Chen Z C 2010 Experimental study on the fabrication of the light guide plate with hot embossing method Appl. Mech. Mater. 37 448-52
    • (2010) Appl. Mech. Mater. , vol.37 , pp. 448-452
    • He, Y.1    Zhang, T.2    Fu, J.3    Chen, Z.C.4
  • 162
    • 42549123521 scopus 로고    scopus 로고
    • Fabrication of an LCD light guide plate using closed-die hot embossing
    • DOI 10.1088/0960-1317/18/3/035006, PII S0960131708591121
    • Wu C H and Lu C H 2008 Fabrication of an LCD light guide plate using closed-die hot embossing J. Micromech. Microeng. 18 035006 (Pubitemid 351591289)
    • (2008) Journal of Micromechanics and Microengineering , vol.18 , Issue.3 , pp. 035006
    • Wu, C.-H.1    Lu, C.-H.2
  • 166
    • 29344433242 scopus 로고    scopus 로고
    • Coupling efficiency enhancement in organic light-emitting devices using microlens array - Theory and experiment
    • DOI 10.1109/JDT.2005.858944
    • Peng H, Ho Y L, Yu X-J, Wong M and Kwok H-S 2005 Coupling efficiency enhancement in organic light-emitting devices using microlens array-theory and experiment J. Disp. Technol. 1 278-82 (Pubitemid 43001025)
    • (2005) IEEE/OSA Journal of Display Technology , vol.1 , Issue.2 , pp. 278-282
    • Peng, H.1    Ho, Y.L.2    Yu, X.-J.3    Wong, M.4    Kwok, H.-S.5
  • 168
    • 79957652039 scopus 로고    scopus 로고
    • Nanostructured thin films for anti-reflection applications
    • 10.1016/j.tsf.2011.01.110 0040-6090
    • Chen J Y and Sun K W 2011 Nanostructured thin films for anti-reflection applications Thin Solid Films 519 5194-8
    • (2011) Thin Solid Films , vol.519 , pp. 5194-5198
    • Chen, J.Y.1    Sun, K.W.2
  • 169
    • 67349105702 scopus 로고    scopus 로고
    • Fabrication of anti-reflection structure on protective layer of solar cells by hot-embossing method
    • 10.1016/j.solmat.2009.01.002 C
    • Han K S, Lee H, Kim D and Lee H 2009 Fabrication of anti-reflection structure on protective layer of solar cells by hot-embossing method Sol. Energ. Mater. Sol. C 93 1214-7
    • (2009) Sol. Energ. Mater. Sol. , vol.93 , pp. 1214-1217
    • Han, K.S.1    Lee, H.2    Kim, D.3    Lee, H.4
  • 170
    • 84871748224 scopus 로고    scopus 로고
    • Nanofeatured anti-reflective films manufactured using hot roller imprinting and self-assembly nanosphere lithography
    • 10.1016/j.optlastec.2012.10.033 0030-3992
    • Liu S-J and Chen W-A 2013 Nanofeatured anti-reflective films manufactured using hot roller imprinting and self-assembly nanosphere lithography Opt. Laser Technol. 48 226-34
    • (2013) Opt. Laser Technol. , vol.48 , pp. 226-234
    • Liu, S.-J.1    Chen, W.-A.2
  • 171
    • 84859950917 scopus 로고    scopus 로고
    • Optical simulation and fabrication of periodic triangular gratings for the enhancement of photovoltaic solar panels
    • 10.1117/12.916786
    • Dey R, Bordatchev E V, Tauhiduzzaman M and Reshef H 2012 Optical simulation and fabrication of periodic triangular gratings for the enhancement of photovoltaic solar panels Proc. SPIE 8256 82561Z
    • (2012) Proc. SPIE , vol.8256
    • Dey, R.1    Bordatchev, E.V.2    Tauhiduzzaman, M.3    Reshef, H.4
  • 172
    • 79955428360 scopus 로고    scopus 로고
    • Plastic lab on a chip for fluorescence excitation with integrated organic semiconductor lasers
    • 10.1364/OE.19.008179 1094-4087
    • Vannahme C, Klinkhammer S, Lemmer U and Mappes T 2011 Plastic lab-on-a-chip for fluorescence excitation with integrated organic semiconductor lasers Opt. Express 19 8179-86
    • (2011) Opt. Express , vol.19 , pp. 8179-8186
    • Vannahme, C.1    Klinkhammer, S.2    Lemmer, U.3    Mappes, T.4
  • 173
    • 33645156416 scopus 로고    scopus 로고
    • Polymer nanoengineering for biomedical applications
    • 10.1007/s10439-005-9011-6
    • Lee L J 2006 Polymer nanoengineering for biomedical applications Ann. Biomed. Eng. 34 75-88
    • (2006) Ann. Biomed. Eng. , vol.34 , pp. 75-88
    • Lee, L.J.1
  • 174
    • 9144224433 scopus 로고    scopus 로고
    • Microthermoforming of flexible, not-buried hollow microstructures for chip-based life sciences applications
    • 10.1049/ip-nbt:20040823
    • Truckenmuller R and Giselbrecht S 2004 Microthermoforming of flexible, not-buried hollow microstructures for chip-based life sciences applications IEE Proc.: Nanobiotechnol. 151 163-6
    • (2004) IEE Proc.: Nanobiotechnol. , vol.151 , pp. 163-166
    • Truckenmuller, R.1    Giselbrecht, S.2
  • 177
    • 33747014865 scopus 로고    scopus 로고
    • 3D tissue culture substrates produced by microthermoforming of pre-processed polymer films
    • DOI 10.1007/s10544-006-8174-8
    • Giselbrecht S, Gietzelt T, Gottwald E, Trautmann C, Truckenmüller R, Weibezahn K F and Welle A 2006 3D tissue culture substrates produced by microthermoforming of pre-processed polymer films Biomed. Microdevices 8 191-9 (Pubitemid 44203835)
    • (2006) Biomedical Microdevices , vol.8 , Issue.3 , pp. 191-199
    • Giselbrecht, S.1    Gietzelt, T.2    Gottwald, E.3    Trautmann, C.4    Truckenmuller, R.5
  • 178
    • 63049091465 scopus 로고    scopus 로고
    • Hot embossing of pyramidal micro-structures in PMMA for cell culture
    • 10.1002/pssa.200880476 0031-8965 A
    • Schneider P, Steitz C, Schäfer K H and Ziegler C 2009 Hot embossing of pyramidal micro-structures in PMMA for cell culture Phys. Status Solidi A 206 501-7
    • (2009) Phys. Status Solidi , vol.206 , pp. 501-507
    • Schneider, P.1    Steitz, C.2    Schäfer, K.H.3    Ziegler, C.4
  • 179
    • 79958145000 scopus 로고    scopus 로고
    • Hot embossing for fabrication of a microfluidic 3D cell culture platform
    • 10.1007/s10544-010-9496-0
    • Jeon J S, Chung S, Kamm R D and Charest J L 2011 Hot embossing for fabrication of a microfluidic 3D cell culture platform Biomed. Microdevices 13 325-33
    • (2011) Biomed. Microdevices , vol.13 , pp. 325-333
    • Jeon, J.S.1    Chung, S.2    Kamm, R.D.3    Charest, J.L.4
  • 180
    • 0035971924 scopus 로고    scopus 로고
    • Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection
    • DOI 10.1016/S0925-4005(00)00745-0, PII S0925400500007450
    • Lee G B, Chen S H, Huang G R, Sung W C and Lin Y H 2001 Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection Sensors Actuator B 75 142-8 (Pubitemid 32408938)
    • (2001) Sensors and Actuators, B: Chemical , vol.75 , Issue.1-2 , pp. 142-148
    • Lee, G.-B.1    Chen, S.-H.2    Huang, G.-R.3    Sung, W.-C.4    Lin, Y.-H.5
  • 181
    • 60849112814 scopus 로고    scopus 로고
    • Improvement in antigen-delivery using fabrication of a grooves-embedded microneedle array
    • 10.1016/j.snb.2008.11.017 B
    • Han M, Kim D K, Kang S H, Yoon H-R, Kim B-Y, Lee S S, Kim K D and Lee H G 2009 Improvement in antigen-delivery using fabrication of a grooves-embedded microneedle array Sensors Actuator B 137 274-80
    • (2009) Sensors Actuator , vol.137 , pp. 274-280
    • Han, M.1    Kim, D.K.2    Kang, S.H.3    Yoon, H.-R.4    Kim, B.-Y.5    Lee, S.S.6    Kim, K.D.7    Lee, H.G.8
  • 182
    • 78751481939 scopus 로고    scopus 로고
    • Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology
    • 10.1117/1.3268366 043065
    • Amaya S, Dao D V and Sugiyama S 2009 Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology J. Micro/Nanolith. MEMS MOEMS 8 043065
    • (2009) J. Micro/Nanolith. MEMS MOEMS , vol.8
    • Amaya, S.1    Dao, D.V.2    Sugiyama, S.3
  • 183
    • 76949087421 scopus 로고    scopus 로고
    • Fabrication of an all-polymer electrochemical sensor by using a one-step hot embossing procedure
    • 10.1016/j.mee.2009.11.137 0167-9317
    • Kafka J, Larsen N B, Skaarup S and Geschke O 2010 Fabrication of an all-polymer electrochemical sensor by using a one-step hot embossing procedure Microelectron. Eng. 87 1239-41
    • (2010) Microelectron. Eng. , vol.87 , pp. 1239-1241
    • Kafka, J.1    Larsen, N.B.2    Skaarup, S.3    Geschke, O.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.