Roll manufacturing of flexible microfluidic devices in thin PMMA and COC foils by embossing and lamination

Microsystem Technologies

Volumn 18, Issue 2, 2012, Pages 199-207

  Metwally, Khaled ^a   Robert, Laurent ^a   Queste, Samuel ^a   Bernard, Gauthier Manuel ^a   Chantal, Khan Malek ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DRY FILM RESIST; EMBOSSING TOOLS; GAINING MOMENTUM; HIGH-VOLUME MANUFACTURING; HOT ROLLS; MICRO-FLUIDIC DEVICES; MICRO-REACTOR; POLYDIMETHYLSILOXANE PDMS; THERMOPLASTIC POLYMER; ULTRA-THIN;

CHEMICAL REACTORS; FLEXIBLE MANUFACTURING SYSTEMS; MICROCHANNELS; OLEFINS; SILICON WAFERS;

LAMINATING;

EID: 84857356569     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-011-1358-z     Document Type: Conference Paper

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