Resin micromachining by roller hot embossing

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1381-1388

  Ishizawa, Naoya ^a   Idei, Kazuyoshi ^b   Kimura, Taro ^a   Noda, Daiji ^a   Hattori, Tadashi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b New Business Planning Group   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CYLINDERS (SHAPES); ELECTROFORMING; FORMING; INDUSTRIAL ENGINEERING; LITHOGRAPHY; MANUFACTURE; NICKEL; OPTICAL DESIGN; PHOTORESISTS; PLASTIC BOTTLES; RESINS; ROLLERS (MACHINE COMPONENTS);

HOT EMBOSSING; HOT EMBOSSING PROCESS; LIGA PROCESS; MANUFACTURING PROCESSES; MICRO PARTS; MICRO-PATTERNS; MICRON LEVEL; PROCESS OF MANUFACTURE; RESIST PATTERNING; ROLL SURFACES; UV EXPOSURE; UV-LITHOGRAPHY;

MOLDS;

EMBOSSING; LITHOGRAPHY; NICKEL; OPTIMIZATION; ROLLS;

EID: 49949083440     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0552-5     Document Type: Conference Paper

References (6)

1. Idei K, Mekaru H, Kitamura S, Murakoshi Y, Maeda R, Utumi Y, Hattori T (2005) High-aspect-ratio micro-structure technology, pp 242-243
2. Idei K, Mekaru H, Takeda H, Hattori T (2006a) Precise micro pattern replication by hot embossing. JSME Int J 49(1):69-73
3. Idei K, Ishizawa N, Noda D, Hattori T (2006b) Proceedings of micro-nano mechatoronichs and human science 2006 and micro-nano COE, pp 474-479
4. Sato N, Shimizu M, Hattori T (2006) Abstracts of the 3rd nano-micro processing society. The Society of Plant Engineers, Japan, pp 19-24
5. Mekaru H, Yamada T, En S, Hattori T (2002) Proceedings of the 19th sensor symposium 2002, pp 263-266
6. Mekaru H, Kusumi S, Sato N, Yamashita M, Shimada O, Hattori T (2004) Fabrication of mold master for spiral microcoil utilizing X-ray lithography of synchrotron radiation. Jpn J Appl Phys 43(6B):4036-4040