SCOPUS 정보 검색 플랫폼

Volumn 18, Issue 5, 2008, Pages

A compact system for large-area thermal nanoimprint lithography using smart stamps

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; PRESSURE MEASUREMENT;

COMPACT SYSTEMS; THERMAL NANOIMPRINT LITHOGRAPHY;

NANOIMPRINT LITHOGRAPHY;

LITHOGRAPHY; PRESSURE MEASUREMENT; STAMPS;

EID: 42549116624 PISSN: 09601317 EISSN: 13616439 Source Type: Journal
DOI: 10.1088/0960-1317/18/5/055018 Document Type: Article

Times cited : (11)

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