Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 8, Issue 4, 2009, Pages

  Amaya, Satoshi ^a   Viet Dao, Dzung ^b   Sugiyama, Susumu ^b  

^a TOWA Corporation   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Comb drive; Hot embossing; Machining; Microactuators; Polymers

Indexed keywords

ELECTROSTATICS; GOLD COATINGS; MICROACTUATORS; POLYMERS;

BULK MICROMACHINING TECHNOLOGY; COMB DRIVE; COMB-DRIVE ACTUATOR; GOLD LAYER; HOT-EMBOSSING; SILICON MOLDS; ULTRA-PRECISION CUTTING;

ELECTROSTATIC ACTUATORS;

EID: 78751481939     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3268366     Document Type: Article

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