Ultrasonic nanoimprint lithography: A new approach to nanopatterning

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 1, 2006, Pages

  Lin, Chien Hung ^a   Chen, Rongshun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Nanoimprint lithography; Nanopatterning; Ultrasonic nanoimprint lithography

Indexed keywords

ALUMINUM; ENERGY EFFICIENCY; ENERGY UTILIZATION; MOLDS; POLYMERS; THERMOPLASTIC ELASTOMERS;

NANOPATTERNING; ULTRASONIC NANOIMPRINT LITHOGRAPHY; ULTRASONIC SOURCE;

PHOTOLITHOGRAPHY;

EID: 33748547705     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2172992     Document Type: Article

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