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Volumn 42, Issue , 2013, Pages 55-61

Study on the replication accuracy of polymer hot embossed microchannels

Author keywords

Hot embossing; LIGA like; Microchannel; Microinjection molding; Replication accuracy

Indexed keywords

APPLIED FORCES; APPLIED LOADS; CONSTRAINT CONDITIONS; CYCLE TIME; HOT-EMBOSSING; LIGA LIKE; MICRO-FEATURE; MICRO-INJECTION MOLDING; MICROCHANNEL ARRAY; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; MICROFEATURES; MICROMOLDING; MOLDED PARTS; MOLDING CONDITIONS; PMMA FILMS; REPLICATION ACCURACIES; STRUCTURAL REQUIREMENTS;

EID: 84874274901     PISSN: 07351933     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.icheatmasstransfer.2012.12.008     Document Type: Article
Times cited : (18)

References (14)
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    • Hanemann, T.1    Heckele, M.2    Piotter, V.3
  • 5
    • 0031348356 scopus 로고    scopus 로고
    • Replication techniques for diffractive optical elements
    • Gale M.T. Replication techniques for diffractive optical elements. Microelectronic Engineering 1997, 34:321-339.
    • (1997) Microelectronic Engineering , vol.34 , pp. 321-339
    • Gale, M.T.1
  • 12
    • 0742268922 scopus 로고    scopus 로고
    • Gas pressurized hot embossing for transcription of micro-features
    • Chang J.H., Yang S.Y. Gas pressurized hot embossing for transcription of micro-features. Microsystem Technologies 2003, 10:76-80.
    • (2003) Microsystem Technologies , vol.10 , pp. 76-80
    • Chang, J.H.1    Yang, S.Y.2
  • 13
    • 0033732466 scopus 로고    scopus 로고
    • Hot embossing as a method for the fabrication of polymer high aspect ratio structures
    • Becker H., Heim U. Hot embossing as a method for the fabrication of polymer high aspect ratio structures. Sensors and Actuators A: Physical 2000, 83:130-135.
    • (2000) Sensors and Actuators A: Physical , vol.83 , pp. 130-135
    • Becker, H.1    Heim, U.2
  • 14
    • 1842690432 scopus 로고    scopus 로고
    • Atomic force microscopy study of micrometric pattern replica by hot embossing lithography
    • Laurence R., Christel M., Jean P.P. Atomic force microscopy study of micrometric pattern replica by hot embossing lithography. Microelectronic Engineering 2004, 71:272-276.
    • (2004) Microelectronic Engineering , vol.71 , pp. 272-276
    • Laurence, R.1    Christel, M.2    Jean, P.P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.