Large-strain thermo-mechanical behavior of cyclic olefin copolymers: Application to hot embossing and thermal bonding for the fabrication of microfluidic devices

Sensors and Actuators, B: Chemical

Volumn 155, Issue 1, 2011, Pages 93-105

  Jena, R K ^a,b   Chester, S A ^a,c   Srivastava, V ^a,c   Yue, C Y ^a,b   Anand, L ^a,c   Lam, Y C ^a,b  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

COC; Finite elements; Hot embossing; Numerical simulations; Thermal bonding; Thermo mechanical behavior

Indexed keywords

COC; FINITE ELEMENTS; HOT-EMBOSSING; NUMERICAL SIMULATION; THERMAL BONDING; THERMO-MECHANICAL BEHAVIORS;

COMPUTER SIMULATION; COPOLYMERIZATION; COPOLYMERS; FLUIDIC DEVICES; INDUSTRIAL APPLICATIONS; MECHANICAL ENGINEERING; MICROFLUIDICS; OLEFINS; STRAIN RATE;

BONDING;

EID: 79956370091     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.11.031     Document Type: Article

References (38)

1. V. Srivastava, S.A. Chester, N.M. Ames, and L. Anand A thermo-mechanically-coupled large-deformation theory for amorphous polymers in a temperature range which spans their glass transition International Journal of Plasticity 26 2010 1138 1182
2. P.A. Auroux, D. Iossifidis, and D.R. Reyes Micro total analysis systems. 2. Analytical standard operations and applications Analytical Chemistry 74 2002 2637 2652 (Pubitemid 34651166)
3. P.A. Auroux, Y. Koc, A. Demello, A. Manz, and P.J.R. Day Miniaturised nucleic acid analysis Lab on a Chip 4 2004 534 546 (Pubitemid 39657903)
4. T. Vilkner, D. Janasek, and A. Manz Micro total analysis systems. Recent developments Analytical Chemistry 76 2004 3373 3386 (Pubitemid 38747275)
5. L. Chen, A. Manz, and P. Day Total nucleic acid analysis integrated on microfluidic devices Lab on a Chip 7 2007 1413 1423 (Pubitemid 350013195)
6. A. Manz, J.C. Fettinger, E. Verpoorte, H. Lüdi, H.M. Widmer, and D.J. Harrison Micromachining of monocrystalline silicon and glass for chemical analysis systems A look into next century's technology or just a fashionable craze? Analytical Chemistry 10 1991 144 149
7. S.C. Jacobson, R. Hergenroder, L.B. Koutny, R.J. Warmack, and J.M. Ramsey Effects of injection schemes and column geometry on the performance of microchip electrophoresis devices Analytical Chemistry 66 1994 1107 1113 (Pubitemid 124005929)
8. G.B. Lee, S.H. Chen, G.R. Huang, W.C. Sung, and Y.H. Lin Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection Sensors and Actuators B: Chemical 75 2001 142 148
9. G.V. Kaigala, S. Ho, R. Penterman, and C.J. Backhouse Rapid prototyping of microfluidic devices with a wax printer Lab on a Chip 7 2007 384 387 (Pubitemid 46348320)
10. Y. Liu, D. Ganser, A. Schneider, R. Liu, P. Grodzinski, and N. Kroutchinina Microfabricated polycarbonate CE devices for DNA analysis Analytical Chemistry 73 2001 4196 4201 (Pubitemid 32830859)
11. L. Yi, W. Xiaodong, and Y. Fan Microfluidic chip made of COP (cyclo-olefin polymer) and comparison to PMMA (polymethylmethacrylate) microfluidic chip Journal of Materials Processing Technology 208 2008 63 69
12. D.A. Mair, E. Geiger, A.P. Pisano, J.M.J. Fréchet, and F. Svec Injection molded microfluidic chips featuring integrated interconnects Lab on a Chip 6 2006 1346 1354 (Pubitemid 44744300)
13. R.M. Mc Cormick, R.J. Nelson, M.G. Alonso-Amigo, D.J. Benvegnu, and H.H. Hooper Microchannel electrophoretic separations of DNA in injection-molded plastic substrates Analytical Chemistry 69 1997 2626 2630
14. L. Martynova, L.E. Locascio, M. Gaitan, G.W. Kramer, R.G. Christensen, and W.A. MacCrehan Fabrication of plastic microfluid channels by imprinting methods Analytical Chemistry 69 1997 4783 4789
15. S. Lan, H.J. Lee, E.H. Kim, J. Ni, S.H. Lee, X. Lai, J.H. Song, N.K. Lee, and M.G. Lee A parameter study on the micro hot-embossing process of glassy polymer for pattern replication Microelectronic Engineering 86 2009 2369 2374
16. M. Kopp, H. Crabtree, and A. Manz Developments in technology and applications of microsystems Current Opinion in Chemical Biology 1 1997 410 419 (Pubitemid 127437169)
17. C.L. do Lago, H.D.T. da Silva, C.A. Neves, J.G.A. Brito-Neto, and J.A.F. da Silva A dry process for production of microfluidic devices based on the lamination of laser-printed polyester films Analytical Chemistry 75 2003 3853 3858 (Pubitemid 36962121)
18. Y. Sun, Y. Kwok, and N. Nguyen Low-pressure, high-temperature thermal bonding of polymeric microfluidic devices Journal of Micromechanics and Microengineering 16 2006 1681 1688
19. X Zhu, G. Liu, Y. Guo, and Y. Tian Study of PMMA thermal bonding Microsystem Technologies 13 2007 403 407 (Pubitemid 46012838)
20. R. Kelly, T. Pan, and A. Woolley Phase-changing sacrificial materials for solvent bonding of high-performance polymeric capillary electrophoresis microchips Analytical Chemistry 77 2005 3536
21. L. Brown, T. Koerner, J.H. Horton, and R.D. Oleschuk Fabrication and characterization of poly(methylmethacrylate) microfluidic devices bonded using surface modifications and solvents Lab on a Chip 6 2006 66 73
22. A.A. Yussuf, I. Sbarski, J.P. Hayes, M. Solomon, and N. Tran Microwave welding of polymeric-microfluidic devices Journal of Micromechanics and Microengineering 15 2005 1692
23. K. Hawkins, and P. Yager Nonlinear decrease of background fluorescence in polymer thin-films - a survey of materials and how they can complicate fluorescence detection in μTAS Lab on a Chip 3 2003 248 252 (Pubitemid 41646531)
24. M.B. Wabuyele, S.M. Ford, W. Stryjewski, J. Barrow, and S.A. Soper Single molecule detection of double-stranded DNA in poly(methylmethacrylate) and polycarbonate microfluidic devices Electrophoresis 22 2001 3939 3948 (Pubitemid 33040212)
25. S. Llopis, W. Stryjewski, and S. Soper Near-infrared time-resolved fluorescence lifetime determinations in poly(methylmethacrylate) microchip electrophoresis devices Electrophoresis 25 2004 3810 3819 (Pubitemid 40012137)
26. M. Boyce, D. Parks, and A. Argon Large inelastic deformation of glassy polymers. Part I: rate dependent constitutive model Mechanics of Materials 7 1988 15 33 (Pubitemid 18665210)
27. L.E. Govaert, P.H.M. Timmermans, and W.A.M. Brekelmans The influence of intrinsic strain softening on strain localization in polycarbonate: modeling and experimental validation Journal of Engineering Materials and Technology-Transactions of the ASME 122 2000 177 185
28. L. Anand, and M. Gurtin A theory of amorphous solids undergoing large deformations, with application to polymeric glasses International Journal of Solids and Structures 40 2003 1465 1487 (Pubitemid 36242746)
29. L Anand, and N. Ames On modeling the micro-indentation response of an amorphous polymer International Journal of Plasticity 22 2006 1123 1170 (Pubitemid 43132940)
30. L. Anand, N.M. Ames, V. Srivastava, and S.A. Chester A thermo-mechanically coupled theory for large deformations of amorphous polymers. Part I: formulation International Journal of Plasticity 25 2009 1474 1494
31. N.M. Ames, V. Srivastava, S.A. Chester, and L. Anand A thermo-mechanically coupled theory for large deformations of amorphous polymers. Part 2: applications International Journal of Plasticity 25 2009 1495 1539
32. C.M. Kiew, W.J. Lin, T.J. Teo, J.L. Tan, W. Lin, and G. Yang Finite element analysis of PMMA pattern formation during hot embossing process IEEE/ASME International Conference on Advanced Intelligent Mechatronics AIM 2009 314 319
33. W. Young Analysis of the nanoimprint lithography with a viscous model Microelectronic Engineering 77 2005 405 411 (Pubitemid 40391487)
34. K. Lei, W. Li, and Y. Yam Effects of contact-stress on hot-embossed PMMA microchannel wall profile Microsystem Technologies 11 2005 353 357 (Pubitemid 40871894)
35. Y. Luo, M. Xu, X.D. Wang, and C. Liu Finte element analysis of PMMA microfluidic chip based on hot embossing technique Journal of Physics: Conference Series 48 2006 1102 1106
36. M. Worgull, K.K. Kabanemi, J.P. Marcotte, J.F. Hétu, and M. Heckele Modeling of large area hot embossing Microsystem Technologies 14 2008 1061 1066
37. B. Bilenberg, M. Hansen, D. Johansen, V. Özkapici, C. Jeppesen, P. Szabo, I.M. Obieta, O. Arroyo, J.O. Tegenfeldt, and A. Kristensen Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 23 2005 2944
38. Y.J. Juang, L.J. Lee, and K.W. Koelling Hot embossing in microfabrication. Part II: rheological characterization and process analysis Polymer Engineering and Science 42 2002 551 566 (Pubitemid 34269238)