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Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Volumn , Issue , 2010, Pages 316-319

Large area micro roller embossing using low cost flexible mould fabricated from polymer-metal film

(4) Shan, Xuechuan a Soh, Y C a Jin, L a Lu, C W a

a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER FOILS; ETCHING PROCESS; GLASS TRANSITION TEMPERATURE; LOW COSTS; METAL FILM; MICRO-FLUIDIC DEVICES; MINIMUM FEATURE SIZES; STARTING MATERIALS;

COPPER; FABRICATION; LIQUID CRYSTALS; METAL CLADDING; MOLDS; PHOTOLITHOGRAPHY; ROLLERS (MACHINE COMPONENTS);

GLASS TRANSITION;

EID: 77957838279 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (5)

References (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.