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Volumn 21, Issue 8, 2011, Pages

Analysis and characterization of demolding of hot embossed polymer microstructures

Author keywords

[No Author keywords available]

Indexed keywords

ANALYSIS AND CHARACTERIZATION; DEMOLDING; FINITE ELEMENT SIMULATIONS; HOT-EMBOSSING; LAB-ON-A-CHIP; MATERIAL PROPERTY; MICROMOLDING; MINIMUM VALUE; MOLD PATTERN; OTHER APPLICATIONS; POINT-OF-CARE DIAGNOSTICS; POLYMER MICROSTRUCTURES; SIDE-WALL FRICTION; TEST METHOD;

EID: 79961225715     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/8/085024     Document Type: Article
Times cited : (37)

References (37)
  • 2
    • 37549023085 scopus 로고    scopus 로고
    • Polymer microfabrication technologies for microfluidic systems heteroatom-tagged proteomics
    • Becker H and Gartner C 2008 Polymer microfabrication technologies for microfluidic systems heteroatom-tagged proteomics Anal. Bioanal. Chem. 390 89-111
    • (2008) Anal. Bioanal. Chem. , vol.390 , Issue.1 , pp. 89-111
    • Becker, H.1    Gartner, C.2
  • 6
    • 34648846719 scopus 로고    scopus 로고
    • High-temperature de-molding for cycle time reduction in hot embossing
    • Society of Plastics Engineers Annual Technical Conference: Plastics Encounter at ANTEC 2007, Conference Proceedings
    • Dirckx M, Taylor H K and Hardt D E 2007 High-temperature de-molding for cycle time reduction in hot embossing Society of Plastics Engineers Annual Technical Conf.: Plastics Encounter at ANTEC 2007 (Cincinnati, OH, USA, 6-11 May 2007) pp 2926-30 (Pubitemid 47458911)
    • (2007) Annual Technical Conference - ANTEC, Conference Proceedings , vol.5 , pp. 2926-2930
    • Dirckx, M.1    Taylor, H.K.2    Hardt, D.E.3
  • 8
    • 33847288208 scopus 로고    scopus 로고
    • Analysis of the demolding forces during hot embossing
    • DOI 10.1007/s00542-006-0225-9, HARMST, High Asprect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10-13 June 2005 - part 2
    • Guo Y, Liu G, Zhu X and Tian Y 2007 Analysis of the demolding forces during hot embossing Microsyst. Technol. 13 411-15 (Pubitemid 46324413)
    • (2007) Microsystem Technologies , vol.13 , Issue.5-6 , pp. 411-415
    • Guo, Y.1    Liu, G.2    Zhu, X.3    Tian, Y.4
  • 9
    • 33947588123 scopus 로고    scopus 로고
    • Study of the demolding process - Implications for thermal stress, adhesion and friction control
    • DOI 10.1088/0960-1317/17/1/002, PII S096013170733831X, 002
    • Guo Y, Liu G, Xiong Y and Tian Y 2007 Study of the demolding process & implications for thermal stress, adhesion and friction control J. Micromech. Microeng. 17 9-19 (Pubitemid 46476582)
    • (2007) Journal of Micromechanics and Microengineering , vol.17 , Issue.1 , pp. 9-19
    • Guo, Y.1    Liu, G.2    Xiong, Y.3    Tian, Y.4
  • 10
    • 30344467564 scopus 로고    scopus 로고
    • Large-scale hot embossing
    • DOI 10.1007/s00542-005-0012-z, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
    • Worgull M, Heckele M and Schomburg W K 2005 Large-scale hot embossing Microsyst. Technol. 12 110-5 (Pubitemid 43060925)
    • (2005) Microsystem Technologies , vol.12 , pp. 110-115
    • Worgull, M.1    Heckele, M.2    Schomburg, W.K.3
  • 12
    • 58849141352 scopus 로고    scopus 로고
    • Numerical analyses of peel demolding for UV embossing of high aspect ratio micro-patterning
    • Yeo L, Joshi S, Lam Y, Chan-Park M and Hardt D 2009 Numerical analyses of peel demolding for UV embossing of high aspect ratio micro-patterning Microsyst. Technol. 15 581-93
    • (2009) Microsyst. Technol. , vol.15 , Issue.4 , pp. 581-593
    • Yeo, L.1    Joshi, S.2    Lam, Y.3    Chan-Park, M.4    Hardt, D.5
  • 13
    • 21044453170 scopus 로고    scopus 로고
    • The lifetime comparison of Ni and Ni-PTFE moulding inserts with high aspect-ratio structure
    • DOI 10.1007/s00542-004-0404-5
    • Tian Y, Zhang P, Liu G and Tian X 2005 The lifetime comparison of Ni and Ni-PtFe moulding inserts with high aspect-ratio structure Microsyst. Technol. 11 261-4 (Pubitemid 40871879)
    • (2005) Microsystem Technologies , vol.11 , Issue.4-5 , pp. 261-264
    • Tian, Y.1    Zhang, P.2    Liu, G.3    Tian, X.4
  • 15
    • 77949877277 scopus 로고    scopus 로고
    • Replication performance of Si-N-DLC-coated Si micro-molds in micro-hot-embossing
    • Saha B, Liu E, Tor S B, Khun N W, Hardt D E and Chun J H 2010 Replication performance of Si-N-DLC-coated Si micro-molds in micro-hot-embossing J. Micromech. Microeng. 20 045007
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.4 , pp. 045007
    • Saha, B.1    Liu, E.2    Tor, S.B.3    Khun, N.W.4    Hardt, D.E.5    Chun, J.H.6
  • 19
    • 79961218505 scopus 로고    scopus 로고
    • Song Z 2007 Study of demolding process in thermal imprint lithography via numerical simulation and experimental approaches MS Thesis Mechanical Engineering, Louisiana State University, Baton Rouge, LA
    • (2007) MS Thesis
    • Song, Z.1
  • 20
    • 70349281483 scopus 로고    scopus 로고
    • Demolding temperature in thermal nanoimprint lithography
    • Park S, Song Z, Brumfield L, Amirsadeghi A and Lee J 2009 Demolding temperature in thermal nanoimprint lithography Appl. Phys. A 97 395-402
    • (2009) Appl. Phys. , vol.97 , Issue.2 , pp. 395-402
    • Park, S.1    Song, Z.2    Brumfield, L.3    Amirsadeghi, A.4    Lee, J.5
  • 21
    • 0000357002 scopus 로고
    • The phenomena of rupture and flow in solids
    • Griffith A A 1921 The phenomena of rupture and flow in solids Phil. Trans. R. Soc. A 221 163-98
    • (1921) Phil. Trans. R. Soc. , vol.221 , Issue.582-593 , pp. 163-198
    • Griffith, A.A.1
  • 24
    • 85040875608 scopus 로고
    • Cambridge: Cambridge University Press
    • Johnson K L 1985 Contact Mechanics (Cambridge: Cambridge University Press)
    • (1985) Contact Mechanics
    • Johnson, K.L.1
  • 25
    • 79961221668 scopus 로고    scopus 로고
    • Dirckx M 2010 Demolding of hot embossed polymer microstructures PhD Thesis Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA
    • (2010) PhD Thesis
    • Dirckx, M.1
  • 26
    • 67349213589 scopus 로고    scopus 로고
    • A thermo-mechanically coupled theory for large deformations of amorphous polymers: Part II. Applications
    • Ames N M, Srivastava V, Chester S A and Anand L 2009 A thermo-mechanically coupled theory for large deformations of amorphous polymers: part II. Applications Int. J. Plast. 25 1495-539
    • (2009) Int. J. Plast. , vol.25 , Issue.8 , pp. 1495-1539
    • Ames, N.M.1    Srivastava, V.2    Chester, S.A.3    Anand, L.4
  • 27
    • 77955517183 scopus 로고    scopus 로고
    • A thermo-mechanically-coupled large-deformation theory for amorphous polymers in a temperature range which spans their glass transition
    • Srivastava V, Chester S A, Ames N M and Anand L 2010 A thermo-mechanically-coupled large-deformation theory for amorphous polymers in a temperature range which spans their glass transition Int. J. Plast. 26 1138-82
    • (2010) Int. J. Plast. , vol.26 , Issue.8 , pp. 1138-1182
    • Srivastava, V.1    Chester, S.A.2    Ames, N.M.3    Anand, L.4
  • 28
    • 79958128096 scopus 로고    scopus 로고
    • Providence, RI, USA: Dassault Systèmes Simulia Corp.
    • 2008 Abaqus documentation (version 6.8) (Providence, RI, USA: Dassault Systèmes Simulia Corp.)
    • (2008) Abaqus documentation (version 6.8)
  • 29
    • 0035900150 scopus 로고    scopus 로고
    • Adhesion of a rigid punch to an incompressible elastic film
    • DOI 10.1021/la010409h
    • Yang F and Li J C M 2001 Adhesion of a rigid punch to an incompressible elastic film Langmuir 17 6524-9 (Pubitemid 35330635)
    • (2001) Langmuir , vol.17 , Issue.21 , pp. 6524-6529
    • Yang, F.1    Li, J.C.M.2
  • 30
    • 79961221329 scopus 로고    scopus 로고
    • Wang Q 2006 Process window characterization and process variation identification of micro embossing process MS Thesis Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA
    • (2006) MS Thesis
    • Wang, Q.1
  • 31
    • 0000477034 scopus 로고
    • Double-cantilever cleavage mode of crack propagation
    • Gillis P P and Gilman J J 1964 Double-cantilever cleavage mode of crack propagation J. Appl. Phys. 35 647-58
    • (1964) J. Appl. Phys. , vol.35 , Issue.3 , pp. 647-658
    • Gillis, P.P.1    Gilman, J.J.2
  • 32
    • 0011585825 scopus 로고
    • Stress intensity factors for crackline-loaded edge-crack specimens
    • Srawley J E and Gross B 1967 Stress intensity factors for crackline-loaded edge-crack specimens Mater. Res. Stand. 7 155-62
    • (1967) Mater. Res. Stand. , vol.7 , pp. 155-162
    • Srawley, J.E.1    Gross, B.2
  • 33
    • 0015589054 scopus 로고
    • An augmented double cantilever beam model for studying crack propagation and arrest
    • Kanninen M F 1973 An augmented double cantilever beam model for studying crack propagation and arrest Int. J. Fract. 9 83-92
    • (1973) Int. J. Fract. , vol.9 , Issue.1 , pp. 83-92
    • Kanninen, M.F.1
  • 34
    • 33845257283 scopus 로고
    • Corrections needed in double-cantilever beam tests for assessing the interlaminar failure of fibre-composites
    • Hashemi S, Kinloch A J and Williams J G 1989 Corrections needed in double-cantilever beam tests for assessing the interlaminar failure of fibre-composites J. Mater. Sci. Lett. 8 125-9
    • (1989) J. Mater. Sci. Lett. , vol.8 , Issue.2 , pp. 125-129
    • Hashemi, S.1    Kinloch, A.J.2    Williams, J.G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.