Electroosmotic flow pump on transparent polyimide substrate fabricated using hot embossing

Applied Mechanics and Materials

Volumn 300-301, Issue , 2013, Pages 1356-1359

  Saito, Hirofumi ^a   Komatsuzaki, Hiroki ^a   Ikoma, Ryuta ^a   Komori, Takayuki ^a   Kuroda, Keigo ^a   Kimura, Yohta ^a   Fukushi, Yudai ^a   Maenosono, Hirotaka ^a   Koide, Syohei ^a   Satano, Masahiro ^a   Nishioka, Yasushiro ^a  

^a NIHON UNIVERSITY   (Japan)

Author keywords

Electroosmotic flow; Hot embossing; Polyimide; Transparent microfluidics; UV ozone

Indexed keywords

CAPPING LAYER; ELECTROOSMOTIC FLOW; ENHANCED ADHESIONS; FABRICATION PROCESS; HOT-EMBOSSING; MICRO PUMP; MICRO-MACHINED; TRANSPARENT POLYIMIDES; UV OZONE; UV-OZONE TREATMENT;

ADHESION; ELECTROOSMOSIS; FABRICATION; MICROFLUIDICS; OZONE; POLYIMIDES; PUMPS; SUBSTRATES;

MICROCHANNELS;

EID: 84874706803     PISSN: 16609336     EISSN: 16627482     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMM.300-301.1356     Document Type: Conference Paper

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