-
2
-
-
44649157035
-
-
W.C. Chuang, A.C. Lee, and, C.T. Ho, Opt. Commun., 281, 3985 (2008).
-
(2008)
Opt. Commun.
, vol.281
, pp. 3985
-
-
Chuang, W.C.1
Lee, A.C.2
Ho, C.T.3
-
5
-
-
85194725690
-
-
D.Q. Li, H.M. Zhou, P. Zhao, and, Y. Li, Polym. Eng. Sci., 49, 2039 (2009).
-
(2009)
Polym. Eng. Sci.
, vol.49
, pp. 2039
-
-
Li, D.Q.1
Zhou, H.M.2
Zhao, P.3
Li, Y.4
-
6
-
-
0942300052
-
-
H. Yoshihiko, S. Yoshida, and, T. Nobuyuki, J. Vac. Sci. Technol. B, 21, 2765 (2003).
-
(2003)
J. Vac. Sci. Technol. B
, vol.21
, pp. 2765
-
-
Yoshihiko, H.1
Yoshida, S.2
Nobuyuki, T.3
-
7
-
-
33748539687
-
-
M. Worgull, M. Heckele, J.F. Hétu, and, K.K. Kabanemi, J. Microlith., Microfab., Microsyst., 5, 011005 (2006).
-
(2006)
J. Microlith., Microfab., Microsyst.
, vol.5
, pp. 011005
-
-
Worgull, M.1
Heckele, M.2
Hétu, J.F.3
Kabanemi, K.K.4
-
9
-
-
27944505464
-
-
H.D. Rowland, A.C Sun, P.R. Schunk, and, W.P King, J. Micromech. Microeng., 15, 2414 (2005).
-
(2005)
J. Micromech. Microeng.
, vol.15
, pp. 2414
-
-
Rowland, H.D.1
Sun, A.C.2
Schunk, P.R.3
King, W.P.4
-
10
-
-
29044433203
-
-
H.D. Rowland, W.P. King, A.C. Sun, and, P.R. Schunk, J. Vac. Sci. Technol. B, 23, 2958 (2005).
-
(2005)
J. Vac. Sci. Technol. B
, vol.23
, pp. 2958
-
-
Rowland, H.D.1
King, W.P.2
Sun, A.C.3
Schunk, P.R.4
-
11
-
-
33646061050
-
-
H.C. Scheer, N. Bogdanski, and, M. Wissen, J. Micromech. Microeng., 83, 843 (2006).
-
(2006)
J. Micromech. Microeng.
, vol.83
, pp. 843
-
-
Scheer, H.C.1
Bogdanski, N.2
Wissen, M.3
-
12
-
-
37149056902
-
-
Y. Hirai, Y. Onishi, T. Tanabe, M. Nishihata, T. Iwasaki, H. Kawata, and, Y. Iriye, J. Vac. Sci. Technol. B, 25, 2341 (2007).
-
(2007)
J. Vac. Sci. Technol. B
, vol.25
, pp. 2341
-
-
Hirai, Y.1
Onishi, Y.2
Tanabe, T.3
Nishihata, M.4
Iwasaki, T.5
Kawata, H.6
Iriye, Y.7
-
13
-
-
33947588123
-
-
Y.H. Guo, G. Liu, Y. Xiong, and, Y.C. Tian, J. Micromech. Microeng., 17, 9 (2007).
-
(2007)
J. Micromech. Microeng.
, vol.17
, pp. 9
-
-
Guo, Y.H.1
Liu, G.2
Xiong, Y.3
Tian, Y.C.4
-
14
-
-
43049113845
-
-
M. Worgull, J.F. Hétu, K.K. Kabanemi, and, M. Heckele, Microsyst. Technol., 14, 767 (2008).
-
(2008)
Microsyst. Technol.
, vol.14
, pp. 767
-
-
Worgull, M.1
Hétu, J.F.2
Kabanemi, K.K.3
Heckele, M.4
-
15
-
-
41549113346
-
-
Z.C. Song, J. Choi, B.H. You, J. Lee, and, S. Park, J. Vac. Sci. Technol. B, 26, 598 (2008).
-
(2008)
J. Vac. Sci. Technol. B
, vol.26
, pp. 598
-
-
Song, Z.C.1
Choi, J.2
You, B.H.3
Lee, J.4
Park, S.5
-
16
-
-
30344467564
-
-
M. Worgull, M. Heckele, and, W.K. Schomburg, Microsyst. Technol., 12, 110 (2005).
-
(2005)
Microsyst. Technol.
, vol.12
, pp. 110
-
-
Worgull, M.1
Heckele, M.2
Schomburg, W.K.3
-
18
-
-
36949035773
-
-
Y. He, J.Z. Fu, and, Z.C. Chen, J. Micromech. Microeng., 17, 2420 (2007).
-
(2007)
J. Micromech. Microeng.
, vol.17
, pp. 2420
-
-
He, Y.1
Fu, J.Z.2
Chen, Z.C.3
-
19
-
-
34147215988
-
-
B.Y. Jiang, L.J. Shen, J.H. Luo, and, C. Weng,. Opt. Precision Eng., 15, 180 (2007).
-
(2007)
Opt. Precision Eng.
, vol.15
, pp. 180
-
-
Jiang, B.Y.1
Shen, L.J.2
Luo, J.H.3
Weng, C.4
-
20
-
-
0034276367
-
-
L.W. Lin, T.K. Shia, and, C.J. Chiu, J. Micromech. Microeng., 10, 395 (2000).
-
(2000)
J. Micromech. Microeng.
, vol.10
, pp. 395
-
-
Lin, L.W.1
Shia, T.K.2
Chiu, C.J.3
|