Roll-to-roll hot embossing of microstructures

Microsystem Technologies

Volumn 17, Issue 4, 2011, Pages 619-627

  Velten, Thomas ^a   Bauerfeld, Frank ^a   Schuck, Herbert ^a   Scherbaum, Sabine ^b   Landesberger, Christof ^b   Bock, Karlheinz ^b  

^a FRAUNHOFER INSTITUTE FOR BIOMEDICAL ENGINEERING   (Germany)

^b Fraunhofer Institut fur Festkorpertechnologie   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

A-THERMAL; CONTINUOUS MODE; DISCONTINUOUS MODE; DRY ETCHING TECHNIQUES; FEATURE SIZES; HEATING PLATES; HOT-EMBOSSING; MECHANICAL FLEXIBILITY; MICRO PATTERN; MICROPATTERNED; ROLL TO ROLL; SILICON SUBSTRATES; STATE OF THE ART; STEADY STATE; TARGET TEMPERATURE;

HEATING; LITHOGRAPHY; PLASMA ETCHING; PLATES (STRUCTURAL COMPONENTS); SEMICONDUCTING SILICON COMPOUNDS;

SILICON WAFERS;

EID: 79958814740     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1158-x     Document Type: Conference Paper

References (11)

1. Barbucci R, Pasqui D, Wirsen A, Affrossman S, Curtis A, Tetta C (2003) Micro and nano-structured surfaces. J Mater Sci Mater Med 14:721-725 (Pubitemid 36976222)
2. Clark P, Connelly P, Moores GR (1992) Cell guidance by micropatterned adhesiveness in vitro. J Cell Sci 103:287-292
3. Curtis A, Wilkinson C (1997) Topographical control of cells. Biomaterials 18:1573-1583 (Pubitemid 28185057)
4. Landesberger C, Klink G, Schwinn G, Aschenbrenner R (2001) New dicing and thinning concept improves mechanical reliability of ultra thin silicon. Symposium and exhibition on advanced packaging materials. Georgia, Braselton
5. Landesberger C, Scherbaum S, Bock K (2007) Carrier techniques for thin wafer processing. In: Compound Semiconductor Mantech, ISBN 9781893580091. Conference on compound semiconductors manufacturing technology, Austin, May 2007
6. Lodish H, Berk A, Matsudaira P (2005) Molecular Cell Biology. 5th edn. Chap 1.1. Palgrave Macmillan, New York
7. Velten T, Schuck H, Richter M, Klink G, Bock K, Malek CK, Roth S, Scho H, Bolt PJ (2007) Microfluidics on foil: state of the art and new developments. In: Proceedings of IMechE, vol. 222. Part B: J Eng Manuf. http://journals. pepublishing.com/content/8w7l54p77815g325/
8. Velten T, Schuck H, Haberer W, Bauerfeld F (2010) Investigations on reel-to-reel hot embossing. Int J Adv Manuf Technol 47(1):73-80
9. Wanzenboeck H, Dominizi K, Erdösi D, Bertagnolli E (2006) Precision structured surfaces as functional carriers for in vitro cultures of living cells. In: Euspen Conference Proceedings, vol II. Baden bei Wien, Vienna, pp 377-380
10. Wood MA, Wilkinson CDW, Curtis ASG (2006) The effects of colloidal nanotopography on initial fibroblast adhesion and morphology. In: IEEE Transactions on Nanobiosience, vol 5(1), March 2006. http://ieeexplore.ieee.org/ xpls/abs-all.jsp?arnumber=1603530&tag=1
11. Yeo LP, Ng SH, Wang ZF, Xia HM, Wang ZP, Thang VS, Zhong ZW, de Rooij NF (2010) Investigation of hot roller embossing for microfluidic devices. J Micromech Microeng 20(1):015017