Fabrication of PMMA microchip of capillary electrophoresis by optimized UV-LIGA process

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 875-879

  Zhu, Xuelin ^a   Liu, Gang ^a   Xiong, Ying ^a   Guo, Yuhua ^a   Tian, Yangchao ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744542984     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/145     Document Type: Article

References (8)

1. Baldwin R P, Thomas J Roussel, Jr, et al 2002 Fully integrated on-chip electrochemical detection for capillary electrophoresis in a microfabricated device Anal.Chem. 74 3690-3696
2. Xiao Z X, Wu G-Y, Li z-H, et al 1999 Silicon-glass wafer bonding with silicon hydrophilic fusion bonding Sensors Actuators A 72 46-48
3. Quenzer H J, et al Silicon-silicon anodic-bonding with intermediate glass layers using spin on glasses IEEE Proc. Micro Electro Mechanical Syst. (MEMS'96) p 272-276
4. Marynova L, Laurie E Locascio, Micchael Gatan, et al 1997 Fabrication of plastic mcirofluid channels by imprinting methods Anal. Chem. 69 4783-4789
5. Lin Y-C, Hsiao-Ching Ho, Chien-Kai Tseng, et al 2001 A poly-methylmethacrylate electrophoresis microchip with sample preconcentrator J.Micromech. Microeng. 11 189-194
6. Horng R-H, Pin Han, Hung-Yu Chen, et al 2005 PMMA-based capillary electrophoresis electrochemical detection microchip fabrication J.Micromech. Microeng. 15 6-10
7. Chen Z, Yunhua Gao, Jinming Lin, et al 2004 Vacuum-assisted thermal bonding of plastic capillary electrophoresis microchip imprinted with stainless steel template J. Chromatography A 1038 239-245
8. Zhu X, Gang Liu, Yangchao Tian, et al 2004 New method of Layer-to-layer Bonding Technology of PMMA The 4thInt. Workshop on Microfactories(IWMF04), Oct 15-17, Shanghai, China