High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7205, Issue , 2009, Pages

  Ahna, Se Hyun ^a   Guo, L Jay ^b  

^a Dept of Mechanical Engineering ^*

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Mold separation; Nanoimprint lithography; Roll to plate; Roll to roll

Indexed keywords

DEMOLDING; FLEXIBLE PLASTIC SUBSTRATES; FLEXIBLE SUBSTRATES; FLUOROPOLYMER; HIGH-SPEED; MOLD SEPARATION; NANO-SCALE STRUCTURES; NEW PROCESS; PATTERN QUALITIES; RESIST MATERIALS; ROLL-TO-PLATE; ROLL-TO-ROLL; SEPARATION ANALYSIS; UV CURABLE LIQUIDS;

MOLDS; PHOTORESISTS; PLATES (STRUCTURAL COMPONENTS); POLYMERS; SEPARATION;

NANOIMPRINT LITHOGRAPHY;

EID: 65349178341     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.809821     Document Type: Conference Paper

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