-
1
-
-
85194774503
-
-
G.L.W. Cross, J. Phys. D Appl. Phys., 39, R363 (2006).
-
G.L.W. Cross, J. Phys. D Appl. Phys., 39, R363 (2006).
-
-
-
-
3
-
-
0031685664
-
-
R.W. Jaszewski, H, Schift, J. Gobrecht, and P. Smith, Microelectron. Eng., 42, 575 (1998)
-
(1998)
Microelectron. Eng
, vol.42
, pp. 575
-
-
Jaszewski, R.W.1
Schift, H.2
Gobrecht, J.3
Smith, P.4
-
4
-
-
84983150070
-
-
CMS. Torres, S. Zankovych, J. Seekamp, A.P, Kam, C.C. Cedeno, T. Hoffmann, J. Ahopelto, F. Reutfaer, K. Pfeiffer, G, Bleidiessel, G. Gruetzner, M.V. Maximov, and B. Heidari, Mater. Sci. Eng. C-Bio. S., 23, 23 (2003).
-
(2003)
Mater. Sci. Eng. C-Bio. S
, vol.23
, pp. 23
-
-
Torres, C.M.S.1
Zankovych, S.2
Seekamp, J.3
Kam, A.P.4
Cedeno, C.C.5
Hoffmann, T.6
Ahopelto, J.7
Reutfaer, F.8
Pfeiffer, K.9
Bleidiessel, G.10
Gruetzner, G.11
Maximov, M.V.12
Heidari, B.13
-
5
-
-
33646054264
-
-
K. Seunarine, N. Gadegaard, M.O. Riehle, and C.D.W, Wil- kinson, Microelectron. Eng., 83, 859 (2006).
-
(2006)
Microelectron. Eng
, vol.83
, pp. 859
-
-
Seunarine, K.1
Gadegaard, N.2
Riehle, M.O.3
Wil- kinson, C.D.W.4
-
6
-
-
0036502108
-
-
Y.J. Juang, L.J. Lee, and K.W. Koelling, Polym. Eng. Sci., 42, 539 (2002).
-
(2002)
Polym. Eng. Sci
, vol.42
, pp. 539
-
-
Juang, Y.J.1
Lee, L.J.2
Koelling, K.W.3
-
7
-
-
0036502497
-
-
Y.J. Juang, L.J. Lee, and K.W. Koelling, Polym. Eng. Sci., 42, 551 (2002).
-
(2002)
Polym. Eng. Sci
, vol.42
, pp. 551
-
-
Juang, Y.J.1
Lee, L.J.2
Koelling, K.W.3
-
8
-
-
32044442937
-
-
H. Schulz, M. Wissen, N. Bogdanski, H.C. Seheer, K. Mattes, and C. Friedrich, Microelectron. Eng., 83, 259 (2006).
-
(2006)
Microelectron. Eng
, vol.83
, pp. 259
-
-
Schulz, H.1
Wissen, M.2
Bogdanski, N.3
Seheer, H.C.4
Mattes, K.5
Friedrich, C.6
-
9
-
-
27944505464
-
-
H.D. Rowland, A.C. Sun, P.R. Schunk, and W.P. King, J. Micromech. Microeng., 15, 2414 (2005).
-
(2005)
J. Micromech. Microeng
, vol.15
, pp. 2414
-
-
Rowland, H.D.1
Sun, A.C.2
Schunk, P.R.3
King, W.P.4
-
10
-
-
29044433203
-
-
H.D. Rowland, W.P. King, A.C. Sun, and P.R. Schunk, J. Vac. Sci. Technol., 23, 2958 (2005).
-
(2005)
J. Vac. Sci. Technol
, vol.23
, pp. 2958
-
-
Rowland, H.D.1
King, W.P.2
Sun, A.C.3
Schunk, P.R.4
-
11
-
-
29044438113
-
-
H.-C. Seheer, N. Bogdanski, M. Wissen, T. Konishi, and Y. Hirai, J. Vac. Sci. Technol., 23, 2963 (2005).
-
(2005)
J. Vac. Sci. Technol
, vol.23
, pp. 2963
-
-
Seheer, H.-C.1
Bogdanski, N.2
Wissen, M.3
Konishi, T.4
Hirai, Y.5
-
12
-
-
29044433682
-
-
H.-C. Seheer, N. Bogdanski, and M. Wissen, Jpn. J. Appl. Phys., 44, 5609 (2005).
-
(2005)
Jpn. J. Appl. Phys
, vol.44
, pp. 5609
-
-
Seheer, H.-C.1
Bogdanski, N.2
Wissen, M.3
-
13
-
-
85194755973
-
-
H.-C. Seheer, N. Bogdanski, M. Wissen, T. Konishi, and Y. Hirai, Microelectron. Eng., S3, 843 (2006).
-
H.-C. Seheer, N. Bogdanski, M. Wissen, T. Konishi, and Y. Hirai, Microelectron. Eng., S3, 843 (2006).
-
-
-
-
17
-
-
0029185270
-
-
E.M. Arruda, M.C. Boyce, and R. Jayachandran, Mech. Mater., 19, 193 (1995).
-
(1995)
Mech. Mater
, vol.19
, pp. 193
-
-
Arruda, E.M.1
Boyce, M.C.2
Jayachandran, R.3
-
18
-
-
33751425231
-
-
G. Palm, R.B. Dupaix, and J. Castro, J. Eng. Mater.-T ASME, 12S, 559 (2006).
-
(2006)
J. Eng. Mater.-T ASME
, vol.12 S
, pp. 559
-
-
Palm, G.1
Dupaix, R.B.2
Castro, J.3
-
19
-
-
2142839323
-
-
K.-H. Von Hellwege, J. Hennig, and W. Knappe, Kolloid Z., 186, 29 (1962).
-
(1962)
Kolloid Z
, vol.186
, pp. 29
-
-
Von Hellwege, K.-H.1
Hennig, J.2
Knappe, W.3
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