A novel fabrication of polymer film with tapered sub-wavelength structures for anti-reflection

Microelectronic Engineering

Volumn 87, Issue 10, 2010, Pages 1951-1954

  Wu, Jing Tang ^a   Yang, Sen Yeu ^a   Deng, Wei Chih ^a   Chang, Wei Yi ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Anti reflection; Gas assisted hot embossing; Sub wavelength structures

Indexed keywords

ANODIC OXIDATION; ASPECT RATIO; COST EFFECTIVENESS; FABRICATION; POLYMER FILMS;

ANODIC ALUMINUM OXIDE; ANTI REFLECTION; COST-EFFECTIVE METHODS; GAS-ASSISTED HOT EMBOSSING; HIGH ASPECT RATIO; POLYCARBONATE FILMS; SUB-WAVELENGTH STRUCTURES; TWO-STEP ANODIZATION PROCESS;

SEMICONDUCTING FILMS;

EID: 84857556096     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.12.004     Document Type: Article

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